公开(公告)号：US4793241A

公开(公告)日：1988-12-27

申请号：US117464

申请日：1987-11-04

申请人： Shigeru Mano ,  Hiroshi Kagohashi

发明人： Shigeru Mano ,  Hiroshi Kagohashi

IPC分类号： F02B77/08 ,  F15B15/28 ,  G01B7/00 ,  G01D9/20 ,  F01B25/26 ,  F01B31/12

CPC分类号： F15B15/2861 ,  F02B77/087 ,  F15B15/2807 ,  G01D9/20 ,  Y10S91/04

摘要： In a piston position detector for a fluid pressure cylinder operating by fluid pressure such as air pressure or oil pressure, a permanent magnet is mounted on a piston sliding in a non-magnetic cylinder, and a magnetic detection element to respond to the magnetic field formed by the permenent magnet and to generate detection signals is mounted to any position of the cylinder. A magnetic induction piece in sheet form is interposed between the cylinder and the magnetic detection element, so that when the permanent magnet faces the front of the magnetic detection element, the magnetic induction piece is magnetically saturated by performing bypass induction of only a part of the magnetic flux of the permanent magnet to act on the magnetic detection element and most of the magnetic flux acts on the magnetic detection element. As the permanent magnet is shifted from the front of the magnetic detection element, the ratio of the magnetic flux subjected to the bypass induction through the magnetic induction piece is increased and the magnetic flux density acting on the magnetic detection element is rapidly decreased, thereby the piston position can be detected with precise accuracy.

摘要翻译： 在用于通过诸如空气压力或油压的流体压力操作的流体压力缸的活塞位置检测器中，永磁体安装在在非磁性气缸中滑动的活塞上，并且磁性检测元件响应于形成的磁场 并且产生检测信号被安装到气缸的任何位置。 片状的磁感应片介于气缸和磁性检测元件之间，因此当永磁体面向磁检测元件的前部时，磁感应片通过仅仅​​部分 永磁体的磁通量作用在磁检测元件上，并且大部分磁通量作用在磁检测元件上。 当永磁体从磁检测元件的前方偏移时，通过磁感应片进行旁路感应的磁通比增加，作用在磁检测元件上的磁通密度迅速降低， 可精确检测活塞位置。

公开(公告)号：US5134962A

公开(公告)日：1992-08-04

申请号：US524378

申请日：1990-05-16

申请人： Haruo Amada ,  Akihiro Kojima ,  Hiroshi Kagohashi ,  Atsuyuki Sakai ,  Katsumasa Shimura ,  Hisamitsu Maekawa

发明人： Haruo Amada ,  Akihiro Kojima ,  Hiroshi Kagohashi ,  Atsuyuki Sakai ,  Katsumasa Shimura ,  Hisamitsu Maekawa

IPC分类号： G03F7/16 ,  B05C5/00 ,  B05C11/08 ,  B05C11/10 ,  G11B5/842 ,  H01L21/00 ,  H01L21/027 ,  H01L21/30

CPC分类号： H01L21/6715 ,  B05C11/08

摘要： The present invention relates to a spin coating apparatus for feeding a clean liquid at a fixed rate. In any of the feeding apparatus in the prior art, no constituent other than a filter has the function of eliminating foreign matter, and the operation of feeding a liquid under precise control is not attained. This results in the problem of the mixing of the foreign matter (and air bubbles) in the feed liquid, and the problem of nonuniformity in a feed speed as well as a feed amount. As expedients for solving these problems, the present invention provides the functions of automatically sensing and excluding factors for the appearances of the foreign matters, and devices for automatically and precisely controlling feed control elements such as a pump, thereby feeding the clean liquid in a constant amount and at a constant speed.

摘要翻译： 本发明涉及一种用于以固定速率供给清洁液体的旋涂装置。 在现有技术中的任何一个进料装置中，除了过滤器之外的其它成分都不具有消除异物的功能，并且不能实现在精确控制下供给液体的操作。 这导致进料液体中异物（和气泡）的混合以及进料速度不均匀以及进料量的问题。 作为解决这些问题的方法，本发明提供了自动检测和排除外来物质的因素的功能，以及用于自动和精确地控制诸如泵的进料控制元件的装置，由此将清洁液体进料恒定 数量和恒定速度。

公开(公告)号：US20050253100A1

公开(公告)日：2005-11-17

申请号：US11188635

申请日：2005-07-26

申请人： Hiroto Yasue ,  Yasushi Hirako ,  Hiroshi Kagohashi ,  Kazuhiro Sugata

发明人： Hiroto Yasue ,  Yasushi Hirako ,  Hiroshi Kagohashi ,  Kazuhiro Sugata

IPC分类号： F16K1/52 ,  F16K7/17 ,  F16K31/124 ,  F16K31/143

CPC分类号： F16K31/1245 ,  F16K1/523 ,  F16K7/17

摘要： There is disclosed a flow control valve which regulates a flow rate by determining a stop position of a piston by contact in an opened state, and which enables remote and high-precision flow rate regulation. In a closed state, an urging force of a return spring acts on a piston, bringing a diaphragm into close contact with a valve seat. In this state, when compressed air is supplied into a pilot chamber, moving the piston, the diaphragm is brought out of contact with the valve seat. Then, the piston comes into contact with a nut and the diaphragm is stopped providing a fixed clearance between the diaphragm and the valve seat. An opened state is established. Of course, the nut can be moved to any desired position by means of a serve motor or the like, so that a position at which the piston comes into contact with the nut can be changed.

