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公开(公告)号：US6061897A
公开(公告)日：2000-05-16
申请号：US97373
申请日：1998-06-15
申请人： Shigeru Shouji , Masahiro Sugiura
发明人： Shigeru Shouji , Masahiro Sugiura
CPC分类号： G11B5/6005 , G11B21/21 , G11B5/3103 , G11B5/3163 , Y10T29/49041 , Y10T29/49048 , Y10T29/49052
摘要： A first resist mask is formed on a rail, covering an area where none of a shallow surface and a deep surface are formed. A first etching process is performed to etch the rail not covered with the first resist mask to a depth corresponding to the shallow surface. Next, without removing the first resist mask, a second resist mask is formed covering an area where the shallow surface is formed. A second etching process is performed to etch the rail not covered with the first and second resist masks, to a depth corresponding to the deep surface. After the first and second etching processes, the first and second resist masks are removed from the rail.
摘要翻译： 第一抗蚀剂掩模形成在轨道上，覆盖不形成浅表面和深表面的区域。 执行第一蚀刻工艺以将未被第一抗蚀剂掩模覆盖的轨道蚀刻到对应于浅表面的深度。 接下来，在不去除第一抗蚀剂掩模的情况下，形成覆盖形成浅表面的区域的第二抗蚀剂掩模。 执行第二蚀刻工艺以将未被第一和第二抗蚀剂掩模覆盖的轨道蚀刻到对应于深表面的深度。 在第一和第二蚀刻工艺之后，将第一和第二抗蚀剂掩模从轨道上移除。
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2.发明授权Magneto-resistive reading head with two slanted longitudinal bias films and two slanted leads 失效具有两个倾斜纵向偏置薄膜和两个倾斜导线的磁阻式读数头
公开(公告)号：US5880910A
公开(公告)日：1999-03-09
申请号：US821270
申请日：1997-03-20
申请人： Shigeru Shouji , Atsushi Toyoda
发明人： Shigeru Shouji , Atsushi Toyoda
CPC分类号： G11B5/3932 , G11B5/3903 , G11B5/3967 , G11B5/398 , G11B5/5526 , G11B5/59683
摘要： On a lower magnetic shield film, a lower gap film is formed on which a conductive lead film and a magnet film is laminated. The magnet film forms a bias permanent magnet film for generating a single magnetic domain of a magneto-resistance film. This lead film is trenched to the lower gap layer (20) to form a trapezoid trench and separated leads. A sensor unit having the magneto-resistance film is formed conformally to the trench and electrically connected to the separated leads. An upper gap is formed on the sensor unit (28), and an upper shield is formed on the upper gap.
摘要翻译： 在下部磁屏蔽膜上形成下部间隔膜，在其上层叠导电性引线膜和磁性膜。 磁体膜形成用于产生磁阻膜的单个磁畴的偏置永磁体膜。 该引线膜被沟槽到下间隙层（20）以形成梯形沟槽和分离的引线。 具有磁阻膜的传感器单元与沟槽保形地形成并电连接到分离的引线。 在传感器单元（28）上形成上部间隙，并且在上部间隙上形成上部屏蔽。
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公开(公告)号：US5799388A
公开(公告)日：1998-09-01
申请号：US746850
申请日：1996-11-18
申请人： Shigeru Shouji
发明人： Shigeru Shouji
CPC分类号： G11B5/6005 , G11B5/10 , G11B5/3103 , G11B5/3166 , G11B33/10 , G11B5/4886 , Y10T29/49036 , Y10T29/49041
摘要： Thin film magnetic heads each having non-parallel asymmetric rails are manufactured by, forming a multiplicity of thin film magnetic transducers on a substrate, for a matrix distribution of magnetic heads to be produced from the substrate; testing all the magnetic transducers and discriminating them into good ones and failed ones; assigning a rail pattern to each of the magnetic heads, which pattern utilizes a good magnetic transducer; severing the substrate into respective rows; polishing an air bearing surface on each row; forming a resist layer on the air bearing surface of each row; positioning the rows in an exposing apparatus; exposing the assigned rail pattern on the resist layer in each magnetic head region of each row.
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公开(公告)号：US5734536A
公开(公告)日：1998-03-31
申请号：US726392
申请日：1996-10-04
申请人： Shigeru Shouji , Atsushi Toyoda
发明人： Shigeru Shouji , Atsushi Toyoda
CPC分类号： G11B5/3116 , G11B5/3113 , G11B5/3163 , G11B2005/0026
摘要： A lower pole gradually increases its thickness in a section from the pole front end surface toward the depth direction. An upper pole gradually increases its thickness in a section from the pole front end surface toward the depth direction. The lower pole has a constriction at an area deeper than the gradually increasing section.
