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    Polishing pad grooving method and apparatus
    2.
    发明授权
    Polishing pad grooving method and apparatus 失效
    抛光槽切槽方法及装置

    公开(公告)号：US06340325B1

    公开(公告)日：2002-01-22

    申请号：US09605869

    申请日：2000-06-29

    申请人： Shyng-Tsong Chen ,  Alex Siu Keung Chung ,  Kenneth M. Davis ,  Oscar Kai Chi Hsu ,  Kenneth P. Rodbell

    发明人： Shyng-Tsong Chen ,  Alex Siu Keung Chung ,  Kenneth M. Davis ,  Oscar Kai Chi Hsu ,  Kenneth P. Rodbell

    IPC分类号： B24B100

    CPC分类号： B24B37/26 ,  Y10T409/303808 ,  Y10T409/306608 ,  Y10T409/308624

    摘要： Grooves are formed in a COD pad by positioning the pad on a supporting surface with a working surface of the pad in spaced relation opposite to a router bit and at least one projecting stop member adjacent to the router bit, an outer end portion of the bit projecting beyond the stop. When the bit is rotated, relative axial movement between the bit and the pad causes the outer end portion of the bit to cut an initial recess in the pad. Relative lateral movement between the rotating bit and the pad then forms a groove which extends laterally away from the recess and has a depth substantially the same as that of the recess. The depths of the initial recess and the groove are limited by applying a vacuum to the working surface of the pad to keep it in contact with the stop member(s). Different lateral movements between the bit and the pad are used to form a variety of groove patterns, the depths of which are precisely controlled by the stop member(s).

    摘要翻译： 通过将焊盘定位在支撑表面上，通过将焊盘的工作表面与路由器钻头相对隔开的关系形成凹槽并形成至少一个与路由器钻头相邻的突出挡块，钻头的外端部分 突出超出停止。 当钻头旋转时，钻头和钻头之间的相对轴向运动使钻头的外端部分切割焊盘中的初始凹陷。 旋转钻头和垫之间的相对横向运动形成一个横向延伸离开凹槽并具有与凹槽基本相同的深度的凹槽。 通过将真空施加到垫的工作表面以使其与止动构件接触来限制初始凹部和凹槽的深度。 钻头和垫之间的不同横向运动用于形成各种凹槽图案，其深度由止动件精确地控制。

    Polishing pads with polymer filled fibrous web, and methods for fabricating and using same
    4.
    发明授权
    Polishing pads with polymer filled fibrous web, and methods for fabricating and using same 失效
    具有聚合物填充的纤维网的抛光垫，以及其制造和使用方法

    公开(公告)号：US06989117B2

    公开(公告)日：2006-01-24

    申请号：US10782922

    申请日：2004-02-23

    申请人： Shyng-Tsong Chen ,  Kenneth P. Rodbell ,  Oscar Kai Chi Hsu ,  Jean Vangsness ,  David S. Gilbride ,  Scott Clayton Billings ,  Kenneth Davis

    发明人： Shyng-Tsong Chen ,  Kenneth P. Rodbell ,  Oscar Kai Chi Hsu ,  Jean Vangsness ,  David S. Gilbride ,  Scott Clayton Billings ,  Kenneth Davis

    IPC分类号： B29C39/42

    CPC分类号： B24B37/26 ,  B24D3/28 ,  B24D11/008 ,  B24D18/00

    摘要： A method of making a polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, and the precursors fill these interstices substantially completely before completion of the reaction. The method comprising placing the fibers and the precursors in a cavity of a mold for shaping the polishing pad; applying a differential pressure across a mold cavity, where the differential pressure and the amount of precursors are sufficient to cause the precursors to fill the interstices substantially completely before completion of the reaction; and applying sufficient heat to the mold to at least partially cure the polishing pad by causing the precursors to react.

    摘要翻译： 一种制造抛光垫的方法，该抛光垫具有包含嵌入在通过聚合物前体的反应形成的基体聚合物中的纤维的主体。 纤维定义空隙，并且前体在反应完成之前基本上完全填充这些间隙。 该方法包括将纤维和前体放置在用于成形抛光垫的模具的空腔中; 在模具腔内施加压差，其中压差和前体的量足以使得前体在反应完成之前基本上完全填充空隙; 并且通过使前体反应来向模具施加足够的热量以至少部分地固化抛光垫。

    Grooved polishing pads and methods of use
    7.
    发明授权
    Grooved polishing pads and methods of use 有权
    凹槽抛光垫和使用方法

