METHOD OF MANUFACTURING BONDED WAFER
    1.
    发明申请
    METHOD OF MANUFACTURING BONDED WAFER 审中-公开
    制造粘结波的方法

    公开(公告)号:US20070184631A1

    公开(公告)日:2007-08-09

    申请号:US11562635

    申请日:2006-11-22

    IPC分类号: H01L21/30

    CPC分类号: H01L21/76254

    摘要: The method of manufacturing a bonded wafer including, implanting hydrogen ions, rare gas ions, or a mixture of hydrogen ions and rare gas ions into a bond wafer to form an ion implantation layer in the bond wafer, bonding the bond wafer in which the ion implantation layer has been formed to a base wafer to form a bonded wafer, and subjecting the bonded wafer to heat treatment to separate the bond wafer from the base wafer at the ion implantation layer as boundary to form the bonded wafer. In the method of manufacturing a bonded wafer, the heat treatment at least from the start of the separation to the end of the separation is conducted in an oxidizing atmosphere.

    摘要翻译: 包括将氢离子,稀有气体离子或氢离子和稀有气体离子的混合物注入接合晶片以在接合晶片中形成离子注入层的粘合晶片的制造方法,将接合晶片接合,其中离子 注入层已经形成到基底晶片以形成接合晶片,并且对接合的晶片进行热处理,以在离子注入层作为边界将接合晶片与基底晶片分离,以形成接合晶片。 在制造接合晶片的方法中,至少从分离开始到分离结束的热处理在氧化气氛中进行。

    Substrate processing method
    2.
    发明授权
    Substrate processing method 有权
    基板加工方法

    公开(公告)号:US08956513B2

    公开(公告)日:2015-02-17

    申请号:US13378534

    申请日:2010-07-15

    IPC分类号: C23C14/56 C23C14/06 C23C14/00

    摘要: There is provided a substrate processing method, in which a throughput can be improved even in case the time for recovery processing for restoring the state of a processing chamber is longer than the time for predetermined processing to be performed in the processing chamber. Substrates are alternately transferred to two processing chambers C, D, and the same film forming processing is performed on the substrates in the processing chambers C, D in parallel with each other. When the number of substrates processed in the processing chamber C has reached a predetermined number (11 substrates), dummy sputtering processing in the film forming chamber C is started and also 23rd-25th substrates of the first lot are transferred to the film forming chamber D to thereby perform film forming processing until the dummy sputtering processing is finished.

    摘要翻译: 提供了一种基板处理方法,其中即使在用于恢复处理室的状态的恢复处理的时间比在处理室中进行预定处理的时间长的情况下也可以提高吞吐量。 基板交替地传送到两个处理室C,D,并且在处理室C,D中的基板上彼此平行地执行相同的成膜处理。 当处理室C中处理的基板的数量达到预定数量(11个基板)时,成膜室C中的虚拟溅射处理开始,第一批次的第23至25个基板被转印到成膜室D 从而进行成膜处理,直到虚拟溅射处理结束。

    Automatic programming method and device for creating multi-path program
    3.
    发明授权
    Automatic programming method and device for creating multi-path program 有权
    自动编程方法和创建多路径程序的设备

    公开(公告)号:US08521322B2

    公开(公告)日:2013-08-27

    申请号:US13033874

    申请日:2011-02-24

    IPC分类号: G06F19/00 G05B19/18 G05B19/04

    CPC分类号: G05B19/40931 Y02P90/265

    摘要: In automatic programming for creating a multi-path program for a machine having a plurality of control paths performing one or more machining processes of a machining program for machining a workpiece, the machining time of each of the machining processes is calculated, workable paths are input for each of the machining processes, and then workable orders of the machining processes are input. For each of the machining processes, simultaneously workable machining processes are input if any among other machining processes. On the basis of the above results, machining programs that provide the shortest machining time are selected.