摘要翻译： 下极在从极前端面向深度方向的截面中逐渐增加其厚度。 上极部从极前端面向深度方向逐渐增大其厚度。 下极在比逐渐增加的部分更深的区域处具有收缩。
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5.发明授权
公开(公告)号：US5722157A
公开(公告)日：1998-03-03
申请号：US673667
申请日：1996-06-25
申请人： Shigeru Shouji , Atsushi Toyoda
发明人： Shigeru Shouji , Atsushi Toyoda
CPC分类号： G11B5/3967 , G11B5/1272 , G11B5/1278 , G11B5/39 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048
摘要： In an induction- and MR-type composite magnetic head of the type that one of two shield films of an MR-type magnetic head serves as one of two cores of an induction-type magnetic head, conductive leads are thicker than an MR element so that steps are formed at the boundaries between an MR element sensitive region and the conductive leads. An upper gap layer has a constant thickness and has a recess 56 on its upper surface because of topographical transfer of the underlying steps. An upper shield--lower core layer has a downward convex at its lower surface, because of topographical transfer of the recess on the upper surface of the upper gap layer. However, the upper surface of the upper shield--lower core layer is flat and parallel to the MR element. Therefore, a write gap layer formed thereon is made flat and parallel to the MR element. Steps of the write gap can be removed and a record density can be increased.
摘要翻译： 在MR型磁头的两个屏蔽膜中的一个用作感应型磁头的两个芯之一的感应和MR型复合磁头中，导电线比MR元件厚， 该步骤形成在MR元件敏感区域和导电引线之间的边界处。 上间隙层具有恒定的厚度并且由于底层步骤的形貌转移而在其上表面上具有凹部56。 由于上间隙层的上表面上的凹槽的形貌转移，所以上下屏蔽芯层在其下表面具有向下凸起。 然而，上屏蔽 - 下芯层的上表面是平坦的并且平行于MR元件。 因此，形成在其上的写间隙层平坦并平行于MR元件。 可以移除写入间隙的步骤，并且可以增加记录密度。
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6.发明授权Thin film magnetic head having a lower pole shaped to improve reproduction characteristics 失效具有较低极点的薄膜磁头，以改善再现特性
公开(公告)号：US5978187A
公开(公告)日：1999-11-02
申请号：US556574
申请日：1995-11-13
申请人： Shigeru Shouji , Atsushi Toyoda
发明人： Shigeru Shouji , Atsushi Toyoda
CPC分类号： G11B5/3163 , G11B5/3116 , G11B5/313 , G11B5/02
摘要： The leading edge of a lower pole is constituted by a protruded central parallel portion, opposite end parallel portions, and slanted portions coupling the central parallel portion and the opposite end parallel portions. The width T.sub.wc of the central parallel portion is set to 10 to 25% of the total width T.sub.wa of the lower pole. The thickness P1' of the opposite end portion is set in the range from 3/1 or thicker to 3/2 or thinner than the thickness P1 of the central parallel portion.
摘要翻译： 下极的前缘由突出的中心平行部分，相对的端部平行部分和连接中心平行部分和相对端平行部分的倾斜部分构成。 中心平行部分的宽度Twc设定为下极总宽度Twa的10至25％。 相对端部的厚度P1'设定在3/1以上至3/2以下，或者比中央平行部的厚度P1更薄。
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公开(公告)号：US5831801A
公开(公告)日：1998-11-03
申请号：US787000
申请日：1997-01-21
申请人： Shigeru Shouji , Shuichi Sawada
发明人： Shigeru Shouji , Shuichi Sawada
CPC分类号： G11B5/313 , G11B5/3116 , G11B5/3153 , G11B5/3967 , Y10T29/49046 , Y10T29/49048
摘要： On a substrate, a lower pole is formed being embedded in a protective film on which a gap layer is formed. On this gap layer, a first upper pole is formed facing the lower pole. A protective film is formed coplanar to the upper surface of the first upper pole. On this protective film, a coil made of a plurality of coil layers is formed being embedded in an insulating film. On the insulating film, an upper core layer is formed whose tip portion constitutes a second upper pole stacked upon the first upper pole and magnetically coupled thereto. The first upper pole formed before the coil is formed and the second upper pole formed after the coil is formed, constitute an upper pole.
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公开(公告)号：US5668686A
公开(公告)日：1997-09-16
申请号：US579928
申请日：1995-12-28
申请人： Shigeru Shouji , Atsushi Toyoda
发明人： Shigeru Shouji , Atsushi Toyoda
CPC分类号： G11B5/398 , G11B5/3903 , G11B5/3967 , G11B5/488 , G11B5/5526 , G11B5/59683 , G11B5/012 , G11B5/3113 , G11B5/3116 , G11B5/3163 , G11B5/3932 , Y10T29/49043 , Y10T29/49044 , Y10T29/49048
摘要： A thin film magnetic head made of material having the magneto-resistance (MR) effect and its manufacturing method are provided. A lower shield layer for magnetically shielding an MR film is formed with a trench of a gull-wing shape having a flat bottom surface and opposite slanted surfaces formed on both sides of the bottom surface. The MR film is formed on the lower shield layer conformal to the gull-wing shape. The region of the MR film on the flat bottom surface forms an effective magnetic active region. A track center shift and the generation of a side-lobe in the off-track characteristic specific to an MR head can be suppressed and high density recording and reproducing of narrow tracks are possible.
