摘要:
The invention relates to a fluorine-containing copolymer. This copolymer contains 1-99 mol % of a special first repeating unit of a cyclic perfluoro group; and 99-1 mol % of a second repeating unit of a bivalent organic group. The copolymer has a number average molecular weight of from 1,000 to 1,000,000 determined in a gel permeation chromatography using polystyrene as a standard material thereof. The invention further relates to a composition for forming a low reflectance film. This composition contains as a film-forming component a fluorine-containing polymer containing the first repeating unit. This polymer can be the above copolymer. A film formed by applying the composition to a substrate provides low reflectance and is improved in hardness.
摘要:
The invention relates to a curable fluorine-containing copolymer prepared by copolymerizing a monomer mixture. This monomer mixture is in an amount of 100 mol % in total and includes (a) 10-60 mol % of a first polymerizable monomer that is one of hexafluoroisobutene and hexafluoroacetone, each of which has one hexafluoroisopropylidene group; (b) 10-70 mol % of a fatty acid vinyl ester that is represented by a general formula of CH.sub.2 .dbd.CH--OC (.dbd.O) --R.sup.1 where R.sup.1 is one of an alkyl group and --(CH.sub.2).sub.m --R.sup.2 --(CH.sub.2).sub.n --H where R.sup.2 is one of a cycloalkylene group and a divalent aromatic group, and m and n are respectively integers each ranging from 0 to 12, the alkyl group having a carbon atom number of from 1 to 22 and an optional branched chain, each of the cycloalkylene group and the divalent aromatic group having an optional substituent; (c) 1-60 mol % of a second polymerizable monomer that has a cross-linkable functional group and a polymerizable double bond, the cross-linkable functional group being one selected from the group consisting of hydroxyl group, carboxyl group, hydrolyzable organosilyl groups, epoxy groups, .beta.-ketoester groups; and (d) 0-20 mol %, of a third polymerizable monomer that is different from the first and second monomers and the fatty acid vinyl ester and is free of a cross-linkable functional group. A coated film prepared by the application of a varnish containing the fluorine-containing copolymer is superior in water repellency and stain resistance.
摘要:
A base polymer having incorporated an ester group having a fluorinated alicyclic unit is provided. A resist composition comprising the polymer is sensitive to high-energy radiation, and has excellent sensitivity at a wavelength of less than 200 nm, significantly improved transparency by virtue of the fluorinated alicyclic units incorporated as well as satisfactory plasma etching resistance. The resist composition has a low absorption at the exposure wavelength of a F2 laser and is ideal as a micropatterning material in VLSI fabrication.
摘要:
Acrylic esters containing fluorine at &agr;-position and having a lactone ring introduced into the ester side chain thereof are novel. Polymers obtained from the acrylic esters have a high transparency to VUV and good adhesion to substrates and are used to formulate chemically amplified resist compositions for lithographic microfabrication.
摘要:
An acrylate resin containing fluorinated alkyl groups in ester side chains has high transmittance to VUV radiation. A resist composition using the resin as a base polymer is sensitive to high-energy radiation, has excellent sensitivity and resolution, and is suited for lithographic microprocessing.
摘要:
The invention relates to a fluorine-containing polybenzoxazole including a structural unit represented by the general formula (1): where X is a tetravalent organic group containing an aromatic ring, and two sets of N and O are each bonded to the ortho positions of the aromatic ring of X such that two five-membered rings are formed next to the aromatic ring of X. This polybenzoxazole demonstrates low dielectric constant and low coefficient of thermal expansion while maintaining the properties of polybenzoxazole including mechanical strength and thermal stability.
摘要:
A ternary copolymer comprising units of α-trifluoromethylacrylic carboxylate having acid labile groups substituted thereon, units of α-trifluoromethylacrylic carboxylate having adhesive groups substituted thereon, and units of styrene having hexafluoroalcohol pendants is highly transparent to VUV radiation and resistant to plasma etching. A resist composition using the polymer as a base resin is sensitive to high-energy radiation below 200 nm, has excellent sensitivity, and is suited for lithographic microprocessing.
摘要:
A copolymer of an acrylate monomer containing fluorine at α-position with a fluorinated hydroxystyrene derivative is highly transparent to VUV radiation and resistant to plasma etching. A resist composition using the polymer as a base resin is sensitive to high-energy radiation below 200 nm, has excellent sensitivity, resolution, transparency, substrate adhesion and plasma etching resistance, and is suited for lithographic microprocessing.
摘要:
The invention relates to a coated granular fertilizer having a film covering fertilizer granules. This film comprises a polyurethane resin prepared by a method comprising the steps of (a) reacting an aromatic polyisocyanate with a first polyol component (i.e., castor oil or a castor oil derivative), thereby to obtain a prepolymer having terminal isocyanate groups in the molecule; and (b) reacting the prepolymer with a second polyol component (i.e., castor oil or a castor oil derivative) and a third polyol component which is an amine having at least two hydroxyl groups in the molecule, thereby to cure the prepolymer and thus to prepare the polyurethane resin. The invention relates to another coated granular fertilizer having a film covering fertilizer granules. This film comprises a urethane resin and aqueous-fluid-absorbing particles having a particle diameter of from 1 to 200 &mgr;m. This urethane resin may be the above polyurethane resin. This coated granular fertilizer can be produced by a method comprising the steps of (a) applying an aromatic polyisocyanate, a polyol component (i.e., castor oil or a castor oil derivative), an amine, and the aqueous-fluid-absorbing particles, at the same time or separately in no special order, while the fertilizer granules are kept fluidized or rolled, thereby to form a precursory film on the fertilizer granules; and (b) curing the precursory film into the film. Each coated granular fertilizer is substantially superior in regulation of the release of plant nutrient elements therefrom.
摘要:
The invention provides a novel copolymer comprising 25-75 mol % of a fluoroolefin such as CTFE, 10-70 mol % of a vinyl or isopropenyl ester of fatty acid, such as finyl acetate or isopropenyl acetate, 3-40 mol % of a hydroxyl-containing allyl ether such as ethylene glycol monoallyl ether, and 0.1-20 mol % of a carboxyl-containing monomer such as finylacetic acid. This copolymer possesses favorable properties characteristic of fluoroesins, is soluble in various organic solvents and is curable at normal temperature by a polyisocyanate. Since the copolymer has carboxyl group, not only inorganic pigments but also organic pigments exhibit very good dispersibility in a solution of this copolymer in an organic solvent. The copolymer can be prepared by a single-stage reaction using a radical polymerization initiator.