    摘要翻译: 在用于为具有执行用于加工工件的加工程序的一个或多个加工过程的多个控制路径的机器创建多路径程序的自动编程中,计算每个加工过程的加工时间,可输入可运行路径 对于每个加工过程,然后输入加工过程的可行订单。 对于每个加工过程,如果在其他加工过程中任何一个都可以输入可加工的加工过程。 在上述结果的基础上,选择加工时间最短的加工程序。

    Curing accelerating compound-silica composite material, method for producing curing accelerating compound-silica composite material, curing accelerator, curable resin composition, and electronic component device
    4.
    发明授权
    Curing accelerating compound-silica composite material, method for producing curing accelerating compound-silica composite material, curing accelerator, curable resin composition, and electronic component device 失效
    固化加速复合二氧化硅复合材料,固化加速化合物 - 二氧化硅复合材料的生产方法,固化促进剂,固化性树脂组合物和电子部件装置

    公开(公告)号:US08129467B2

    公开(公告)日:2012-03-06

    申请号:US11911267

    申请日:2006-04-14

    申请人: Shinya Nakamura

    发明人: Shinya Nakamura

    IPC分类号: C08G64/16 C08L69/00 C08L71/12

    摘要: The present invention relates to a curing accelerating compound-silica composite material capable of giving excellent storage stability to a curable resin composition, which is obtained by subjecting one or more compounds selected from compounds represented by the general formula (I-1) below and partial condensates thereof to a sol-gel reaction in the presence of a curing accelerating compound and water; a curable resin composition comprising the same; and an electronic component device comprising a device sealed with the curable resin composition. R1nSiR2(4-n)  (I-1) wherein n is 0 or 1; R1 is selected from a hydrogen atom and a C1 to C18 substituted or unsubstituted hydrocarbon group and may form a ring structure with R2; R2s represent a functional group reactive with a phenolic hydroxyl group, are selected independently from a halogen atom, a hydroxyl group, a C1 to C18 optionally substituted oxy group, a C0 to C18 optionally substituted amino group, and a C2 to C18 optionally substituted carbonyloxy group, all R2s may be the same or different from one another, and two or more R2s may be bound to each other to form a ring structure.

    摘要翻译: 本发明涉及通过使一种或多种选自下述通式(I-1)表示的化合物和部分(I-1)化合物的化合物获得的固化性树脂组合物的保存稳定性优异的固化加速化合物 - 二氧化硅复合材料, 在固化加速化合物和水的存在下将其缩合成溶胶 - 凝胶反应; 包含该树脂组合物的可固化树脂组合物; 以及包括用所述可固化树脂组合物密封的装置的电子部件装置。 R1nSiR2(4-n)(I-1)其中n为0或1; R1选自氢原子和C1〜C18取代或未取代的烃基,可以与R2形成环结构; R2表示与酚羟基反应的官能团,独立地选自卤素原子,羟基,C1至C18任选取代的氧基,C 0至C 18任选取代的氨基和C 2至C 18任选取代的羰基氧基 所有的R 2可以彼此相同或不同,并且两个或更多个R 2可以彼此结合以形成环结构。

    ROBOT HAND FOR SUBSTRATE TRANSFER
    5.
    发明申请
    ROBOT HAND FOR SUBSTRATE TRANSFER 有权
    机架手柄用于基板传送

    公开(公告)号:US20120049555A1

    公开(公告)日:2012-03-01

    申请号:US13288206

    申请日:2011-11-03

    IPC分类号: H01L21/683

    摘要: There is provided a robot hand for substrate transfer in which the robot hand is so arranged that, even in case a substrate (S) gives rise to warping, the substrate (S) can be stably supported. On an upper surface of the robot hand there is formed a first seating surface on which is seated a lower-surface peripheral portion of the substrate (S) and, on a periphery thereof, there is formed an upwardly extended step. The step is provided with a plurality of stair-shaped stages. On an upper surface of the robot hand inwardly away from the first seating surface there is provided a second seating surface which is inclined downward toward the center of the substrate (S) such that a lower surface of the substrate (S) is seated on the second seating surface when the substrate (S) is warped downward into a concave shape.

    摘要翻译: 提供了一种用于基板转印的机器人手,其中机器人手布置成使得即使在基板(S)引起翘曲的情况下,也可以稳定地支撑基板(S)。 在机器人手的上表面上形成有第一就座表面,其上安置有基底(S)的下表面周边部分,并且在其周边上形成向上延伸的步骤。 台阶设置有多个楼梯阶段。 在机器人手的上表面向内离开第一座面,设置有第二座面,其朝向衬底(S)的中心向下倾斜,使得衬底(S)的下表面位于 当基板(S)向下弯曲成凹形时,第二座面。