    公开(公告)号：US06685548B2

    公开(公告)日：2004-02-03

    申请号：US10424840

    申请日：2003-04-29

    申请人： Shyng-Tsong Chen ,  Kenneth M. Davis ,  Kenneth P. Rodbell

    发明人： Shyng-Tsong Chen ,  Kenneth M. Davis ,  Kenneth P. Rodbell

    IPC分类号： B24B722

    CPC分类号： B24B37/26 ,  B24D18/00

    摘要： Grooves are formed in a CMP pad by positioning the pad on a supporting surface with a working surface of the pad in spaced relation opposite to a router bit and at least one projecting stop member adjacent to the router bit, an outer end portion of the bit projecting beyond the stop. When the bit is rotated, relative axial movement between the bit and the pad causes the outer end portion of the bit to cut an initial recess in the pad. Relative lateral movement between the rotating bit and the pad then forms a groove which extends laterally away from the recess and has a depth substantially the same as that of the recess. The depths of the initial recess and the groove are limited by applying a vacuum to the working surface of the pad to keep it in contact with the stop member(s). Different lateral movements between the bit and the pad are used to form a variety of groove patterns, the depths of which are precisely controlled by the stop member(s). The grooves may be formed in the polishing surface and/or the rear opposite surface of the pad and passages may be provided for interconnecting the rear grooves with the polishing surface or the front grooves.

    摘要翻译： 通过将衬垫定位在支撑表面上，使衬垫的工作表面与路由器刀片相对的间隔开的关系形成凹槽，并且至少一个与路由器刀头相邻的突出止动件，钻头的外端部分 突出超出停止。 当钻头旋转时，钻头和钻头之间的相对轴向运动使钻头的外端部分切割焊盘中的初始凹陷。 旋转钻头和垫之间的相对横向运动形成一个横向延伸离开凹槽并具有与凹槽基本相同的深度的凹槽。 通过将真空施加到垫的工作表面以使其与止动构件接触来限制初始凹部和凹槽的深度。 钻头和垫之间的不同横向运动用于形成各种凹槽图案，其深度由止动件精确地控制。 凹槽可以形成在抛光表面中和/或垫的后相对表面，并且可以设置通道用于将后槽与抛光表面或前槽相互连接。

    Grooved polishing pads and methods of use
    8.
    发明授权
    Grooved polishing pads and methods of use 有权
    凹槽抛光垫和使用方法

    公开(公告)号：US06656019B1

    公开(公告)日：2003-12-02

    申请号：US09668142

    申请日：2000-09-25

    申请人： Shyng-Tsong Chen ,  Kenneth M. Davis ,  Kenneth P. Rodbell

    发明人： Shyng-Tsong Chen ,  Kenneth M. Davis ,  Kenneth P. Rodbell

    IPC分类号： B24B100

    CPC分类号： B24B37/26 ,  B24D18/00

    摘要： Grooves are formed in a CMP pad by positioning the pad on a supporting surface with a working surface of the pad in spaced relation opposite to a router bit and at least one projecting stop member adjacent to the router bit, an outer end portion of the bit projecting beyond the stop. When the bit is rotated, relative axial movement between the bit and the pad causes the outer end portion of the bit to cut an initial recess in the pad. Relative lateral movement between the rotating bit and the pad then forms a groove which extends laterally away from the recess and has a depth substantially the same as that of the recess. Different lateral movements between the bit and the pad are used to form a variety of groove patterns, the depths of which are precisely controlled by the stop member(s). The grooves may be formed in the polishing surface and/or the rear opposite surface of the pad and passages may be provided for interconnecting the rear grooves with the polishing surface or the front grooves. Grooves in the polishing surface may be provided with outlets through which a polishing slurry may flow while the polishing surface is in contact with a workpiece surface.

    摘要翻译： 通过将衬垫定位在支撑表面上，使衬垫的工作表面与路由器刀片相对的间隔开的关系形成凹槽，并且至少一个与路由器刀头相邻的突出止动件，钻头的外端部分 突出超出停止。 当钻头旋转时，钻头和钻头之间的相对轴向运动使钻头的外端部分切割焊盘中的初始凹陷。 旋转钻头和垫之间的相对横向运动形成一个横向延伸离开凹槽并具有与凹槽基本相同的深度的凹槽。 钻头和垫之间的不同横向运动用于形成各种凹槽图案，其深度由止动件精确地控制。 凹槽可以形成在抛光表面中和/或垫的后相对表面，并且可以设置通道用于将后槽与抛光表面或前槽相互连接。 抛光表面中的凹槽可以设置有抛光浆料可以在抛光表面与工件表面接触的同时流过的出口。