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1.发明申请BIPOLAR PULSED POWER SUPPLY AND POWER SUPPLY APPARATUS HAVING PLURALITY OF BIPOLAR PULSED POWER SUPPLIES 有权双极脉冲电源双极电源和电源设备具有双极脉冲电源的多样性公开(公告)号：US20110038187A1
公开(公告)日：2011-02-17
申请号：US12989444
申请日：2009-05-20
IPC分类号： H02M7/155
CPC分类号： H02M7/53871 , C23C14/352 , H02M7/493
摘要： A bipolar pulsed power supply is provided in which, while effectively restricting the rise in current at the time of arcing which directly leads to the generation of splashes and particles, the occurrence of overvoltage at the time of polarity reversal is prevented. The power supply has a bridge circuit constituted by switching elements SW1 through SW4 connected to positive and negative DC outputs from a DC power supply source. The operation of the switching elements is controlled to output in a bipolar pulsed mode at a predetermined frequency to a pair of electrodes which come into contact with a plasma. There is provided an output-characteristics-switching circuit which switches the output such that, when outputting to the electrodes, the output to the electrodes has initially constant-voltage characteristics and subsequent output to the electrodes has constant-current characteristics.
摘要翻译： 提供了双极脉冲电源，其中在有效地限制直流导致飞溅和颗粒的产生的电弧时的电流上升的同时，防止了极性反转时的过电压的发生。 电源具有由直流电源的正，负直流输出连接的开关元件SW1〜SW4构成的桥接电路。 控制开关元件的操作，以预定频率以双极脉冲模式输出到与等离子体接触的一对电极。 提供了输出特性切换电路，其切换输出，使得当输出到电极时，对电极的输出具有初始的恒定电压特性，并且随后对电极的输出具有恒定电流特性。
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公开(公告)号：US20120205243A1
公开(公告)日：2012-08-16
申请号：US13504159
申请日：2010-11-12
摘要： Provided is a power supply apparatus which can effectively restrict the current rise at the time of occurrence of arc discharge that is directly related to the occurrence of splashes or particles, and which is also capable of preventing the discharge voltage from getting excessive at the time of finishing the arc processing. The power supply apparatus has: a DC power supply unit which applies a DC voltage to a target which comes into contact with a plasma; and an arc processing unit which can detect arc discharge generated in the electrode by positive and negative outputs from the DC power supply unit, and also which can perform arc discharge suppression processing. An output characteristics switching circuit switches the outputs such that the output to the electrode has constant-current characteristics and that the output to the electrode has constant-voltage characteristics by the time of completion of the arc suppressing processing.
摘要翻译： 提供一种电力供给装置，其能够有效地限制与发生飞溅或粒子直接相关的电弧放电发生时的电流上升，并且还能够防止放电电压在 整理电弧加工。 电源装置具有：对与等离子体接触的目标施加直流电压的直流电源单元; 以及电弧处理单元，其可以通过来自直流电源单元的正和负输出来检测在电极中产生的电弧放电，并且还可以执行电弧放电抑制处理。 输出特性切换电路切换输出，使得对电极的输出具有恒定电流特性，并且通过电弧抑制处理完成时对电极的输出具有恒定电压特性。
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公开(公告)号：US08734627B2
公开(公告)日：2014-05-27
申请号：US13504159
申请日：2010-11-12
IPC分类号： C23C14/54
摘要： Provided is a power supply apparatus which can effectively restrict the current rise at the time of occurrence of arc discharge that is directly related to the occurrence of splashes or particles, and which is also capable of preventing the discharge voltage from getting excessive at the time of finishing the arc processing. The power supply apparatus has: a DC power supply unit which applies a DC voltage to a target which comes into contact with a plasma; and an arc processing unit which can detect arc discharge generated in the electrode by positive and negative outputs from the DC power supply unit, and also which can perform arc discharge suppression processing. An output characteristics switching circuit switches the outputs such that the output to the electrode has constant-current characteristics and that the output to the electrode has constant-voltage characteristics by the time of completion of the arc suppressing processing.
