Micromechanical thermal sensor
    3.
    发明申请
    Micromechanical thermal sensor 有权
    微机械热传感器

    公开(公告)号:US20070278407A1

    公开(公告)日:2007-12-06

    申请号:US11446806

    申请日:2006-06-02

    IPC分类号: G01J5/02

    摘要: A radiation sensor that can operate in the THz regime comprising: a micro antenna, which may comprise a two-dimensional patterned thin-film metallizations on a thin dielectric pellicle fabricated by micro machining of a silicon wafer; a thermally isolated microstructure; a coupling mechanism for coupling the energy from the micro antenna to the microstructure, the coupling mechanism providing high thermal isolation between the micro antenna and the microstructure; a temperature signal detector on the microstructure; and signal processing electronics for receiving the temperature signal and processing it into useful data.

    摘要翻译: 一种能够以太赫兹方式操作的辐射传感器,包括:微天线,其可以包括通过硅晶片的微加工制造的薄介电薄膜上的二维图案化薄膜金属化; 热隔离微结构; 用于将来自微天线的能量耦合到微结构的耦合机构,所述耦合机构在微天线和微结构之间提供高热隔离; 微结构的温度信号检测器; 以及用于接收温度信号并将其处理成有用数据的信号处理电子装置。

    Micromechanical thermal sensor
    4.
    发明授权
    Micromechanical thermal sensor 有权
    微机械热传感器

    公开(公告)号:US07501626B2

    公开(公告)日:2009-03-10

    申请号:US11446806

    申请日:2006-06-02

    IPC分类号: G01J5/00

    摘要: A radiation sensor that can operate in the THz regime comprising: a micro antenna, which may comprise a two-dimensional patterned thin-film metallizations on a thin dielectric pellicle fabricated by micro machining of a silicon wafer; a thermally isolated microstructure; a coupling mechanism for coupling the energy from the micro antenna to the microstructure, the coupling mechanism providing high thermal isolation between the micro antenna and the microstructure; a temperature signal detector on the microstructure; and signal processing electronics for receiving the temperature signal and processing it into useful data.

    摘要翻译: 一种能够以太赫兹方式操作的辐射传感器,包括:微天线,其可以包括通过硅晶片的微加工制造的薄介电薄膜上的二维图案化薄膜金属化; 热隔离微结构; 用于将来自微天线的能量耦合到微结构的耦合机构,所述耦合机构在微天线和微结构之间提供高热隔离; 微结构的温度信号检测器; 以及用于接收温度信号并将其处理成有用数据的信号处理电子装置。