公开(公告)号：US5416592A

公开(公告)日：1995-05-16

申请号：US34779

申请日：1993-03-19

申请人： Shigeoki Mori ,  Keiichi Yokota

发明人： Shigeoki Mori ,  Keiichi Yokota

IPC分类号： G01R1/073 ,  G01R31/311 ,  G01B11/00 ,  G01N21/86

CPC分类号： G01R1/07314 ,  G01R31/311

摘要： A contact ring having probe pins is mounted in the top surface of a casing, and a wafer holder table is placed below the contact ring. A holder member comprising a longitudinally extended cylindrical body are provided in such a manner as to be free to move into and out of a space between the probe pins and the wafer holder table, parallel to the upper surface of a wafer and along guide rails protruding from a casing. An image of the probe pins which act as contact means and an image of the electrode pads of an IC chip on the wafer are input to a camera that is provided in the holder member. With the probe apparatus of the present invention, it is possible to position the wafer while viewing these images, and there is no need to provide a region for separate positioning. This facilitates the design of a smaller probe apparatus.

摘要翻译： 具有探针的接触环安装在壳体的顶表面中，并且晶片保持台放置在接触环的下方。 提供包括纵向延伸的圆筒体的保持器构件，以便平行于晶片的上表面自由地移动进入和离开探针和晶片保持台之间的空间，并沿着导轨突出 从外壳。 作为接触装置的探针的图像和晶片上的IC芯片的电极焊盘的图像被输入到设置在保持器构件中的照相机。 利用本发明的探针装置，可以在观看这些图像的同时定位晶片，并且不需要提供用于单独定位的区域。 这有助于设计较小的探针装置。

公开(公告)号：US5404111A

公开(公告)日：1995-04-04

申请号：US77392

申请日：1993-06-17

申请人： Shigeoki Mori ,  Wataru Karasawa ,  Hitoshi Fujihara ,  Masaru Suzuki ,  Keiichi Yokota

发明人： Shigeoki Mori ,  Wataru Karasawa ,  Hitoshi Fujihara ,  Masaru Suzuki ,  Keiichi Yokota

IPC分类号： G01R1/073 ,  G01R31/265 ,  G01R31/02

CPC分类号： G01R1/07314 ,  G01R31/2656

摘要： A probe apparatus which has a probe card having a plurality of probes, a wafer holder located above or beside the probe card, for holding a wafer to be examined, a tester head electrically connected to the probes of the probe card, a tester electrically connected to the tester head, for detecting electrical characteristics of the wafer from the data output from the wafer, and a CCD camera arranged to oppose the object, for detecting the position of the wafer.

摘要翻译： 一种具有探针卡的探针装置，具有多个探针，位于探针卡上方或旁边的晶片保持器，用于保持要检查的晶片，电连接到探针卡的探针的测试器头，电连接的测试仪 用于从晶片输出的数据检测晶片的电特性，以及配置成与物体相对的CCD照相机，用于检测晶片的位置。

公开(公告)号：US5665610A

公开(公告)日：1997-09-09

申请号：US650486

申请日：1996-05-17

申请人： Yoshiro Nakata ,  Shinichi Oki ,  Koichi Nagao ,  Kenzo Hatada ,  Shigeoki Mori ,  Takashi Sato ,  Kunio Sano

发明人： Yoshiro Nakata ,  Shinichi Oki ,  Koichi Nagao ,  Kenzo Hatada ,  Shigeoki Mori ,  Takashi Sato ,  Kunio Sano

IPC分类号： G01R31/28 ,  H01L21/66

CPC分类号： G01R31/2884 ,  G01R31/2831

摘要： A plated layer made of a metal which is hard to oxidize is formed on the surface of a check electrode of a semiconductor chip which is formed on a semiconductor wafer. A bump of a contactor is caused to come in contact with the check electrode on which the plated layer is formed in the direction perpendicular to the semiconductor chip. Then, a voltage is applied to the bump of the contactor to make a check such as burn-in on the semiconductor chip in a lump.

摘要翻译： 在形成在半导体晶片上的半导体芯片的检查电极的表面上形成由难以氧化的金属制成的镀层。 使接触器的凸起与垂直于半导体芯片的方向上形成有镀层的检查电极接触。 然后，向接触器的凸起施加电压，以一次性地对半导体芯片进行诸如老化的检查。

公开(公告)号：US5642432A

公开(公告)日：1997-06-24

申请号：US672240

申请日：1996-06-28

申请人： Shigeoki Mori

发明人： Shigeoki Mori

IPC分类号： G01R31/26 ,  G01R1/067 ,  H01L21/66 ,  G06K9/00

CPC分类号： G01R1/06705

摘要： A device for examining the electrode pads of a semiconductor chip comprises a table for supporting a semiconductor wafer including chips each having two lines being substantially straight and consisting of a plurality of electrode pads, a probe card having two lines corresponding to the lines of the electrode pads, and consisting of a plurality of probes, first and second TV cameras for photographing the lines of the electrode pads and probes, and a control unit responsive to signals supplied from the cameras, for calculating first imaginary lines corresponding to the lines of the electrode pads and second imaginary lines corresponding to the lines of the probes, and for recognizing deviation between the first and second imaginary lines. The table is moved by the deviation so as to align the lines of the pads with those of the probes.

摘要翻译： 一种用于检查半导体芯片的电极焊盘的装置，包括一个用于支撑半导体晶片的工作台，该工作台包括具有两条直线的芯片，每条芯片基本上是直的，由多个电极焊盘组成，探针卡具有对应于电极线的两条线 并且由多个探针组成，用于拍摄电极焊盘和探针的线的第一和第二电视摄像机，以及响应于从照相机提供的信号的控制单元，用于计算对应于电极线的第一假想线 衬垫和对应于探针的线的第二假想线，以及用于识别第一和第二假想线之间的偏差。 通过偏差移动工作台，以使焊盘的线与探头的线对齐。

公开(公告)号：US5321453A

公开(公告)日：1994-06-14

申请号：US923539

申请日：1992-08-03

申请人： Shigeoki Mori ,  Wataru Karasawa

发明人： Shigeoki Mori ,  Wataru Karasawa

IPC分类号： G01R1/073 ,  G01R31/02

CPC分类号： G01R1/07314

摘要： A probe apparatus having a probe card having plurality of probes, a member arranged above the probe card to hold an object to be probed, and a test head electrically connected to the probes of the probe card.

摘要翻译： 一种探针装置，具有具有多个探针的探针卡，设置在探针卡上方的用于保持要探测的物体的构件，以及电连接到探针卡的探针的测试头。