公开(公告)号：US5025168A

公开(公告)日：1991-06-18

申请号：US518420

申请日：1990-05-03

申请人： Shinichiro Aoki ,  Takeo Sato ,  Katsumasa Yamaguchi ,  Masaki Yamamoto

发明人： Shinichiro Aoki ,  Takeo Sato ,  Katsumasa Yamaguchi ,  Masaki Yamamoto

IPC分类号： G01B11/00 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30

CPC分类号： G03F9/7065 ,  G03F9/7049

摘要： A light source emits light having two components which ave slightly-different frequencies and which have different planes of polarization. The emitted light is separated into first, second, and third parts travelling along different paths respectively. First, second, and third reference gratings diffract the first, second, and third light parts respectively. First, second, and third illumination optical systems selectively transmit the diffracted first, second, and third light parts respectively. First, second, and third mark gratings having predetermined orientations are formed on a mask and are illuminated with the first, second, and third light parts coming from the first, second, and third illumination systems respectively. Similarly, first, second, and third mark gratings are formed on a wafer and are illuminated with the first, second, and third light parts coming from the first, second, and third illumination systems respectively. A first device detects first optical beat signals of the diffracted lights coming from the first mark grating on the mask and the first mark grating on the wafer. Similar detection is made for the diffracted lights coming from the other mark gratings on the mask and the wafer.

公开(公告)号：US5053628A

公开(公告)日：1991-10-01

申请号：US550925

申请日：1990-07-11

申请人： Masaki Yamamoto ,  Takeo Sato ,  Yoshiyuki Sugiyama ,  Shinichiro Aoki ,  Hiroyuki Takeuchi

发明人： Masaki Yamamoto ,  Takeo Sato ,  Yoshiyuki Sugiyama ,  Shinichiro Aoki ,  Hiroyuki Takeuchi

IPC分类号： G03F9/00

CPC分类号： G03F9/7065 ,  G03F9/7049

摘要： A position signal producing apparatus, for an apparatus for project-printing a pattern on reticle onto a wafer through a project lens with ultraviolet light, for producing a position signal indicative of position of the wafer, comprises: a laser emitting two different frequency components polarized orthogonally with each other which are splitted by a polarizing beam splitter. The first and second components are reflected by first and second mirrors respectively to produce interference fringes at a given place being on an annular region within a circle defined by field angle of the project lens on the reticle through wave plates for circularly-polarizing. Another interference fringes is formed on a diffraction grating of the wafer in correspondence with the interference fringes through the project lens and a lens for achromatizing the project lens at wavelengths of the components. Another interference fringes reflected by the diffraction grating is detected by a photodetector for producing the position signal. The interference fringes may formed on the wafer by another diffraction grating on the reticle illuminated by the first and second components in combination with polarizing elements provided between the reticle and the wafer in replace with the polarizing beam splitter and wave plates.

公开(公告)号：US5194744A

公开(公告)日：1993-03-16

申请号：US704406

申请日：1991-05-23

申请人： Shinichiro Aoki ,  Takeo Sato ,  Masaki Yamamoto ,  Hiroyuki Takeuchi ,  Nobuhiro Araki ,  Yoshiyuki Sugiyama

发明人： Shinichiro Aoki ,  Takeo Sato ,  Masaki Yamamoto ,  Hiroyuki Takeuchi ,  Nobuhiro Araki ,  Yoshiyuki Sugiyama

IPC分类号： G03F9/00 ,  H01L21/027 ,  H01L21/30

CPC分类号： G03F9/7065 ,  G03F9/7049

摘要： A reticle/wafer alignment system provided with a laser beam source for emitting laser beams, a first optical system portion for a reticle/wafer alignment which consists of a first optical sub-system for receiving laser beams from the laser beam source and projecting the received laser beams onto alignment marks formed on a substrate and made up of diffraction gratings and a second optical sub-system for gathering laser beams diffracted by the alignment marks to form an image thereof, a photoelectric detection portion for performing a photoelectric conversion of the gathered laser beams, a position detecting portion for measuring the position of the substrate based on a signal outputted from the photoelectric detection portion, a second optical system portion for an image processing which consists of a third optical sub-system for illuminating the alignment marks and a fourth optical sub-system having a television camera for observing the image of the alignment marks, and an image processing portion for performing an image processing of video signals outputted from the television camera. The first and second optical system portions are made in such a manner to have a common part thereof. Thereby, an entire alignment system can be made to be compact. Consequently, a position measurement accuracy can be improved.

