公开(公告)号：USD492137S1

公开(公告)日：2004-06-29

申请号：US29183834

申请日：2003-06-18

申请人： Stuart Siegel ,  William Sterling

设计人： Stuart Siegel ,  William Sterling

公开(公告)号：US20050196107A1

公开(公告)日：2005-09-08

申请号：US10843879

申请日：2004-05-12

申请人： Gongen Gu ,  William Sterling

发明人： Gongen Gu ,  William Sterling

IPC分类号： G02B6/42

CPC分类号： G02B6/4246 ,  G02B6/4263 ,  G02B6/4265 ,  G02B6/4274 ,  G02B6/4277

摘要： An innovation in construction of a triplexer type of device features an optical wavelength separation system that permits the orientation of all transmitter and receiver elements such that their respective electronic connections can be arranged to extend in a single direction from a single package to allow a simple direct insertion into a circuit board for socket mounting, soldering or welding. The advantages of this approach include reduced handling time in a mass production setting, lowered parasitic capacitance, and reduced RFI susceptibility for improved electronic performance.

摘要翻译： 三重装置类型的装置的创新特征在于一种光学波长分离系统，其允许所有发射器和接收器元件的取向，使得其各自的电子连接可以被布置成从单个包装沿单个方向延伸以允许简单的直接 插入电路板用于插座安装，焊接或焊接。 这种方法的优点包括缩短批量生产设置中的处理时间，降低寄生电容，并降低RFI易感性，从而改善电子性能。

公开(公告)号：US20050285992A1

公开(公告)日：2005-12-29

申请号：US11145018

申请日：2005-06-02

申请人： John White ,  Shinichi Kurita ,  William Sterling ,  Yoshiaki Tanase

发明人： John White ,  Shinichi Kurita ,  William Sterling ,  Yoshiaki Tanase

IPC分类号： B65G49/00 ,  G02F1/1333 ,  H01L21/00 ,  H01L21/677 ,  H01L21/68

CPC分类号： H01L21/67126 ,  H01L21/67201

摘要： In certain aspects, a load lock chamber is provided that includes a body having at least one sealing surface wall including a sealing surface. The sealing surface wall has an opening adjacent the sealing surface adapted to input or output a substrate. The body further includes a plurality of side walls. The load lock chamber also includes a top coupled to the body. The top includes one or more openings that divide the top into a first portion and a second portion. The load lock chamber further includes one or more top sealing members adapted to cover each opening of the top. Each top sealing member absorbs a movement of the first portion of the top relative to the second portion of the top. Numerous other aspects are provided.

摘要翻译： 在某些方面，提供了一种装载锁定室，其包括具有包括密封表面的至少一个密封表面壁的主体。 密封表面壁具有邻近密封表面的开口，适于输入或输出基底。 身体还包括多个侧壁。 负载锁定室还包括联接到主体的顶部。 顶部包括将顶部分成第一部分和第二部分的一个或多个开口。 负载锁定室还包括适于覆盖顶部的每个开口的一个或多个顶部密封构件。 每个顶部密封构件吸收顶部相对于顶部的第二部分的第一部分的运动。 提供了许多其他方面。

公开(公告)号：US20050274459A1

公开(公告)日：2005-12-15

申请号：US10867344

申请日：2004-06-14

申请人： Yoshiaki Tanase ,  William Sterling ,  Paul Haworth

发明人： Yoshiaki Tanase ,  William Sterling ,  Paul Haworth

IPC分类号： C23F1/00 ,  F16K1/226 ,  F16K1/24 ,  F16K51/02 ,  H01L21/00

CPC分类号： F16K1/2261 ,  F16K1/24 ,  F16K51/02 ,  H01L21/67126 ,  Y10S277/91

摘要： Embodiments of the invention generally provide a slit valve door seal. In one embodiment, a slit valve door seal includes a ring-shaped base having a center axis and at least one finger extending from the base. The finger is oriented substantially parallel to the center axis, wherein the base and the finger define a single, one-piece seal member. The seal is particularly suitable for using in sealing substrate access passages formed in load lock chambers.

