公开(公告)号：US5114235A

公开(公告)日：1992-05-19

申请号：US553315

申请日：1990-07-17

申请人： Shigeyuki Suda ,  Naoto Abe

发明人： Shigeyuki Suda ,  Naoto Abe

IPC分类号： G01B11/00 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30

CPC分类号： G03F9/7023 ,  G03F9/7049

摘要： A method of detecting relative positional deviation of first and second substrates, wherein first and second marks with optical powers are formed on the first and second substrates. A radiation beam is projected to the first substrate and, as a result, the first and second marks produce a signal beam whose position of incidence upon a predetermined plane is changeable with the relative positional deviation of the first and second substrates. A sensor is disposed adjacent to the predetermined plane and receives the signal beam to produce an output signal corresponding to the position of incidence of the signal beam upon the sensor. Here, a reference mark is provided to produce, when irradiated with a radiation beam, a reference beam so that it advances along a light path substantially the same as the light path for the signal beam to the sensor when the first and second substrates are in a predetermined positional relation. The produced reference beam is received by the sensor, whereby a reference signal corresponding to the position of incidence of the reference beam upon the sensor is obtained. The relative position of the first and second substrates can be detected on the basis of the output signal and the reference signal.

公开(公告)号：US5327221A

公开(公告)日：1994-07-05

申请号：US919380

申请日：1992-07-29

申请人： Kenji Saitoh ,  Masakazu Matsugu ,  Shigeyuki Suda ,  Yukichi Niwa ,  Ryo Kuroda ,  Noriyuki Nose ,  Minoru Yoshii ,  Naoto Abe ,  Mitsutoshi Ohwada

发明人： Kenji Saitoh ,  Masakazu Matsugu ,  Shigeyuki Suda ,  Yukichi Niwa ,  Ryo Kuroda ,  Noriyuki Nose ,  Minoru Yoshii ,  Naoto Abe ,  Mitsutoshi Ohwada

IPC分类号： G03F9/00 ,  G01B9/02

CPC分类号： G03F9/7023 ,  G03F9/7049

摘要： A device for detecting the positional relationship between first and second objects in a predetermined direction includes a light source for emitting light in a direction to the first or second object, and a first detecting portion for detecting the position of incidence of a first light deflected by the first and second objects, wherein the position of incidence of the first light upon the first detecting portion is changeable with a change in the positional relationship between the first and second objects in the predetermined direction. A second detecting portion detects the position of incidence of a second light deflected by at least one of the first and second objects, wherein the state of the position of incidence of the second light resulting from a change in the positional relationship between the first and second objects, in the predetermined direction differs from that of the first light. On the basis of the detection by the first and second detecting portions, the positional relationship between the first and second objects is detected without being affected by an inclination thereof.

摘要翻译： 一种用于检测在预定方向上的第一和第二物体之间的位置关系的装置包括：用于沿与第一或第二物体的方向发射光的光源;以及第一检测部分，用于检测第一和第二物体偏转的第一光的入射位置 第一和第二物体，其中在第一检测部分上的第一光的入射位置随预定方向上第一和第二物体之间的位置关系的改变而改变。 第二检测部分检测由第一和第二物体中的至少一个偏转的第二光的入射位置，其中由第一和第二物体之间的位置关系的变化引起的第二光的入射位置的状态 在预定方向上的物体与第一光不同。 基于第一和第二检测部分的检测，检测第一和第二物体之间的位置关系，而不受其倾斜的影响。

公开(公告)号：US5325176A

公开(公告)日：1994-06-28

申请号：US875601

申请日：1992-04-28

申请人： Shigeyuki Suda ,  Kenji Saitoh ,  Masakazu Matsugu ,  Naoto Abe ,  Minoru Yoshii ,  Ryo Kuroda

发明人： Shigeyuki Suda ,  Kenji Saitoh ,  Masakazu Matsugu ,  Naoto Abe ,  Minoru Yoshii ,  Ryo Kuroda

IPC分类号： G03F9/00 ,  G01B11/02

CPC分类号： G03F9/7076

摘要： A device usable with a first object and a second object at least one of which is provided with a diffraction grating, for detecting the position of the second object relative to the first object, is disclosed. The device includes a light source for projecting a position detecting beam upon the first object; a beam detecting portion for receiving the position detecting beam after it is directed from the first object and being incident on the second object, the beam detecting portion receiving the position detecting beam to detect the position of the second object relative to the first object; wherein at least one diffraction grating is disposed in the path of the position detecting beam to be received by the beam detecting portion, which diffraction grating is effective to diffract the position detecting beam at least twice and wherein the beam detecting portion is disposed at a site effective not to receive unwanted diffraction light produced from the or at least one diffraction grating.

