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32 条记录 (耗时 0.02 秒)

    Optical alignment detection apparatus
    1.
    发明授权
    Optical alignment detection apparatus 失效
    光学对准检测装置

    公开(公告)号：US5155557A

    公开(公告)日：1992-10-13

    申请号：US718282

    申请日：1991-06-20

    申请人： Toshiyuki Iwazawa ,  Masaki Yamamoto ,  Yoshihito Nakanishi ,  Takeo Sato

    发明人： Toshiyuki Iwazawa ,  Masaki Yamamoto ,  Yoshihito Nakanishi ,  Takeo Sato

    IPC分类号： G03F9/00 ,  H01L21/027 ,  H01L21/30

    CPC分类号： G03F9/7049

    摘要： An alignment detection apparatus for detecting the alignment of a superfine exposure system including an interrupted emission light source. The apparatus is equipped with an output variation monitoring sensor to detect an output variation of the light source and further a photoelectric conversion device to perform the photoelectric conversion of the alignment light to generate discrete photoelectric conversion signals. Also included in the apparatus is an integration and hold circuit to integrate and peak-hold each of the photoelectric conversion signals. This peak-hold values are corrected on the basis of the detected light-source output variation due to the monitoring sensor to output stepwise continuous signals from which a harmonic component is removed by a filter so as to obtain a smooth analog waveform. This analog waveform is processed by a phase detector. The output of the phase detector allows an accurate alignment irrespective of using the interrupted emission light source.

    Position signal producing apparatus for water alignment
    2.
    发明授权
    Position signal producing apparatus for water alignment 失效
    位置信号生成水对准装置

    公开(公告)号：US5053628A

    公开(公告)日：1991-10-01

    申请号：US550925

    申请日：1990-07-11

    申请人： Masaki Yamamoto ,  Takeo Sato ,  Yoshiyuki Sugiyama ,  Shinichiro Aoki ,  Hiroyuki Takeuchi

    发明人： Masaki Yamamoto ,  Takeo Sato ,  Yoshiyuki Sugiyama ,  Shinichiro Aoki ,  Hiroyuki Takeuchi

    IPC分类号： G03F9/00

    CPC分类号： G03F9/7065 ,  G03F9/7049

    摘要： A position signal producing apparatus, for an apparatus for project-printing a pattern on reticle onto a wafer through a project lens with ultraviolet light, for producing a position signal indicative of position of the wafer, comprises: a laser emitting two different frequency components polarized orthogonally with each other which are splitted by a polarizing beam splitter. The first and second components are reflected by first and second mirrors respectively to produce interference fringes at a given place being on an annular region within a circle defined by field angle of the project lens on the reticle through wave plates for circularly-polarizing. Another interference fringes is formed on a diffraction grating of the wafer in correspondence with the interference fringes through the project lens and a lens for achromatizing the project lens at wavelengths of the components. Another interference fringes reflected by the diffraction grating is detected by a photodetector for producing the position signal. The interference fringes may formed on the wafer by another diffraction grating on the reticle illuminated by the first and second components in combination with polarizing elements provided between the reticle and the wafer in replace with the polarizing beam splitter and wave plates.

    Alignment apparatus including three beams and three gratings
    3.
    发明授权
    Alignment apparatus including three beams and three gratings 失效
    对准装置包括三个光束和三个光栅

