Method of forming a film on a substrate by chemical vapor deposition

    公开(公告)号:US11885022B2

    公开(公告)日:2024-01-30

    申请号:US17670832

    申请日:2022-02-14

    摘要: A film may be formed on a surface of a substrate by chemical vapor deposition in a reaction container provided with at least a first holding member that is capable of holding the substrate and a second holding member that is capable of holding the substrate independently from the first holding member, by:
    (a) forming a film on the surface of the substrate by chemical vapor deposition while holding the substrate by the first holding member;
    (b) moving at least one holding member among the first holding member and the second holding member in at least one direction of the upward direction and the downward direction to hold the substrate by the second holding member instead of the first holding member; and
    (c) forming a film on the surface of the substrate held by the second holding member by chemical vapor deposition.

    Carbide-coated carbon material
    2.
    发明授权

    公开(公告)号:US11897773B2

    公开(公告)日:2024-02-13

    申请号:US18004342

    申请日:2021-06-07

    摘要: A carbide-coated carbon material including a base material containing carbon as a main component and chlorine, and a carbide layer containing a carbide as a main component and chlorine, the carbide layer being disposed on the base material. The base material has, near an interface between the base material and the carbide layer, a base material buffer region where a chlorine concentration continuously changes in a direction toward the carbide layer. The carbide layer has, near the interface between the base material and the carbide layer, a carbide layer buffer region where the chlorine concentration continuously changes in a direction toward the base material. The carbide-coated carbon material has sufficient adhesion strength in the interface between the carbide layer and the base material containing carbon as a main component.

    CARBON BODY COATED WITH PYROLYTIC BORON NITRIDE, AND A CARBON HEATER INCLUDING THIS CARBON BODY
    4.
    发明申请
    CARBON BODY COATED WITH PYROLYTIC BORON NITRIDE, AND A CARBON HEATER INCLUDING THIS CARBON BODY 有权
    涂有磷酸硼酸的碳体和包含该碳体的碳加热器

    公开(公告)号:US20150359042A1

    公开(公告)日:2015-12-10

    申请号:US14690699

    申请日:2015-04-20

    IPC分类号: H05B3/00 H05B3/02

    摘要: A PBN-coated carbon heater is disclosed in which the carbon base body is anisotropic with respect to thermal expansion coefficient such that the maximum-to-minimum coefficient ratio is 1.02 through 1.50 for temperatures between 50 and 800 degree C.; preferably the carbon base body is also anisotropic with respect to electric resistivity such that the maximum-to-minimum resistivity ratio is greater than 1.04 but not greater than 1.51, and the direction in which the resistivity is maximum coincides the direction of the heater pattern in which the electricity runs the longest distance.

    摘要翻译: 公开了一种PBN涂覆的碳加热器,其中碳基体相对于热膨胀系数是各向异性的,使得在50和800℃之间的温度下,最大到最小系数比为1.02-1.50; 优选地,碳基体相对于电阻率也是各向异性的,使得最大至最小电阻率比大于1.04但不大于1.51,并且电阻率最大值的方向与加热器图案的方向重合 电力运行时间最长。