公开(公告)号：US5062705A

公开(公告)日：1991-11-05

申请号：US580752

申请日：1990-09-11

申请人： Takeo Sato ,  Masaki Yamamoto ,  Shinichiro Aoki ,  Yoshiyuki Sugiyama ,  Yoshito Nakanishi ,  Hiroyuki Takeuchi

发明人： Takeo Sato ,  Masaki Yamamoto ,  Shinichiro Aoki ,  Yoshiyuki Sugiyama ,  Yoshito Nakanishi ,  Hiroyuki Takeuchi

IPC分类号： G01M11/02 ,  G03F7/20

CPC分类号： G01M11/0271 ,  G01M11/0264 ,  G03F7/70241 ,  G03F7/706

摘要： A first reticle is located at an object position of a lens to be evaluated. The first reticle is formed with a first diffraction grating. A stage supports the first reticle. A coherent light source illuminates a whole region of the first diffraction grating. A spatial filter blocks a 0-order component of diffraction light from the first diffraction grating. A second reticle is located at an image position of the lens and is formed with a second diffraction grating. A stage moves the second reticle within a projection range of the lens. Interference fringes are formed on the second reticle by re-diffraction by the lens. Moire fringes are caused by the second diffraction grating and the interference fringes. The moire fringes are observed.

公开(公告)号：US5231467A

公开(公告)日：1993-07-27

申请号：US762111

申请日：1991-09-19

申请人： Hiroyuki Takeuchi ,  Masaki Yamamoto ,  Takeo Sato ,  Yoshiyuki Sugiyama ,  Shinichiro Aoki

发明人： Hiroyuki Takeuchi ,  Masaki Yamamoto ,  Takeo Sato ,  Yoshiyuki Sugiyama ,  Shinichiro Aoki

IPC分类号： G03F9/00 ,  H01L21/68

CPC分类号： G03F9/7049 ,  H01L21/682

摘要： A position signal producing apparatus, for an apparatus for project-printing a pattern on a reticle onto a wafer through a project lens system with exposure light, for producing a position signal indicative of the position of the wafer is disclosed, wherein two different frequency components of alignment light whose frequencies are different from that of the exposure light are interfered with each other at a position alignment blank to form interference fringes having a given pitch. The interference fringes are projected onto a diffraction grating through an achromatizing optical system and the project lens system. Diffracted light returning from the diffraction grating is received by a photodetector which provides a light beat signal. A position deviation signal obtained by phase comparison of the light beat signal provides position alignment by controlling relative positions between the position alignment blank and the diffraction grating. Two light beams of the two different frequency components split by a polarized beam splitter are equalized in image converting condition, or image aspect, by a mirror, so that an accurate mixing of the two frequency components of light beams is performed at the position alignment blank.

公开(公告)号：US5155557A

公开(公告)日：1992-10-13

申请号：US718282

申请日：1991-06-20

申请人： Toshiyuki Iwazawa ,  Masaki Yamamoto ,  Yoshihito Nakanishi ,  Takeo Sato

发明人： Toshiyuki Iwazawa ,  Masaki Yamamoto ,  Yoshihito Nakanishi ,  Takeo Sato

IPC分类号： G03F9/00 ,  H01L21/027 ,  H01L21/30

CPC分类号： G03F9/7049

摘要： An alignment detection apparatus for detecting the alignment of a superfine exposure system including an interrupted emission light source. The apparatus is equipped with an output variation monitoring sensor to detect an output variation of the light source and further a photoelectric conversion device to perform the photoelectric conversion of the alignment light to generate discrete photoelectric conversion signals. Also included in the apparatus is an integration and hold circuit to integrate and peak-hold each of the photoelectric conversion signals. This peak-hold values are corrected on the basis of the detected light-source output variation due to the monitoring sensor to output stepwise continuous signals from which a harmonic component is removed by a filter so as to obtain a smooth analog waveform. This analog waveform is processed by a phase detector. The output of the phase detector allows an accurate alignment irrespective of using the interrupted emission light source.