摘要翻译： 提供一种电力供给装置，其能够有效地限制与发生飞溅或粒子直接相关的电弧放电发生时的电流上升，并且还能够防止放电电压在 整理电弧加工。 电源装置具有：对与等离子体接触的目标施加直流电压的直流电源单元; 以及电弧处理单元，其可以通过来自直流电源单元的正和负输出来检测在电极中产生的电弧放电，并且还可以执行电弧放电抑制处理。 输出特性切换电路切换输出，使得对电极的输出具有恒定电流特性，并且通过电弧抑制处理完成时，对电极的输出具有恒定电压特性。
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4.发明授权Bipolar pulsed power supply and power supply apparatus having plurality of bipolar pulsed power supplies 有权具有多个双极脉冲电源的双极脉冲电源和电源装置公开(公告)号：US08467211B2
公开(公告)日：2013-06-18
申请号：US12989444
申请日：2009-05-20
IPC分类号： H02M7/537 , H02M7/5387
CPC分类号： H02M7/53871 , C23C14/352 , H02M7/493
摘要： A bipolar pulsed power supply is provided in which, while effectively restricting the rise in current at the time of arcing which directly leads to the generation of splashes and particles, the occurrence of overvoltage at the time of polarity reversal is prevented. The power supply has a bridge circuit constituted by switching elements SW1 through SW4 connected to positive and negative DC outputs from a DC power supply source. The operation of the switching elements is controlled to output in a bipolar pulsed mode at a predetermined frequency to a pair of electrodes which come into contact with a plasma. There is provided an output-characteristics-switching circuit which switches the output such that, when outputting to the electrodes, the output to the electrodes has initially constant-voltage characteristics and subsequent output to the electrodes has constant-current characteristics.
摘要翻译： 提供了双极脉冲电源，其中在有效地限制直流导致飞溅和颗粒的产生的电弧时的电流上升的同时，防止了极性反转时的过电压的发生。 电源具有由直流电源的正，负直流输出连接的开关元件SW1〜SW4构成的桥接电路。 控制开关元件的操作，以预定频率以双极脉冲模式输出到与等离子体接触的一对电极。 提供了输出特性切换电路，其切换输出，使得当输出到电极时，对电极的输出具有初始的恒定电压特性，并且随后对电极的输出具有恒定电流特性。
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公开(公告)号：US20110120861A1
公开(公告)日：2011-05-26
申请号：US12999085
申请日：2009-06-17
IPC分类号： C23C14/34
CPC分类号： H05H1/46 , C23C14/3464 , C23C14/542 , H01J37/34 , H01J37/3444 , H03H7/38
摘要： There is provided a power supply apparatus that is capable of suppressing the occurrence of anomalous electric discharge due to charge-up of a substrate and that is capable of forming a good thin film on a large-area substrate. The power supply apparatus of this invention has: a first discharge circuit that alternately charges predetermined potential at a predetermined frequency to a pair of targets that are in contact with a plasma; and a second discharge circuit that charges predetermined potential between the grounding and the electrode, out of the pair of electrodes, that is not charged with potential from the first discharge circuit. The second discharge circuit is provided with a reverse potential charging means for charging, at the time of polarity reversal, at least one of the electrodes with potential that is reverse to the output potential.
