Physical failure analysis guiding methods
    1.
    发明授权
    Physical failure analysis guiding methods 有权
    物理故障分析指导方法

    公开(公告)号:US08205173B2

    公开(公告)日:2012-06-19

    申请号:US12818003

    申请日:2010-06-17

    CPC分类号: G01R31/2894

    摘要: A method includes providing a plurality of failure dies, and performing a chip probing on the plurality of failure dies to generate a data log comprising electrical characteristics of the plurality of failure dies. An automatic net tracing is performed to trace failure candidate nodes in the failure dies. A failure layer analysis is performed on results obtained from the automatic net tracing. Physical failure analysis (PFA) samples are selected from the plurality of failure dies using results obtained in the step of performing the failure layer analysis.

    摘要翻译: 一种方法包括提供多个故障管芯,并对多个故障管芯进行芯片探测以产生包括多个故障管芯的电气特性的数据记录。 执行自动网络跟踪以跟踪故障模块中的故障候选节点。 对从自动网络跟踪获得的结果执行故障层分析。 使用在执行故障层分析的步骤中获得的结果从多个故障模具中选择物理故障分析(PFA)样本。

    Physical Failure Analysis Guiding Methods
    2.
    发明申请
    Physical Failure Analysis Guiding Methods 有权
    物理故障分析指导方法

    公开(公告)号:US20110314336A1

    公开(公告)日:2011-12-22

    申请号:US12818003

    申请日:2010-06-17

    IPC分类号: G06F11/07

    CPC分类号: G01R31/2894

    摘要: A method includes providing a plurality of failure dies, and performing a chip probing on the plurality of failure dies to generate a data log comprising electrical characteristics of the plurality of failure dies. An automatic net tracing is performed to trace failure candidate nodes in the failure dies. A failure layer analysis is performed on results obtained from the automatic net tracing. Physical failure analysis (PFA) samples are selected from the plurality of failure dies using results obtained in the step of performing the failure layer analysis.

    摘要翻译: 一种方法包括提供多个故障管芯,并对多个故障管芯进行芯片探测以产生包括多个故障管芯的电气特性的数据记录。 执行自动网络跟踪以跟踪故障模块中的故障候选节点。 对从自动网络跟踪获得的结果执行故障层分析。 使用在执行故障层分析的步骤中获得的结果从多个故障模具中选择物理故障分析(PFA)样本。

    Processing exception handling
    7.
    发明授权
    Processing exception handling 有权
    处理异常处理

    公开(公告)号:US08549012B2

    公开(公告)日:2013-10-01

    申请号:US12778855

    申请日:2010-05-12

    IPC分类号: G06F7/00 G06F17/30

    摘要: In accordance with an embodiment, a method for exception handling comprises accessing an exception type for an exception, filtering historical data based on at least one defined criterion to provide a data train comprising data sets, assigning a weight to each data set, and providing a current control parameter. The data sets each comprise a historical condition and a historical control parameter, and the weight assigned to each data set is based on each historical condition. The current control parameter is provided using the weight and the historical control parameter for each data set.

    摘要翻译: 根据实施例,用于异常处理的方法包括访问异常的异常类型,基于至少一个定义的标准过滤历史数据,以提供包括数据集的数据队列,为每个数据集分配权重,以及提供 电流控制参数。 数据集各自包含历史条件和历史控制参数,并且分配给每个数据集的权重基于每个历史条件。 使用每个数据集的权重和历史控制参数提供当前的控制参数。

    APC Model Extension Using Existing APC Models
    8.
    发明申请
    APC Model Extension Using Existing APC Models 有权
    APC型号扩展使用现有的APC型号

    公开(公告)号:US20110301736A1

    公开(公告)日:2011-12-08

    申请号:US12793307

    申请日:2010-06-03

    IPC分类号: G06F17/50

    CPC分类号: G05B17/02 H01L22/20

    摘要: A method of extending advanced process control (APC) models includes constructing an APC model table including APC model parameters of a plurality of products and a plurality of work stations. The APC model table includes empty cells and cells filled with existing APC model parameters. Average APC model parameters of the existing APC model parameters are calculated, and filled into the empty cells as initial values. An iterative calculation is performed to update the empty cells with updated values.

    摘要翻译: 扩展先进过程控制(APC)模型的方法包括构建包括多个产品的APC模型参数和多个工作站的APC模型表。 APC模型表包括空单元格和填充有现有APC模型参数的单元格。 计算现有APC模型参数的平均APC模型参数,并作为初始值填充到空单元格中。 执行迭代计算以更新值更新空单元格。

    APC model extension using existing APC models
    9.
    发明授权
    APC model extension using existing APC models 有权
    APC型号扩展使用现有的APC型号

    公开(公告)号:US09026239B2

    公开(公告)日:2015-05-05

    申请号:US12793307

    申请日:2010-06-03

    CPC分类号: G05B17/02 H01L22/20

    摘要: A method of extending advanced process control (APC) models includes constructing an APC model table including APC model parameters of a plurality of products and a plurality of work stations. The APC model table includes empty cells and cells filled with existing APC model parameters. Average APC model parameters of the existing APC model parameters are calculated, and filled into the empty cells as initial values. An iterative calculation is performed to update the empty cells with updated values.

    摘要翻译: 扩展先进过程控制(APC)模型的方法包括构建包括多个产品的APC模型参数和多个工作站的APC模型表。 APC模型表包括空单元格和填充有现有APC模型参数的单元格。 计算现有APC模型参数的平均APC模型参数,并作为初始值填充到空单元格中。 执行迭代计算以更新值更新空单元格。

    Processing Exception Handling
    10.
    发明申请
    Processing Exception Handling 有权
    处理异常处理

    公开(公告)号:US20110282885A1

    公开(公告)日:2011-11-17

    申请号:US12778855

    申请日:2010-05-12

    IPC分类号: G06F17/30

    摘要: In accordance with an embodiment, a method for exception handling comprises accessing an exception type for an exception, filtering historical data based on at least one defined criterion to provide a data train comprising data sets, assigning a weight to each data set, and providing a current control parameter. The data sets each comprise a historical condition and a historical control parameter, and the weight assigned to each data set is based on each historical condition. The current control parameter is provided using the weight and the historical control parameter for each data set.

    摘要翻译: 根据实施例,用于异常处理的方法包括访问异常的异常类型,基于至少一个定义的标准过滤历史数据,以提供包括数据集的数据队列,为每个数据集分配权重,以及提供 电流控制参数。 数据集各自包含历史条件和历史控制参数,并且分配给每个数据集的权重基于每个历史条件。 使用每个数据集的权重和历史控制参数提供当前的控制参数。