    公开(公告)号：US5025168A

    公开(公告)日：1991-06-18

    申请号：US518420

    申请日：1990-05-03

    申请人： Shinichiro Aoki ,  Takeo Sato ,  Katsumasa Yamaguchi ,  Masaki Yamamoto

    发明人： Shinichiro Aoki ,  Takeo Sato ,  Katsumasa Yamaguchi ,  Masaki Yamamoto

    IPC分类号： G01B11/00 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30

    CPC分类号： G03F9/7065 ,  G03F9/7049

    摘要： A light source emits light having two components which ave slightly-different frequencies and which have different planes of polarization. The emitted light is separated into first, second, and third parts travelling along different paths respectively. First, second, and third reference gratings diffract the first, second, and third light parts respectively. First, second, and third illumination optical systems selectively transmit the diffracted first, second, and third light parts respectively. First, second, and third mark gratings having predetermined orientations are formed on a mask and are illuminated with the first, second, and third light parts coming from the first, second, and third illumination systems respectively. Similarly, first, second, and third mark gratings are formed on a wafer and are illuminated with the first, second, and third light parts coming from the first, second, and third illumination systems respectively. A first device detects first optical beat signals of the diffracted lights coming from the first mark grating on the mask and the first mark grating on the wafer. Similar detection is made for the diffracted lights coming from the other mark gratings on the mask and the wafer.

    Compact reticle/wafer alignment system
    4.
    发明授权
    Compact reticle/wafer alignment system 失效
    COMPACT RETICLE / WAFER ALIGNMENT SYSTEM

    公开(公告)号：US5194744A

    公开(公告)日：1993-03-16

    申请号：US704406

    申请日：1991-05-23

    申请人： Shinichiro Aoki ,  Takeo Sato ,  Masaki Yamamoto ,  Hiroyuki Takeuchi ,  Nobuhiro Araki ,  Yoshiyuki Sugiyama

    发明人： Shinichiro Aoki ,  Takeo Sato ,  Masaki Yamamoto ,  Hiroyuki Takeuchi ,  Nobuhiro Araki ,  Yoshiyuki Sugiyama

    IPC分类号： G03F9/00 ,  H01L21/027 ,  H01L21/30

    CPC分类号： G03F9/7065 ,  G03F9/7049

    摘要： A reticle/wafer alignment system provided with a laser beam source for emitting laser beams, a first optical system portion for a reticle/wafer alignment which consists of a first optical sub-system for receiving laser beams from the laser beam source and projecting the received laser beams onto alignment marks formed on a substrate and made up of diffraction gratings and a second optical sub-system for gathering laser beams diffracted by the alignment marks to form an image thereof, a photoelectric detection portion for performing a photoelectric conversion of the gathered laser beams, a position detecting portion for measuring the position of the substrate based on a signal outputted from the photoelectric detection portion, a second optical system portion for an image processing which consists of a third optical sub-system for illuminating the alignment marks and a fourth optical sub-system having a television camera for observing the image of the alignment marks, and an image processing portion for performing an image processing of video signals outputted from the television camera. The first and second optical system portions are made in such a manner to have a common part thereof. Thereby, an entire alignment system can be made to be compact. Consequently, a position measurement accuracy can be improved.

    Reflective alignment position signal producing apparatus
    5.
    发明授权
    Reflective alignment position signal producing apparatus 失效
    反射对准信号生成装置

    公开(公告)号：US5231467A

    公开(公告)日：1993-07-27

    申请号：US762111

    申请日：1991-09-19

    申请人： Hiroyuki Takeuchi ,  Masaki Yamamoto ,  Takeo Sato ,  Yoshiyuki Sugiyama ,  Shinichiro Aoki

    发明人： Hiroyuki Takeuchi ,  Masaki Yamamoto ,  Takeo Sato ,  Yoshiyuki Sugiyama ,  Shinichiro Aoki

    IPC分类号： G03F9/00 ,  H01L21/68

    CPC分类号： G03F9/7049 ,  H01L21/682

    摘要： A position signal producing apparatus, for an apparatus for project-printing a pattern on a reticle onto a wafer through a project lens system with exposure light, for producing a position signal indicative of the position of the wafer is disclosed, wherein two different frequency components of alignment light whose frequencies are different from that of the exposure light are interfered with each other at a position alignment blank to form interference fringes having a given pitch. The interference fringes are projected onto a diffraction grating through an achromatizing optical system and the project lens system. Diffracted light returning from the diffraction grating is received by a photodetector which provides a light beat signal. A position deviation signal obtained by phase comparison of the light beat signal provides position alignment by controlling relative positions between the position alignment blank and the diffraction grating. Two light beams of the two different frequency components split by a polarized beam splitter are equalized in image converting condition, or image aspect, by a mirror, so that an accurate mixing of the two frequency components of light beams is performed at the position alignment blank.

