公开(公告)号：US6107192A

公开(公告)日：2000-08-22

申请号：US746

申请日：1997-12-30

申请人： Suchitra Subrahmanyan ,  Liang-Yuh Chen ,  Roderick Craig Mosely

发明人： Suchitra Subrahmanyan ,  Liang-Yuh Chen ,  Roderick Craig Mosely

IPC分类号： C23C14/02 ,  C23C16/02 ,  H01L21/285 ,  H01L21/302 ,  H01L21/304 ,  H01L21/3065 ,  H01L21/768 ,  H01L21/4763

CPC分类号： C23C16/0236 ,  C23C14/022 ,  H01L21/02063 ,  H01L21/76814 ,  H01L21/76843 ,  H01L21/76861 ,  Y10S438/906

摘要： The present invention generally provides a precleaning process prior to metallization for submicron features on substrates. The method includes cleaning the submicron features with radicals from a plasma of a reactive gas such as oxygen, a mixture of CF.sub.4 /O.sub.2, or a mixture of He/NF.sub.3, wherein the plasma is preferably generated by a remote plasma source and the radicals are delivered to a chamber in which the substrate is disposed. Native oxides remaining in the submicron features are preferably reduced in a second step by treatment with radicals from a plasma containing hydrogen. Following the first or both precleaning steps, the features can be filled with metal by available metallization techniques which typically include depositing a barrier/liner layer on exposed dielectric surfaces prior to deposition of aluminum, copper, or tungsten. The precleaning and metallization steps can be conducted on available integrated processing platforms.

摘要翻译： 本发明通常在金属化之前提供在衬底上的亚微米特征的预清洗工艺。 该方法包括用来自诸如氧的反应性气体的等离子体，CF 4 / O 2或He / NF 3的混合物的混合物的自由基清洗亚微米特征，其中等离子体优选由远程等离子体源产生，并且基团是 输送到其中设置基板的室。 残留在亚微米特征中的天然氧化物优选通过用含有氢的等离子体进行处理而在第二步骤中还原。 在第一或两个预清洗步骤之后，特征可以通过可用的金属化技术用金属填充，其通常包括在沉积铝，铜或钨之前在暴露的电介质表面上沉积阻挡层/衬垫层。 预清洗和金属化步骤可以在可用的集成处理平台上进行。

公开(公告)号：US06693030B1

公开(公告)日：2004-02-17

申请号：US09617522

申请日：2000-07-14

申请人： Suchitra Subrahmanyan ,  Liang-Yuh Chen ,  Roderick Craig Mosely

发明人： Suchitra Subrahmanyan ,  Liang-Yuh Chen ,  Roderick Craig Mosely

IPC分类号： H01L214763

CPC分类号： C23C16/0236 ,  C23C14/022 ,  H01L21/02063 ,  H01L21/76814 ,  H01L21/76843 ,  H01L21/76861 ,  Y10S438/906

摘要： The present invention generally provides a precleaning process prior to moralization for submicron features on substrates. The method includes cleaning the submicron features with radicals from a plasma of a reactive gas such as oxygen, a mixture of CF4/O2, or a mixture of He/NF3, wherein the plasma is preferably generated by a remote plasma source and the radicals are delivered to a chamber in which the substrate is disposed. Native oxides remaining in the submicron features are preferably reduced in a second step by treatment with radicals from a plasma containing hydrogen. Following the first or both precleaning steps, the features can be filled with metal by available moralization techniques which typically include depositing a barrier/liner layer on exposed dielectric surfaces prior to deposition of aluminum, copper, or tungsten. The precleaning and moralization steps can be conducted on available integrated processing platforms.

摘要翻译： 本发明通常提供在衬底上的亚微米特征的道德化之前的预清洗过程。 该方法包括用来自诸如氧的反应性气体的等离子体，CF 4 / O 2或He / NF 3的混合物的混合物的自由基清洗亚微米特征，其中等离子体优选由远程等离子体源产生，并且基团是 输送到其中设置基板的室。 残留在亚微米特征中的天然氧化物优选通过用含有氢的等离子体进行处理而在第二步骤中还原。 在第一个或两个预清洗步骤之后，特征可以通过可用的道德化技术用金属填充，其通常包括在沉积铝，铜或钨之前在暴露的电介质表面上沉积阻挡层/衬垫层。 预处理和道德化步骤可以在现有的综合处理平台上进行。