摘要翻译： 公开了一种可用于第一物体和第二物体的装置，其中至少一个具有用于检测第二物体相对于第一物体的位置的衍射光栅。 该装置包括用于将位置检测光束投射到第一物体上的光源; 光束检测部分，用于在从第一物体引导之后接收位置检测光束并入射到第二物体上，光束检测部分接收位置检测光束以检测第二物体相对于第一物体的位置; 其中至少一个衍射光栅设置在所述位置检测光束的路径中，以由所述光束检测部分接收，所述衍射光栅有效地将所述位置检测光束衍射至少两次，并且其中所述光束检测部分设置在位置 有效地不接收由该至少一个衍射光栅产生的不想要的衍射光。

公开(公告)号：US5028797A

公开(公告)日：1991-07-02

申请号：US413739

申请日：1989-09-28

申请人： Naoto Abe ,  Shigeyuki Suda ,  Koji Uda ,  Hirohisa Ohta ,  Noriyuki Nose

发明人： Naoto Abe ,  Shigeyuki Suda ,  Koji Uda ,  Hirohisa Ohta ,  Noriyuki Nose

IPC分类号： G01B11/00 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30

CPC分类号： G03F9/7096 ,  G03F9/7049

摘要： An alignment system for aligning a mask and a wafer into a predetermined positional relationship uses alignment marks provided on the mask and the water. In this system, light from a light source is directed to the alignment marks of the mask and the wafer and, then, the light from these alignment marks is detected by an accumulation type photoelectric converting device, for alignment of the mask and the wafer. The accumulation time of the photoelectric converting device is controlled to be sufficiently longer than or to be equal to a multiple, by an integral number, of the period of relative and natural vibration of the mask and the wafer. This makes it possible to reduce the effect of the relative vibration of the mask and the wafer upon the alignment result and, therefore, makes it possible to enhance the alignment precision.

公开(公告)号：US06476869B1

公开(公告)日：2002-11-05

申请号：US08185304

申请日：1994-01-19

申请人： Masayoshi Sekine ,  Shigeyuki Suda ,  Yasuyuki Unno

发明人： Masayoshi Sekine ,  Shigeyuki Suda ,  Yasuyuki Unno

IPC分类号： H04N5225

CPC分类号： H04N5/77 ,  H04N5/23248 ,  H04N5/23258 ,  H04N5/23267

摘要： In a system for transmitting a video signal obtained by a camera to a discrete device either via a recording/reproducing system or via a transmission line, an image processing system includes a circuit which is arranged within the camera to generate a photo-taking state signal indicating information on aberrations in particular; and a correction circuit which is arranged within a device for reproducing or receiving the video signal to correct the aberrations of the video signal in accordance with the photo-taking state signal.

摘要翻译： 在用于通过记录/再现系统或经由传输线将由相机获得的视频信号发送到分立设备的系统中，图像处理系统包括布置在相机内的电路，以产生拍摄状态信号 指出异常信息; 以及校正电路，其布置在用于再现或接收视频信号的装置中，以根据拍摄状态信号校正视频信号的像差。

公开(公告)号：US5499051A

公开(公告)日：1996-03-12

申请号：US498042

申请日：1995-06-30

申请人： Shigeyuki Suda ,  Yukichi Niwa ,  Tatsushi Katayama

发明人： Shigeyuki Suda ,  Yukichi Niwa ,  Tatsushi Katayama

IPC分类号： G03B15/00 ,  H04N13/00 ,  H04N13/02 ,  H04N5/225

CPC分类号： H04N13/0296 ,  H04N13/0239 ,  H04N13/0003 ,  H04N13/0055 ,  H04N13/0257 ,  H04N13/0456 ,  H04N2013/0081 ,  H04N2013/0088

摘要： A multi-lens imaging apparatus comprises a plurality of imaging optical systems in which an angle formed by optical axes is varied by inclining an optical axis of at least one optical system between a first state and a second state, and a plurality of image sensing means for detecting an image of an object imaged through the imaging optical systems. A photosensitive surface of the image sensing means corresponding to the at least one optical system is inclined with respect to the optical axis, and the inclined angle is established between an imaging surface being conjugated with the object surface in the first state and an imaging surface being conjugated with the subject surface in the second state, thereby reducing unsharpness amount generating at the periphery portions of the screen.

摘要翻译： 多透镜成像装置包括多个成像光学系统，其中由光轴形成的角度通过使至少一个光学系统的光轴倾斜在第一状态和第二状态之间而变化，并且多个图像感测装置 用于检测通过成像光学系统成像的物体的图像。 对应于至少一个光学系统的图像感测装置的感光表面相对于光轴倾斜，并且在第一状态下与被摄体表面共轭的成像表面和成像表面之间建立倾斜角度 在第二状态下与被摄体表面共轭，从而减少在屏幕的周边部分产生的不清晰度。

公开(公告)号：US5396335A

公开(公告)日：1995-03-07

申请号：US800271

申请日：1991-12-02

申请人： Masanobu Hasegawa ,  Kenji Saitoh ,  Shigeyuki Suda

发明人： Masanobu Hasegawa ,  Kenji Saitoh ,  Shigeyuki Suda

IPC分类号： G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  G01B11/00

CPC分类号： G03F9/7088 ,  G03F9/7076

摘要： A method of detecting a positional deviation between a mask and a wafer, wherein a radiation beam having a predetermined intensity distribution is projected to an alignment pattern of the mask whereby a signal beam is produced, and wherein the positional deviation of the mask and the wafer is determined on the basis of the signal beam. The improvements reside in detecting a deviation of the position of incidence of the radiation beam upon the mask from a predetermined position, on the basis of the signal beam; relatively positioning the radiation beam and the mask so as to substantially correct the detected deviation; and determining the positional deviation of the mask and the wafer by using the relatively positioned radiation beam.