公开(公告)号：US09111554B2

公开(公告)日：2015-08-18

申请号：US10824926

申请日：2004-04-14

申请人： Hideharu Tajima ,  Nobuyuki Takamori ,  Go Mori ,  Masaki Yamamoto

发明人： Hideharu Tajima ,  Nobuyuki Takamori ,  Go Mori ,  Masaki Yamamoto

IPC分类号： G11B7/24 ,  G11B7/257 ,  G11B7/243 ,  G11B7/258

CPC分类号： G11B7/257 ,  G11B7/24 ,  G11B7/243 ,  G11B7/258 ,  G11B2007/24304 ,  G11B2007/2432 ,  G11B2007/2571

摘要： An optical data recording medium, in which irradiation of a light beam is used for recording and/or reproducing data includes (i) a substrate having an a rise and/or a recess which are a light-incident surface, (ii) a reflective layer, provided on the light-incident surface of the substrate, for reflecting the light beam, (iii) a light absorption layer for converting, to heat, a light of the light beam to heat on the surface of the reflective layer, (iv) a reproducing layer, provided on the surface of the heat-light converting layer, having a transmittance that changes in accordance with a light intensity distribution of the light beam. The optical data recording medium is excellent in super-resolution property, and enables reproduction of a shorter mark length.

摘要翻译： 使用光束的照射用于记录和/或再现数据的光学数据记录介质包括（i）具有作为光入射表面的上升和/或凹部的基板，（ii）反射 层，设置在基板的光入射面上，用于反射光束;（iii）光吸收层，用于转换加热光束的光以在反射层的表面上加热;（iv） ）再现层，其设置在所述热光转换层的表面上，具有根据所述光束的光强度分布而变化的透射率。 光学数据记录介质具有优异的超分辨率特性，并且能够再现更短的标记长度。

公开(公告)号：US08691357B2

公开(公告)日：2014-04-08

申请号：US13497866

申请日：2010-09-27

申请人： Naoki Taya ,  Takehito Nakayama ,  Hideharu Tajima ,  Yasuhiro Harada ,  Masaki Yamamoto ,  Hirohisa Yamada

发明人： Naoki Taya ,  Takehito Nakayama ,  Hideharu Tajima ,  Yasuhiro Harada ,  Masaki Yamamoto ,  Hirohisa Yamada

IPC分类号： G11B7/24

CPC分类号： G11B7/256 ,  G11B7/24024 ,  G11B7/24056 ,  G11B7/24065

摘要： A pressure-sensitive adhesive sheet 1 for an optical data recording medium D1 from which a signal with a mark length shorter than the resolution limit of an optical system of a reproducing device is capable of being reproduced by reproduction light emitted during reproducing, the pressure-sensitive adhesive sheet 1 having an adhesive transparent resin layer 11 to be disposed on an data recording layer 3 of the optical data recording medium D1, the transparent resin layer 11 having a (meth)acrylate copolymer containing no acidic group as a main component, the transparent resin layer 11 having a storage elastic modulus at 23° C. of 1.5×105 Pa or less and a gel fraction of 68 wt % or more. The transparent resin layer 11 of this pressure-sensitive adhesive sheet 1 for an optical data recording medium can be used for producing an optical data recording medium which can reproduce from a mark with a length shorter than the resolution of an optical system of a reproducing device, and which is stable against changes in the external environment when responding to status of use.