    RUNNING DEVICE FOR TRACK-LAYING VEHICLE
    6.
    发明申请
    RUNNING DEVICE FOR TRACK-LAYING VEHICLE 有权
    轨道车辆运行装置

    公开(公告)号:US20100244554A1

    公开(公告)日:2010-09-30

    申请号:US12714269

    申请日:2010-02-26

    摘要: There is provided a running device for track-laying vehicle, which can resolve a feeling of fear of falling height in a leading end portion of a crawler while relax a large impact when the crawler runs over a raised contact area. The running device includes a spring constant equalizing unit that equalizes an apparent spring constant of a second arm of lower track roller bogie device over a total length. The apparent spring constant is generated in maximum reverse camber of the crawler. The spring constant equalizing unit increases an oscillation angle α of the second arm that can abut on the first arm in the maximum reverse camber of the crawler such that the oscillation angle α of the second arm is larger than a crossing angle β of the connecting link. Desirably the increased maximum oscillation angle of the second arm is 1.3-2.0 times the crossing angle β.

    摘要翻译: 提供了一种用于履带铺设车辆的运行装置,其可以在履带运行在凸起的接触区域上的同时放松大的冲击力的同时,消除履带的前端部的下降高度的恐惧感。 运行装置包括弹簧常数均衡单元,其在总长度上均衡下轨道滚子转向架装置的第二臂的表观弹簧常数。 表观弹簧常数是在履带的最大反向弯度中产生的。 弹簧常数均衡单元增加了能够抵靠履带的最大反向弧度中的第一臂上的第二臂的摆动角度α,使得第二臂的摆动角α大于交叉角度& bgr; 的连接链接。 理想地,第二臂的最大振荡角增加是交叉角度的1.3-2.0倍。

    Numerical controller
    7.
    发明申请
    Numerical controller 审中-公开
    数控机

    公开(公告)号:US20070192707A1

    公开(公告)日:2007-08-16

    申请号:US11706205

    申请日:2007-02-15

    IPC分类号: G06F3/00

    CPC分类号: G05B19/409

    摘要: A numerical controller in which similar icons are created without applying major load onto a memory. Among icon definition data displayed in areas F1 . . . , G1 . . . , H1 . . . , on frames A, B and C, the data that can be expressed by conversions, such as rotation, horizontal mirror image, vertical mirror image, horizontal-and-vertical mirror image, magnification/contraction retaining horizontal/vertical ratio, magnification/contraction varying horizontal/vertical ratio, black/white reversal, display in red, blue, yellow and green, with respect to one parent icon, are substituted with data indicating the conversion contents. It is possible to display many icons with a small storage capacity. The definition data of each icon can be previously written in a ROM and copied to a RAM when the power is turned on to be used for display.

    摘要翻译: 数字控制器,其中创建相似的图标而不对存储器施加主要负载。 在区域F 1中显示的图标定义数据中。 。 。 ,G 1。 。 。 ,H 1。 。 。 在帧A,B和C上,可以通过转换表示的数据,如旋转,水平镜像,垂直镜像,水平和垂直镜像,放大/缩小保持水平/垂直比,放大/缩小 变化的水平/垂直比率,黑/白反转,相对于一个父图标的红色,蓝色,黄色和绿色的显示被用指示转换内容的数据代替。 可以显示许多具有小存储容量的图标。 每个图标的定义数据可以预先写入ROM中,并在电源打开时复制到RAM中以用于显示。

    Scroll compressor having an Oldham's ring containing silicon particles
    8.
    发明授权
    Scroll compressor having an Oldham's ring containing silicon particles 失效
    具有含有硅颗粒的奥德姆环的涡旋压缩机

    公开(公告)号:US06634875B2

    公开(公告)日:2003-10-21

    申请号:US10099970

    申请日:2002-03-19

    IPC分类号: F04C1804

    CPC分类号: F01C17/066

    摘要: An improved scroll compressor comprises a fixed scroll and an orbiting scroll, as well as an Oldham's coupling which enables the orbiting scroll to have a orbital movement. The Oldham's ring of the Oldham's coupling is so formed that its sliding surfaces for counterpart members to slide thereon are formed by a base material containing silicon particles, while the surface of each silicon particle (remaining on the base material's surface serving as a slidable surface for counterpart members to slide thereon) is formed into a flat surface. In practice, a ratio of silicon portions formed into flat surfaces to an entire sliding area of the Oldham's coupling is in a range of 3% to 20%, preferably 5% to 15%. With the use of the scroll compressor of the present invention, it is possible to improve the wear resistance of the Oldham's ring of the Oldham's coupling and its counterpart members in the scroll compressor.