摘要翻译： 提供一种电源装置，其能够抑制由于基板的充电而产生的异常放电，并且能够在大面积基板上形成良好的薄膜。 本发明的电源装置具有：将与预定频率的预定电位交替地与等离子体接触的一对目标交替地充电的第一放电电路; 以及第二放电电路，其从未被所述第一放电电路充电的所述一对电极中的所述接地和所述电极之间的预定电位充电。 第二放电电路设置有反向电位充电装置，用于在极性反转时对具有与输出电位相反的电位的至少一个电极进行充电。
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6.发明申请公开(公告)号：US20110120860A1
公开(公告)日：2011-05-26
申请号：US12989692
申请日：2009-05-20
申请人： Yoshikuni Horishita , Atsushi Ono , Wataru Oshima
发明人： Yoshikuni Horishita , Atsushi Ono , Wataru Oshima
CPC分类号： H02M7/53871 , H01J37/3417 , H01J37/3429 , H01J37/3444 , H02M2001/007
摘要： A bipolar pulsed power supply which supplies power in a bipolar pulsed mode at a predetermined frequency to a pair of electrodes that come into contact with a plasma is arranged to reduce the switching loss of the switching elements in a bridge circuit, and also to attain a high durability without using high-performance switching elements. The bipolar pulsed power supply has: a bridge circuit constituted by switching elements SW1 through SW4 connected to positive and negative DC outputs from a DC power supply source; and a control means for controlling switching ON or OFF of each of the switching elements in the bridge circuit. An output-short-circuiting switching element SW0 is disposed between the positive and the negative DC outputs from the DC power supply source such that, in a short-circuited state of the output-short-circuiting switching element, each of the switching elements in the bridge circuit is switched by the control means.
摘要翻译： 以与预定频率相对的双极性脉冲模式的电力供给与等离子体接触的一对电极的双极脉冲电源被配置为减小桥式电路中的开关元件的开关损耗， 高耐用性，而不使用高性能开关元件。 双极脉冲电源具有：由直流电源连接到正，负直流输出的开关元件SW1〜SW4构成的桥接电路; 以及用于控制桥式电路中的每个开关元件的接通或断开的控制装置。 输出短路开关元件SW0设置在来自直流电源的正极和负极直流输出之间，使得在输出短路开关元件的短路状态下，每个开关元件 桥接电路由控制装置切换。
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7.发明授权公开(公告)号：US08506771B2
公开(公告)日：2013-08-13
申请号：US12989692
申请日：2009-05-20
申请人： Yoshikuni Horishita , Atsushi Ono , Wataru Oshima
发明人： Yoshikuni Horishita , Atsushi Ono , Wataru Oshima
IPC分类号： H01J37/34
CPC分类号： H02M7/53871 , H01J37/3417 , H01J37/3429 , H01J37/3444 , H02M2001/007
摘要： A bipolar pulsed power supply which supplies power in a bipolar pulsed mode at a predetermined frequency to a pair of electrodes that come into contact with a plasma is arranged to reduce the switching loss of the switching elements in a bridge circuit, and also to attain a high durability without using high-performance switching elements. The bipolar pulsed power supply has: a bridge circuit constituted by switching elements SW1 through SW4 connected to positive and negative DC outputs from a DC power supply source; and a control means for controlling switching ON or OFF of each of the switching elements in the bridge circuit. An output-short-circuiting switching element SW0 is disposed between the positive and the negative DC outputs from the DC power supply source such that, in a short-circuited state of the output-short-circuiting switching element, each of the switching elements in the bridge circuit is switched by the control means.
摘要翻译： 以与预定频率相对的双极性脉冲模式的电力供给与等离子体接触的一对电极的双极脉冲电源被配置为减小桥式电路中的开关元件的开关损耗， 高耐用性，而不使用高性能开关元件。 双极脉冲电源具有：由直流电源连接到正，负直流输出的开关元件SW1〜SW4构成的桥接电路; 以及用于控制桥式电路中的每个开关元件的接通或断开的控制装置。 输出短路开关元件SW0设置在来自直流电源的正极和负极直流输出之间，使得在输出短路开关元件的短路状态下，每个开关元件 桥接电路由控制装置切换。
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8.发明授权公开(公告)号：US08694897B2
公开(公告)日：2014-04-08
申请号：US13040843
申请日：2011-03-04
申请人： Yoshiroh Kamiyama , Atsushi Ono
发明人： Yoshiroh Kamiyama , Atsushi Ono
IPC分类号： G06F3/0481
CPC分类号： G06F8/34 , G06F3/0481 , G06F9/451
摘要： A layout converter for converting a layout of a display screen on which display areas for a plurality of software components are arranged can include a detection unit for detecting a plurality of target display areas having a predetermined arrangement relationship from the plurality of display areas. The layout converter further can include a generation unit for generating a container, in which display contents of the plurality of target display areas are unified and displayed within one unified display area, and adding the container to the layout of the display screen.