摘要翻译： 提供由具有磁阻（MR）效应的材料制成的薄膜磁头及其制造方法。 用于磁屏蔽MR膜的下屏蔽层形成有具有扁平底表面的鸥翼形状的沟槽和形成在底表面的两侧上的相对的倾斜表面。 MR膜形成在与鸥翼形状一致的下屏蔽层上。 平坦的底面上的MR膜的区域形成有效的磁性活性区域。 可以抑制轨道中心偏移和在MR磁头特有的偏离磁道特性中产生旁瓣，并且可以实现窄轨迹的高密度记录和再现。
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9.发明授权Thin film magnetic head with special shaped pole and manufacture method thereof 失效具有特殊形状极的薄膜磁头及其制造方法
公开(公告)号：US6010753A
公开(公告)日：2000-01-04
申请号：US238998
申请日：1998-01-28
申请人： Shigeru Shouji , Atsushi Toyoda
发明人： Shigeru Shouji , Atsushi Toyoda
CPC分类号： G11B5/3163 , G11B5/3116 , G11B5/313 , G11B5/02
摘要： The leading edge of a lower pole is constituted by a protruded central parallel portion, opposite end parallel portions, and slanted portions coupling the central parallel portion and the opposite end parallel portions. The width T.sub.wc of the central parallel portion is set to 10 to 25% of the total width T.sub.wa of the lower pole. The thickness P1' of the opposite end portion is set in the range from 1/3 or thicker to 2/3 or thinner than the thickness P19 of the central parallel portion.
摘要翻译： 下极的前缘由突出的中心平行部分，相对的端部平行部分和连接中心平行部分和相对端平行部分的倾斜部分构成。 中心平行部分的宽度Twc设定为下极总宽度Twa的10至25％。 相对端部的厚度P1'设定在+ E，fra 1/3 + EE或较厚至+ E，fra 2/3 + EE或比中央平行部分的厚度P19更薄的范围内。
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10.发明授权Magnetoresistive head having a magnetoresistive element with bent portions located at points of high longitudinal bias magnetic field intensity 失效磁阻头具有磁阻元件，其具有位于高纵向偏置磁场强度的点处的弯曲部分
公开(公告)号：US5926348A
公开(公告)日：1999-07-20
申请号：US919032
申请日：1997-08-27
申请人： Shigeru Shouji , Atsushi Toyoda
发明人： Shigeru Shouji , Atsushi Toyoda
CPC分类号： G11B5/3932 , G11B5/3903 , G11B5/398 , G11B5/3163 , G11B5/3967 , G11B5/5526
摘要： A magneto-resistance type magnetic head having: a base; a longitudinal bias portion, formed over the base and having a first upper flat surface and a first slanted portion, for generating a longitudinal bias magnetic field; a lead portion laminated directly on the longitudinal bias portion so as to cover the first upper flat portion and to expose the first slanted portion of the longitudinal bias portion, wherein the lead portion is made of non-magnetic material and has a second upper flat surface and a second slanted portion, and wherein the first and second slanted portions collectively serve as a slanted surface; and a magneto-resistance material layer formed over the longitudinal bias portion and the lead portion, wherein the magneto-resistance material layer directly contacts an upper surface of the base and magnetically couples with the exposed longitudinal bias portion through the slanted surface of the longitudinal bias portion, wherein the magneto-resistance material layer is terminated on the slanted surface.
摘要翻译： 一种磁阻型磁头，具有：基座; 纵向偏置部分，形成在基座上并具有第一上平坦表面和第一倾斜部分，用于产生纵向偏置磁场; 引导部分，其直接层压在所述纵向偏置部分上以覆盖所述第一上部平坦部分并且暴露所述纵向偏置部分的所述第一倾斜部分，其中所述引线部分由非磁性材料制成并且具有第二上部平坦表面 和第二倾斜部分，并且其中第一和第二倾斜部分共同用作倾斜表面; 以及形成在所述纵向偏置部分和所述引线部分上的磁阻材料层，其中所述磁阻材料层直接接触所述基底的上表面并且通过所述纵向偏置的倾斜表面与暴露的纵向偏置部分磁耦合 部分，其中所述磁阻材料层在所述倾斜表面上终止。
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