摘要翻译： 一种检测掩模和晶片之间的位置偏差的方法，其中具有预定强度分布的辐射束被投射到掩模的对准图案，由此产生信号光束，并且其中掩模和晶片的位置偏差 是基于信号光束确定的。 改进在于基于信号光束检测辐射束对掩模的入射位置与预定位置的偏差; 相对地定位辐射束和掩模，以便基本上校正检测到的偏差; 以及通过使用相对定位的辐射束来确定掩模和晶片的位置偏差。

公开(公告)号：US5162656A

公开(公告)日：1992-11-10

申请号：US841790

申请日：1992-03-02

申请人： Masakazu Matsugu ,  Kenji Saitoh ,  Shigeyuki Suda ,  Ryo Kuroda ,  Yukichi Niwa ,  Noriyuki Nose

发明人： Masakazu Matsugu ,  Kenji Saitoh ,  Shigeyuki Suda ,  Ryo Kuroda ,  Yukichi Niwa ,  Noriyuki Nose

IPC分类号： G03F9/00

CPC分类号： G03F9/7023 ,  G03F9/7049

摘要： A device for detecting positional relationship between a first and second objects in a predetermined direction is disclosed. The device includes light source for projecting light upon the first object so that the light incident on the first object is deflected thereby and emanates therefrom in a direction perpendicular to the predetermined direction; a light receiving portion disposed in a direction in which the light having been deflected perpendicularly to the predetermined direction and having been deflected again by the second object advances, the light receiving portion being operable to detect the position of incidence of the light thereupon, wherein the position of the light upon the light receiving means is changeable with the position of incidence of the light upon the second object; and a detecting system for detecting the positional relationship between the first and second objects in the predetermined direction, on the basis of the detection by the light receiving portion.

摘要翻译： 公开了一种用于检测预定方向上的第一和第二物体之间的位置关系的装置。 该装置包括用于将光投射到第一物体上的光源，使得入射在第一物体上的光由此偏转，并在垂直于预定方向的方向上从其发出; 光接收部分沿着垂直于预定方向偏转并被第二物体再次偏转的方向设置的方向延伸，光接收部分可操作以检测其上的光的入射位置，其中， 光在光接收装置上的位置可随着第二物体上的光入射位置而改变; 以及检测系统，用于基于光接收部分的检测来检测第一和第二物体在预定方向上的位置关系。

公开(公告)号：US5148035A

公开(公告)日：1992-09-15

申请号：US789630

申请日：1991-11-12

申请人： Jun Hattori ,  Shigeyuki Suda

发明人： Jun Hattori ,  Shigeyuki Suda

IPC分类号： G01B11/00 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30

CPC分类号： G03F9/7049

摘要： A device for detecting a positional relationship between opposed first and second objects, with respect to a first direction perpendicular to the opposing direction. The device includes a light source for projecting light to the first and second objects, a photodetecting portion for receiving light from one of the first and second objects irradiated with the light from the light source, the photodetecting portion being operable to detect a predetermined parameter related to the light, which parameter is changeable with the positional relationship between the first and second objects with respect to the first direction, a first position detecting system for detecting a positional relationship between the first and second objects, with respect to a second direction perpendicular to the opposing direction of the first and second objects and having an angle with respect to the first direction, and a second position detecting system for detecting the positional relationship between the first and second objects with respect to the first direction, on the basis of the detection by the photodetecting system and the first position detecting system.

公开(公告)号：US5073017A

公开(公告)日：1991-12-17

申请号：US434578

申请日：1989-11-13

申请人： Shigeyuki Suda

发明人： Shigeyuki Suda

IPC分类号： G02B9/34 ,  G02B13/00 ,  G02B27/64

CPC分类号： G02B27/646

摘要： A telephoto lens is provided, in succession from the object side to the image surface side, with a first lens component having a positive refractive power and a second lens component having a negative refractive power. At least one curved lens surface of the second lens component is inclined relative to the optic axis to thereby deflect the image. Particularly the lens surface which near the image surface is inclined.

摘要翻译： 从物体侧到图像面侧依次设置有具有正折光力的第一透镜部件和具有负屈光力的第二透镜部件的长焦镜头。 第二透镜部件的至少一个弯曲透镜表面相对于光轴倾斜，从而偏转图像。 特别是靠近图像表面的透镜表面倾斜。