    Optical wavelength convertical apparatus
    7.
    发明授权
    Optical wavelength convertical apparatus 失效
    光波长转换装置

    公开(公告)号：US5005938A

    公开(公告)日：1991-04-09

    申请号：US347817

    申请日：1989-05-04

    申请人： Tatsuo Itoh ,  Shinichi Mizuguchi ,  Keishi Kubo ,  Takeo Sato

    发明人： Tatsuo Itoh ,  Shinichi Mizuguchi ,  Keishi Kubo ,  Takeo Sato

    IPC分类号： G02B6/34 ,  G02B6/42 ,  G02F1/37 ,  G02F1/377

    CPC分类号： G02F1/377 ,  G02B6/34 ,  G02B6/42 ,  G02F2001/372 ,  G02F2001/374

    摘要： An optical wavelength converting apparatus for converting the divergent lights by a compact apparatus into a parallel lights comprises a light source, a means for collecting the lights from the light source to introduce them into the optical waveguide of the wavelength converting element, a rotation symmetrical lens disposed on the end portion opposite to the end portion on the side irradiated with the collected lights, thereby to make it possible to convert the divergent lights like Cherenkov radiation lights into parallel lights by a compact apparatus.

    摘要翻译： 一种用于将小型装置的发散光转换为平行光的光波长转换装置包括光源，用于收集来自光源的光以将它们引入波长转换元件的光波导的装置，旋转对称透镜 设置在与被收集的光照射的一侧的端部相对的端部上，从而能够通过紧凑的装置将诸如切伦科夫辐射光的发散光转换为平行光。

    Wireless communication method and information processing apparatus storing different wireless modules in same apparatus
    8.
    发明申请
    Wireless communication method and information processing apparatus storing different wireless modules in same apparatus 审中-公开
    在同一装置中存储不同无线模块的无线通信方法和信息处理装置

    公开(公告)号：US20070066360A1

    公开(公告)日：2007-03-22

    申请号：US11494882

    申请日：2006-07-27

    申请人： Takeo Sato ,  Hideo Izumi

    发明人： Takeo Sato ,  Hideo Izumi

    IPC分类号： H04B7/00 ,  H04B1/38

    CPC分类号： H04W16/14 ,  H04L45/24

    摘要： There is provided a wireless communication method and an information processing apparatus capable of preventing interference from occurring between different wireless communication modules such as a wireless LAN module and a Bluetooth (BT) module when different wireless modules using the same frequency band are stored and used in the same apparatus. The Bluetooth (BT) module 24 secures a frequency band used by the wireless LAN module 23 in case of communicating with other apparatus such as a headset for IP telephone not shown, and then communicates by using a frequency of channel available in the other frequency region other than the frequency band. The BT module 24 transmits channel information of the secured frequency band used by the wireless LAN module 23 to the wireless LAN module 23. In case of directly communicating with the other information processing apparatus 22 such as PDA, when the wireless LAN module 23 receives the used channel information, the wireless LAN module 23 communicates with the other information processing apparatus 22 by using a channel of the band informed from the BT module 24.

    摘要翻译： 提供了一种无线通信方法和信息处理装置，其能够在使用相同频带的不同无线模块被存储并使用时，防止在诸如无线LAN模块和蓝牙（BT）模块的不同无线通信模块之间发生干扰 相同的装置。 蓝牙（BT）模块24在与未示出的用于IP电话的头戴式耳机等通信的情况下，固定由无线LAN模块23使用的频带，然后通过使用另一频率区域中可用的信道的频率进行通信 除频带外。 BT模块24将由无线LAN模块23使用的安全频带的信道信息发送到无线LAN模块23。 在与PDA等其他信息处理装置22直接通信的情况下，无线LAN模块23在无线LAN模块23接收到使用的信道信息的情况下，通过使用从其他信息处理装置22通知的频带， BT模块24。