摘要翻译： 用于光学数据记录介质D1的压敏粘合片1，其标记长度短于再现装置的光学系统的分辨率极限的信号能够通过再现期间发出的再现光再现， 具有要设置在光学数据记录介质D1的数据记录层3上的粘合剂透明树脂层11的粘合片1，具有不含酸性基团的（甲基）丙烯酸酯共聚物作为主要成分的透明树脂层11， 在23℃下的储能弹性模量为1.5×10 5 Pa以下，凝胶率为68重量％以上的透明树脂层11。 用于光学数据记录介质的该粘合片1的透明树脂层11可以用于制造光学数据记录介质，该光学数据记录介质可以从长度短于再现装置的光学系统的分辨率的标记再现 对应用状况的外部环境变化是稳定的。

公开(公告)号：US08400896B2

公开(公告)日：2013-03-19

申请号：US13138519

申请日：2010-02-22

申请人： Atsushi Etoh ,  Tetsuya Okumura ,  Hideharu Tajima ,  Shigemi Maeda ,  Yoshihisa Adachi ,  Tetsuya Hayashi ,  Yasuhiro Harada ,  Takashi Arimoto ,  Ikuo Nakano ,  Masaki Yamamoto ,  Hirohisa Yamada

发明人： Atsushi Etoh ,  Tetsuya Okumura ,  Hideharu Tajima ,  Shigemi Maeda ,  Yoshihisa Adachi ,  Tetsuya Hayashi ,  Yasuhiro Harada ,  Takashi Arimoto ,  Ikuo Nakano ,  Masaki Yamamoto ,  Hirohisa Yamada

IPC分类号： G11B15/04

CPC分类号： G11B7/00736 ,  G11B7/08511 ,  G11B7/24038 ,  G11B19/127 ,  G11B2007/0013 ,  G11B2220/235

摘要： An invention disclosed includes a layer number obtaining section (222) for determining which information storage layer (L1) has been accessed and a layer type identifying section (223) for identifying a type of the information storage layer (L1) determined by the layer number obtaining section (222). With the configuration, even in a case where an information recording and reproducing apparatus accesses an information storage layer different from an intended information storage layer by false operation or the like, it is still possible to dissolve mismatching between a recording or reproduction control scheme being set up and a recording or reproduction control scheme suitable for the information storage layer thus accessed.

摘要翻译： 所公开的发明包括用于确定已经访问了哪个信息存储层（L1）的层号获取部分（222）和用于识别由层号确定的信息存储层（L1）的类型的层类型识别部分（223） 获取部分（222）。 利用这种配置，即使在信息记录和再现装置通过错误操作等访问与预期信息存储层不同的信息存储层的情况下，仍然可以解决设置的记录或再现控制方案之间的不匹配 以及适合于如此访问的信息存储层的记录或再现控制方案。

公开(公告)号：US20130014022A1

公开(公告)日：2013-01-10

申请号：US13638022

申请日：2011-03-08

申请人： Masahide Takasugi ,  Masaki Yamamoto ,  Misuzu Kawamura

发明人： Masahide Takasugi ,  Masaki Yamamoto ,  Misuzu Kawamura

IPC分类号： G06F3/048 ,  G06F3/041

CPC分类号： G06F3/04845 ,  G06F3/04883 ,  H04N21/4126 ,  H04N21/632

摘要： A first communication terminal includes a first communication device, a first touch panel for displaying motion picture contents, and a first processor for accepting input of a hand-drawing image. The first processor transmits a hand-drawing image input during display of the motion picture contents and start information for identifying a point of time when input of the hand-drawing image at the motion picture contents is started to a second communication terminal. The second communication terminal includes a second touch panel for displaying motion picture contents, a second communication device for receiving the hand-drawing image and start information from the first communication terminal, and a second processor for displaying the hand-drawing image from the point of time when input of the hand-drawing image at the motion picture contents is started on the second touch panel, based on the start information.

摘要翻译： 第一通信终端包括第一通信设备，用于显示运动图像内容的第一触摸面板和用于接受手绘图像的输入的第一处理器。 第一处理器在显示运动图像内容期间传送手绘图像输入，以及开始信息，用于识别当运动图像内容的手绘图像的输入开始到第二通信终端时的时间点。 第二通信终端包括用于显示运动图像内容的第二触摸面板，用于从第一通信终端接收手绘图像和开始信息的第二通信装置，以及从第一通信终端显示手绘图像的第二处理器 基于开始信息，在第二触摸面板上开始输入动画图像内容的手绘图像的时间。