摘要翻译： 本发明的实施例通常提供狭缝阀门密封件。 在一个实施例中，狭缝阀门密封件包括具有中心轴线的环形基座和从基座延伸的至少一根手指。 手指基本上平行于中心轴线定向，其中基部和手指限定单个单件密封构件。 该密封特别适合于在装载锁定室中形成的密封基板通路中使用。

公开(公告)号：US20050183827A1

公开(公告)日：2005-08-25

申请号：US11063454

申请日：2005-02-23

申请人： John White ,  William Sterling

发明人： John White ,  William Sterling

IPC分类号： C23C16/455 ,  C23C16/44 ,  C23C16/513 ,  C23F1/00 ,  H01J37/32 ,  H01L21/205 ,  H01L21/3065

CPC分类号： C23C16/45565 ,  H01J37/3244 ,  H01J37/32522

摘要： Methods and apparatus for accommodating thermal expansion of a showerhead. In a first aspect of the invention, the showerhead is movably supported by resting a rim of the showerhead on a support shelf. In a second aspect, the showerhead is suspended from the chamber wall by a plurality of hangers that are connected to the showerhead, the chamber wall, or both by pins that slide within slots so as to permit the hangers to slide radially to accommodate thermal expansion of the showerhead in the radial direction. In a third aspect, the showerhead is suspended from the wall of the vacuum chamber by a plurality of rods or flexible wires. In a fourth aspect, the showerhead is connected near its perimeter to a second material having a greater thermal expansion coefficient than the showerhead. In a fifth aspect, a heater is mounted behind the showerhead to reduce the termperature differential between the top and bottom surfaces of the showerhead or to reduce heat transfer from the workpiece to the showerhead.

摘要翻译： 用于容纳喷头的热膨胀的方法和装置。 在本发明的第一方面，喷头通过将喷头的边缘放置在支撑架上而被可移动地支撑。 在第二方面，喷头通过多个悬挂器从室壁悬挂，多个悬挂器通过在槽内滑动的销连接到喷头，室壁或两者，以允许吊架径向滑动以适应热膨胀 的喷头在径向方向。 在第三方面，喷头通过多个杆或柔性线悬挂在真空室的壁上。 在第四方面，喷头在其周边附近连接到具有比喷头更大的热膨胀系数的第二材料。 在第五方面，一种加热器被安装在淋浴喷头之后，以降低喷淋头的顶表面和底表面之间的温差，或减少从工件到喷头的热传递。

公开(公告)号：US20060011139A1

公开(公告)日：2006-01-19

申请号：US11143992

申请日：2005-06-02

申请人： William Sterling ,  John White

发明人： William Sterling ,  John White

IPC分类号： C23C16/00

CPC分类号： C23C16/4586

摘要： A method and apparatus for making a heated substrate support assembly used in a processing chamber is provided. The processing chamber includes a substrate support assembly, having a first plate and a second plate with grooves disposed therein for receiving one or more heating elements, and a power source for heating the substrate support assembly. A first surface of the first plate and a second surface of the second plate include one or more matching structures disposed thereon, such that both plates can be compressed together by isostatic compression and form into a plate-like structure for supporting a substrate during substrate processing. In another embodiment, the first and second plates are compressed by applying pressure all around. In still another embodiment, compressing the first and second plates is performed at elevated temperature.

摘要翻译： 提供了一种用于制造在处理室中使用的加热的衬底支撑组件的方法和装置。 处理室包括基板支撑组件，其具有第一板和第二板，其中设置有用于接收一个或多个加热元件的槽，以及用于加热基板支撑组件的电源。 第一板的第一表面和第二板的第二表面包括设置在其上的一个或多个匹配结构，使得两个板可以通过等静压压缩在一起，并形成用于在衬底处理期间支撑衬底的板状结构 。 在另一个实施例中，通过施加全部压力来压缩第一和第二板。 在另一个实施例中，压缩第一和第二板在升高的温度下进行。