公开(公告)号：US20070243327A1

公开(公告)日：2007-10-18

申请号：US11638672

申请日：2006-12-14

申请人： Song Kang ,  Tamotsu Morimoto ,  Yoshihiro Kato

发明人： Song Kang ,  Tamotsu Morimoto ,  Yoshihiro Kato

IPC分类号： C23C16/40

CPC分类号： C23C16/401 ,  C23C16/45523 ,  H01L21/02126 ,  H01L21/02216 ,  H01L21/02274 ,  H01L21/0234 ,  H01L21/02362 ,  H01L21/31633 ,  H01L21/31695

摘要： In the film forming method of the present invention, a substrate is first received in a processing vessel. Then, a film-forming gas including an organic silicon and an additive gas including a paraffin hydrocarbon gas and/or a hydrogen gas are introduced into the processing vessel, and the film-forming gas and the additive gas are then converted into plasma. In this manner, a carbon-hydrogen-added silicon oxide film (SiCOH film) is formed on the substrate. Alternatively, the film-forming gas is first introduced into the processing vessel containing the substrate and is then converted into plasma to form the SiCOH film on the substrate. Subsequently, the additive gas is introduced into the processing vessel and is then converted into plasma to post-treat the substrate having the SiCOH film formed thereon.

摘要翻译： 在本发明的成膜方法中，首先在处理容器中接收基板。 然后，将包含有机硅和包含石蜡烃气体和/或氢气的添加气体的成膜气体引入处理容器中，然后将成膜气体和添加气体转化为等离子体。 以这种方式，在基板上形成碳氢氧化硅膜（SiCOH膜）。 或者，首先将成膜气体引入含有基板的处理容器中，然后将其转化为等离子体，以在基板上形成SiCOH膜。 随后，将添加气体引入处理容器中，然后将其转化为等离子体以对其上形成有SiCOH膜的基板进行后处理。

公开(公告)号：US20070104797A1

公开(公告)日：2007-05-10

申请号：US10580741

申请日：2004-11-24

申请人： Song Kang

发明人： Song Kang

IPC分类号： A61K33/00

CPC分类号： A61K33/00

摘要： Provided is a new use of Brown's gas, more particularly, to the use of Brown's gas for the treatment of diseases in mammals and a Brown's gas supply apparatus therefor. It is based on the assumption that the Brown's gas is a medium capable of directly supplying moisture (special form of water according to the third theory of Brown's gas) to many regions of the body via skin, etc. Various effects of the Brown's gas on the body have been demonstrated. In particular, provided is a new use of the Brown's gas for treatment or alleviation of the symptoms of a lesion in a lesional tissue, cell, or organ of a mammal. Provided is also a simple and inexpensive Brown's gas supply apparatus for supplying pure Brown's gas suitable to be applied to the human body.

摘要翻译： 布朗气体的新用途，特别是使用布朗的气体来治疗哺乳动物的疾病以及布朗的天然气供应设备。 这是基于以下假设：布朗的气体是能够通过皮肤等直接供应水分（根据布朗气体的第三种理论的特殊形式的水）到身体的许多区域的介质等。布朗气体的各种影响 身体已被证明。 特别地，提供了布朗气体的新用途来治疗或减轻哺乳动物的损伤组织，细胞或器官中病变的症状。 提供了一种简单廉价的布朗气体供应装置，用于提供适用于人体的纯棕色气体。