摘要翻译： 公开了一种流量控制阀，其通过在打开状态下通过接触确定活塞的停止位置来调节流量，并且能够进行远程和高精度的流量调节。 在关闭状态下，复位弹簧的作用力作用在活塞上，使隔膜与阀座紧密接触。 在这种状态下，当压缩空气被供应到先导室中时，移动活塞，隔膜与阀座脱离接触。 然后，活塞与螺母接触，隔膜停止，在隔膜和阀座之间提供固定间隙。 建立了一个开放的状态。 当然，也可以通过伺服马达等将螺母移动到任意的位置，从而可以改变活塞与螺母接触的位置。

公开(公告)号：USD439633S1

公开(公告)日：2001-03-27

申请号：US29112735

申请日：1999-10-22

申请人： Toshihiro Ikeo ,  Hiroshi Kagohashi ,  Tomohiro Ito

设计人： Toshihiro Ikeo ,  Hiroshi Kagohashi ,  Tomohiro Ito

公开(公告)号：US07090190B2

公开(公告)日：2006-08-15

申请号：US11188635

申请日：2005-07-26

申请人： Hiroto Yasue ,  Yasushi Hirako ,  Hiroshi Kagohashi ,  Kazuhiro Sugata

发明人： Hiroto Yasue ,  Yasushi Hirako ,  Hiroshi Kagohashi ,  Kazuhiro Sugata

IPC分类号： F16K31/363 ,  F16K51/00

CPC分类号： F16K31/1245 ,  F16K1/523 ,  F16K7/17

摘要： There is disclosed a flow control valve which regulates a flow rate by determining a stop position of a piston by contact in an opened state, and which enables remote and high-precision flow rate regulation. In a closed state, an urging force of a return spring acts on a piston, bringing a diaphragm into close contact with a valve seat. In this state, when compressed air is supplied into a pilot chamber, moving the piston, the diaphragm is brought out of contact with the valve seat. Then, the piston comes into contact with a nut and the diaphragm is stopped providing a fixed clearance between the diaphragm and the valve seat. An opened state is established. Of course, the nut can be moved to any desired position by means of a serve motor or the like, so that a position at which the piston comes into contact with the nut can be changed.

摘要翻译： 公开了一种流量控制阀，其通过在打开状态下通过接触确定活塞的停止位置来调节流量，并且能够进行远程和高精度的流量调节。 在关闭状态下，复位弹簧的作用力作用在活塞上，使隔膜与阀座紧密接触。 在这种状态下，当压缩空气被供应到先导室中时，移动活塞，隔膜与阀座脱离接触。 然后，活塞与螺母接触，隔膜停止，在隔膜和阀座之间提供固定间隙。 建立了一个开放的状态。 当然，也可以通过伺服马达等将螺母移动到任意的位置，从而可以改变活塞与螺母接触的位置。

公开(公告)号：US06289737B1

公开(公告)日：2001-09-18

申请号：US09449979

申请日：1999-11-26

申请人： Masayuki Kouketsu ,  Masayuki Watanabe ,  Hiroshi Kagohashi

发明人： Masayuki Kouketsu ,  Masayuki Watanabe ,  Hiroshi Kagohashi

IPC分类号： G01L700

CPC分类号： G05D16/2093

摘要： In a vacuum pressure control system, the vacuum pressure in a reaction chamber 10 is measured by vacuum pressure sensors 14 and 15 (S22), the measured value is changed at a set vacuum pressure changing speed commanded from the exterior or determined and stored in advance in a controller of the system (S24). The changed value is sequentially generated as an internal command. In response to the sequentially generated internal commands, a desired value of the feedback control is changed in sequence (S26), so that the feedback control is executed as follow-up control (S27). Accordingly, the vacuum pressure in the reaction chamber 10 can be uniformly changed to a desired vacuum at a set vacuum pressure changing speed.

摘要翻译： 在真空压力控制系统中，通过真空压力传感器14和15测量反应室10中的真空压力（S22），测量值以从外部命令的设定真空压力变化速度改变或预先确定和存储 在系统的控制器中（S24）。 作为内部命令顺序生成更改的值。 响应于顺序产生的内部命令，反馈控制的期望值按顺序改变（S26），从而作为后续控制执行反馈控制（S27）。 因此，能够以设定的真空压力变化速度将反应室10内的真空压力均匀地变更为期望的真空。

公开(公告)号：USD445886S1

公开(公告)日：2001-07-31

申请号：US29117538

申请日：2000-01-24

申请人： Yoji Mori ,  Hiroshi Kino ,  Yuji Matsuoka ,  Akira Murakumo ,  Hiroshi Kagohashi

设计人： Yoji Mori ,  Hiroshi Kino ,  Yuji Matsuoka ,  Akira Murakumo ,  Hiroshi Kagohashi