公开(公告)号：US06905965B2

公开(公告)日：2005-06-14

申请号：US10780105

申请日：2004-02-17

申请人： Suchitra Subrahmanyan ,  Liang-Yuh Chen ,  Roderick Craig Mosely

发明人： Suchitra Subrahmanyan ,  Liang-Yuh Chen ,  Roderick Craig Mosely

IPC分类号： C23C14/02 ,  C23C16/02 ,  H01L21/285 ,  H01L21/302 ,  H01L21/304 ,  H01L21/3065 ,  H01L21/768 ,  H01L21/44

CPC分类号： C23C16/0236 ,  C23C14/022 ,  H01L21/02063 ,  H01L21/76814 ,  H01L21/76843 ,  H01L21/76861 ,  Y10S438/906

摘要： The present invention generally provides a precleaning process prior to metallization for submicron features on substrates. The method includes cleaning the submicron features with radicals from a plasma of a reactive gas such as oxygen, a mixture of CF4/O2, or a mixture of He/NF3, wherein the plasma is preferably generated by a remote plasma source and the radicals are delivered to a chamber in which the substrate is disposed. Native oxides remaining in the submicron features are preferably reduced in a second step by treatment with radicals from a plasma containing hydrogen. Following the first or both precleaning steps, the features can be filled with metal by available metallization techniques which typically include depositing a barrier/liner layer on exposed dielectric surfaces prior to deposition of aluminum, copper, or tungsten. The precleaning and metallization steps can be conducted on available integrated processing platforms.

摘要翻译： 本发明通常在金属化之前提供在衬底上的亚微米特征的预清洗工艺。 该方法包括用来自反应气体的等离子体（例如氧气），CF 3/4 O 2 / O 2混合物或He / NF混合物的自由基清洗亚微米特征 其中等离子体优选地由远程等离子体源产生，并且自由基被输送到其中设置衬底的室。 残留在亚微米特征中的天然氧化物优选通过用含有氢的等离子体进行处理而在第二步骤中还原。 在第一或两个预清洗步骤之后，特征可以通过可用的金属化技术用金属填充，其通常包括在沉积铝，铜或钨之前在暴露的电介质表面上沉积阻挡层/衬垫层。 预清洗和金属化步骤可以在可用的集成处理平台上进行。

公开(公告)号：US06518176B2

公开(公告)日：2003-02-11

申请号：US09092747

申请日：1998-06-05

申请人： Ted Guo ,  Liang-Yuh Chen ,  Suchitra Subrahmanyan ,  Roderick C. Mosely

发明人： Ted Guo ,  Liang-Yuh Chen ,  Suchitra Subrahmanyan ,  Roderick C. Mosely

IPC分类号： H01L2144

CPC分类号： H01L21/76876 ,  H01L21/28518 ,  H01L21/76843 ,  H01L21/76855 ,  H01L21/76856 ,  H01L23/485 ,  H01L23/53223 ,  H01L2924/0002 ,  H01L2924/00

摘要： A contact level via and a method of performing selective deposition of a barrier layer to form a contact level via for selective aluminum metallization. Specifically, the method forms a self-aligned silicide region by depositing titanium atop a structure containing a contact level via, converting the titanium in the contact regions into titanium silicide, removing the unreacted titanium, and performing nitridation of the titanium silicide to complete a barrier layer located in only the contact region of the via. Once the barrier layer is formed, the layer can be optionally fortified through oxygen stuffing to create an effective barrier layer for aluminum metallization.

摘要翻译： 接触电平通孔和执行选择性沉积阻挡层以形成用于选择性铝金属化的接触电平通路的方法。 具体地，该方法通过在包含接触电平通孔的结构上方沉积钛而形成自对准硅化物区域，将接触区域中的钛转化为硅化钛，除去未反应的钛，并进行硅化钛的氮化以完成阻挡层 层位于通孔的接触区域中。 一旦形成了阻挡层，就可以通过氧气填充来选择性地强化该层，以产生用于铝金属化的有效阻挡层。

公开(公告)号：US6110828A

公开(公告)日：2000-08-29

申请号：US791653

申请日：1996-12-30

申请人： Ted Guo ,  Liang-Yuh Chen ,  Suchitra Subrahmanyan

发明人： Ted Guo ,  Liang-Yuh Chen ,  Suchitra Subrahmanyan

IPC分类号： H01L21/285 ,  H01L21/28 ,  H01L21/3205 ,  H01L21/768 ,  H01L23/52 ,  H01L21/443

CPC分类号： H01L21/76879

摘要： The present invention generally provides a method of forming a structure having a selective CVD metal plug with a continuous barrier layer formed thereon. More particularly, the present invention applies a thin layer of warm PVD metal over a selective CVD metal plug and adjacent nodules on the dielectric field to planarize the metal surface. A barrier is then deposited over the planarized metal surface. Therefore, the invention provides the advantages of having (1) void-free, sub-half micron selective CVD metal via plugs and interconnects, and (2) a reduced number of process steps without the use of CMP, and (3) barrier layers over the metal plugs to improve the electromigration resistance of the metal.

摘要翻译： 本发明通常提供一种形成具有在其上形成有连续势垒层的选择性CVD金属塞的结构的方法。 更具体地说，本发明在选择性CVD金属塞上和在电介质场上的相邻结节上施加薄层的温热PVD金属以使金属表面平坦化。 然后在平坦化的金属表面上沉积屏障。 因此，本发明提供了具有（1）无空隙的半微米选择性CVD金属通孔塞和互连件的优点，和（2）减少数量的工艺步骤而不使用CMP，以及（3）阻挡层 在金属插头上提高金属的电迁移阻力。