    摘要翻译: 改进的涡旋压缩机包括固定涡旋件和绕动涡旋件,以及使轨道运转涡旋件具有轨道运动的奥尔德姆联轴器。 奥尔德姆的十字形联轴节的环形被形成为使得其对准部件滑动的滑动表面由含有硅颗粒的基材形成,而每个硅颗粒的表面(保留在基材表面上用作可滑动表面, 在其上滑动的对方构件)形成为平坦表面。 在实践中,形成平坦表面的硅部分与奥尔德姆耦合的整个滑动区域的比率在3%至20%的范围内,优选为5%至15%。 通过使用本发明的涡旋压缩机,可以提高奥尔德姆联轴器的奥德姆环和涡旋压缩机中的对应构件的耐磨性。

    Inhibitor switch having magnetic contact portion
    9.
    发明授权
    Inhibitor switch having magnetic contact portion 有权
    具有磁性接触部分的抑制开关

    公开(公告)号:US6144273A

    公开(公告)日:2000-11-07

    申请号:US386194

    申请日:1999-08-30

    摘要: An inhibitor switch is provided with a movable base 1 having permanent magnets 4, which is adapted to be rotatable in accordance with the transmission operating position of an automatic transmission device. The inhibitor switch also has magnetic sensors 9 for detecting the magnetic flux from the permanent magnets 4, a pole base 3, and a cover body 2 for rotatably supporting the movable base 1 in cooperation with the pole base 3. The pole base 3 has an approximate arc shape with a radius of curvature centered about the center of a shaft hole 3a. A base surface 3d is provided for forming a space for receiving a substrate 6 connected to the connecting sections 7a, on which the magnetic sensors 9 and electronic elements 10 are installed. The connecting sections 7a are used to electrically connect a conductive body 7 to the substrate 6. The shaft hole 3a is coupled with a cylindrical shaft section 1a of the movable base 1 at an end of the base surface 3d. This construction provides an inhibitor switch having permanent magnets with high operating precision and low manufacturing cost.

    摘要翻译: 抑制开关设置有具有永磁体4的可移动基座1,该永磁体适于根据自动变速器装置的变速器操作位置而旋转。 抑制开关还具有磁传感器9,用于检测来自永磁体4的磁通量,极基座3以及用于与极基座3协作可旋转地支撑可移动基座1的盖体2.杆座3具有 大致圆弧形状,其曲率半径以轴孔3a的中心为中心。 提供基面3d用于形成用于接收连接到其上安装有磁传感器9和电子元件10的连接部分7a的基板6的空间。 连接部7a用于将导电体7与基板6电连接。轴孔3a在基面3d的端部与可动基体1的筒状轴部1a连接。 这种结构提供了具有高操作精度和低制造成本的永磁体的抑制开关。

    Inhibitor switch having magnetic contact portion
    10.
    发明授权
    Inhibitor switch having magnetic contact portion 有权
    具有磁性接触部分的抑制开关

    公开(公告)号:US6140898A

    公开(公告)日:2000-10-31

    申请号:US386002

    申请日:1999-08-30

    摘要: An inhibitor switch is constructed such that a movable base 1 adapted to be rotatable in accordance with the transmission operating position of an automatic transmission device is supported rotatably by a cover body 2 and a pole base 3 having magnetic sensors 9. The movable base 1 is integrally formed with a yoke 5 through an injection molding method. The yoke 5 has folded sections 5c exposed to the upper surface of the movable base 1 and bottom pieces 5b for receiving the permanent magnets 4. Moreover, the yoke 5 is composed of a plurality of bottom pieces 5b connected with each other, and the folded sections 5c formed at each end of the bottom pieces 5c. With this construction, an inhibitor switch is provided with a low manufacturing cost.

    摘要翻译: 抑制开关被构造成使得根据自动变速器装置的变速器操作位置适于可旋转的可移动底座1由盖体2和具有磁传感器9的杆座3可旋转地支撑。可移动底座1是 通过注射成型方法与轭5一体地形成。 磁轭5具有暴露于可移动基座1的上表面的折叠部分5c和用于容纳永磁体4的底部件5b。此外,磁轭5由多个彼此连接的底部件5b组成,并且折叠 形成在底部件5c的每一端的部分5c。 通过这种结构,抑制开关具有低制造成本。