公开(公告)号：US20130078059A1

公开(公告)日：2013-03-28

申请号：US13611555

申请日：2012-09-12

申请人： Suguru ENOKIDA ,  Masahiro NAKAHARADA ,  Akira MIYATA ,  Hidekazu KIYAMA ,  Naruaki IIDA

发明人： Suguru ENOKIDA ,  Masahiro NAKAHARADA ,  Akira MIYATA ,  Hidekazu KIYAMA ,  Naruaki IIDA

IPC分类号： B05C13/00 ,  B25J9/00 ,  B05C11/00

CPC分类号： H01L21/67178 ,  H01L21/67745 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67781 ,  H01L21/68707 ,  Y10S414/137 ,  Y10S414/139

摘要： A substrate processing apparatus includes: a carrier block including first and second carrier placement units spaced apart in a right and left direction; a processing block having a layered structure in which a plurality of layered parts are vertically arranged, the layered parts each including a substrate transport mechanism for transporting a substrate and a processing module for processing a substrate; a tower unit including plural substrate placement units located at height positions where a substrate is transferred by the substrate transport mechanism of the layered part corresponding to the substrate placement unit; a first substrate transfer mechanism configured to transfer a substrate between the carrier on the first carrier placement unit and the substrate placement unit of the tower unit; and a second substrate transfer mechanism configured to transfer a substrate between the carrier on the second substrate placement unit and the substrate placement unit of the tower unit.

摘要翻译： 基板处理装置包括：载体块，其包括沿左右方向间隔开的第一和第二载体放置单元; 具有层叠结构的处理块，其中多个层叠部分垂直布置，所述层叠部分各自包括用于输送基板的基板传送机构和用于处理基板的处理模块; 塔架单元，其包括多个基板放置单元，位于基板通过与基板放置单元对应的层叠部的基板输送机构转印的高度位置; 第一基板传送机构，被配置为在第一载体放置单元上的载体和塔单元的基板放置单元之间传送基板; 以及第二基板输送机构，被配置为将基板转移到第二基板放置单元上的载体和塔单元的基板放置单元之间。

公开(公告)号：US20120015307A1

公开(公告)日：2012-01-19

申请号：US13182572

申请日：2011-07-14

申请人： Nobuaki MATSUOKA ,  Akira MIYATA ,  Shinichi HAYASHI ,  Suguru ENOKIDA

发明人： Nobuaki MATSUOKA ,  Akira MIYATA ,  Shinichi HAYASHI ,  Suguru ENOKIDA

IPC分类号： G03F7/20 ,  G03B27/32

CPC分类号： H01L21/67178 ,  G03F7/16 ,  G03F7/162 ,  G03F7/30 ,  G03F7/3021 ,  H01L21/67184 ,  H01L21/67225 ,  H01L21/6723

摘要： In one embodiment, a coating and developing apparatus is provided with transfer units, provided between a stack of early-stage processing unit blocks and a stack of later-stage processing unit blocks to transfer a substrate between the transport mechanisms of laterally-adjacent unit blocks, and a vertically-movable auxiliary transfer mechanism for transporting a substrate between the transfer units. A stack of first developing unit blocks is stacked on the stack of early-stage processing unit blocks, and a stack of second developing unit blocks is stacked on the stack of later-stage processing unit blocks.

摘要翻译： 在一个实施例中，涂覆和显影装置设置有转移单元，其设置在一堆早期处理单元块和一堆后期处理单元块之间，用于在横向相邻单元块的传送机构之间传送基板 以及用于在转印单元之间输送基板的可垂直移动的辅助转印机构。 一堆第一显影单元块堆叠在早期处理单元块的堆叠上，并且第二显影单元块的堆叠堆叠在后级处理单元块的堆叠上。