摘要翻译： 一种用于转换其上布置有多个软件组件的显示区域的显示屏幕的布局的布局转换器可以包括：检测单元，用于检测来自多个显示区域的具有预定布置关系的多个目标显示区域。 布局转换器还可以包括用于生成容器的生成单元，其中多个目标显示区域的显示内容被统一并显示在一个统一的显示区域内，并且将容器添加到显示屏幕的布局。
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9.发明授权Robot, and control apparatus, control method, and control program for robot 有权机器人，机器人的控制装置，控制方法和控制程序公开(公告)号：US08401702B2
公开(公告)日：2013-03-19
申请号：US12935603
申请日：2009-06-02
申请人： Yasunao Okazaki , Atsushi Ono , Katsuhiko Asai
发明人： Yasunao Okazaki , Atsushi Ono , Katsuhiko Asai
CPC分类号： B25J9/1075 , A61G7/1017 , A61G7/1046 , A61G7/1057 , A61G7/1065 , A61G2200/32 , A61G2203/32 , A61G2203/42 , A61G2203/72 , B25J5/007 , B25J9/0084 , B25J9/0087 , B25J9/142 , B25J13/085 , B25J19/0004
摘要： A robot arm provided with a body unit shifting mechanism that connects a base unit and a body unit so as to be relatively shifted, and joint lock mechanisms that are capable of mechanically securing respective joints is disposed on the body unit, and a robot operation control unit controls to switch between a robot arm operation mode in which the robot arm is operated with one of the joints of the robot arm brought into a free state, and a body unit shift mode in which the body unit is shifted with the joint being brought into a locked state.
摘要翻译： 一种机器人手臂，其设置有主体单元移动机构，其连接基座单元和主体单元以相对移位，并且能够机械地固定各个关节的关节锁定机构设置在主体单元上，并且机器人操作控制 单元控制在机器人手臂操作的机器人手臂操作模式之间切换，其中机器人手臂的一个接合处于自由状态，以及主体单元移动模式，其中主体单元随着关节被移动 进入锁定状态。
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公开(公告)号：US08143764B2
公开(公告)日：2012-03-27
申请号：US13116215
申请日：2011-05-26
申请人： Sachio Nagamitsu , Atsushi Ono
发明人： Sachio Nagamitsu , Atsushi Ono
CPC分类号： B25J9/1095 , A61F2002/5066 , F03G7/005 , Y10S310/80
摘要： A first conductive polymer film, a plate-shaped first porous member, a second conductive polymer film, and a plate-shaped second porous member are stacked on one another, and the adjacent members are connected with each other on first end portions so as to form a zigzag pattern. The first and second porous members each have an ionic solution injected thereinto so as to function as an electrolyte retention layer, so that operations can be carried out with tensions being always maintained upon both of the expansion and the contraction, and rigidity and a driving force can be exerted in both of the contracting and expanding directions.
摘要翻译： 第一导电聚合物膜，板状第一多孔构件，第二导电聚合物膜和板状第二多孔构件彼此堆叠，并且相邻构件在第一端部彼此连接，以便 形成锯齿形图案。 第一和第二多孔构件各自具有注入到其中的离子溶液，以便用作电解质保留层，使得可以在两者的膨胀和收缩两者上始终保持张力，以及刚性和驱动力 可以在承包和扩展方向上施加。
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