Mask inspection apparatus
    1.
    发明授权
    Mask inspection apparatus 有权
    面膜检查仪

    公开(公告)号:US08154719B2

    公开(公告)日:2012-04-10

    申请号:US12402878

    申请日:2009-03-12

    IPC分类号: G01N21/00

    摘要: A lightweight and inexpensive mask inspection apparatus having highly efficient environmental radiation resistance is provided. The mask inspection apparatus is a mask inspection apparatus for inspecting for mask defects and includes a light source, an illuminating optical system configured to irradiate a mask with an inspection light emitted from the light source, a magnifying optical system configured to cause the inspection light with which the mask is irradiated to form an image as an optical image, and image sensor configured to acquire the optical image. The image sensor has an environmental radiation shielding member of heavy metal having a specific gravity equal to or greater than that of tantalum (Ta) at least on a side opposite to a receiving surface of a sensor chip.

    摘要翻译: 提供一种具有高效环境辐射阻力的轻便且廉价的掩模检查装置。 掩模检查装置是用于检查掩模缺陷的掩模检查装置,包括光源,被配置为用从光源发射的检查光照射掩模的照明光学系统,被配置为使检查光与 照射掩模以形成作为光学图像的图像,以及被配置为获取光学图像的图像传感器。 图像传感器至少在与传感器芯片的接收表面相对的一侧上具有重量等于或大于钽(Ta)的重金属的环境辐射屏蔽构件。

    MASK INSPECTION APPARATUS
    2.
    发明申请
    MASK INSPECTION APPARATUS 有权
    屏蔽检查装置

    公开(公告)号:US20090244530A1

    公开(公告)日:2009-10-01

    申请号:US12402878

    申请日:2009-03-12

    IPC分类号: G01N21/88

    摘要: A lightweight and inexpensive mask inspection apparatus having highly efficient environmental radiation resistance is provided. The mask inspection apparatus is a mask inspection apparatus for inspecting for mask defects and includes a light source, an illuminating optical system configured to irradiate a mask with an inspection light emitted from the light source, a magnifying optical system configured to cause the inspection light with which the mask is irradiated to form an image as an optical image, and image sensor configured to acquire the optical image. The image sensor has an environmental radiation shielding member of heavy metal having a specific gravity equal to or greater than that of tantalum (Ta) at least on a side opposite to a receiving surface of a sensor chip.

    摘要翻译: 提供一种具有高效环境辐射阻力的轻便且廉价的掩模检查装置。 掩模检查装置是用于检查掩模缺陷的掩模检查装置,包括光源,被配置为用从光源发射的检查光照射掩模的照明光学系统,被配置为使检查光与 掩模被照射以形成作为光学图像的图像,以及被配置为获取光学图像的图像传感器。 图像传感器至少在与传感器芯片的接收表面相对的一侧上具有重量等于或大于钽(Ta)的重金属的环境辐射屏蔽构件。

    Thermoplastic resin composition for vehicle lamp housings
    4.
    发明授权
    Thermoplastic resin composition for vehicle lamp housings 有权
    汽车灯壳用热塑性树脂组合物

    公开(公告)号:US09328186B2

    公开(公告)日:2016-05-03

    申请号:US13581791

    申请日:2011-02-28

    摘要: A thermoplastic resin composition for vehicle lamp housings, includes: 5 to 80 parts by weight of a graft copolymer (A) obtained by graft polymerizing at least one monomer (a-2) selected from the group consisting of aromatic vinyl-based monomers, vinyl cyanide-based monomers, and (meth)acrylic ester-based monomers and maleimide-based monomers, under the presence of an acrylic ester-based rubbery polymer (a-1) having a weight average particle size of 100 to 400 nm; and 20 to 95 parts by weight of a (co)polymer (B) in which at least one monomer (a-2) selected from the group consisting of aromatic vinyl-based monomers, vinyl cyanide-based monomers, (meth)acrylic ester-based monomers and maleimide-based monomers is polymerized, in which a content of total volatiles at 260° C. is no more than 0.7% by weight of the composition overall, and a content of oligomer component having a weight average molecular weight of 200 to 1000 is no more than 0.3% by weight of the composition overall.

    摘要翻译: 一种车载灯座用热塑性树脂组合物,包括:5〜80重量份的接枝共聚物(A),其通过将至少一种选自芳香族乙烯基系单体,乙烯基系单体(a-2) 氰化物类单体和(甲基)丙烯酸酯类单体和马来酰亚胺类单体,在重均粒径为100〜400nm的丙烯酸酯系橡胶状聚合物(a-1)的存在下, 和20至95重量份的(共)聚合物(B),其中至少一种选自芳族乙烯基类单体,乙烯基氰化物系单体,(甲基)丙烯酸酯类的单体(a-2) 基于单体和马来酰亚胺的单体聚合,其中260℃下总挥发物的含量不超过组合物总重量的0.7重量%,重均分子量为200的低聚物组分的含量 至1000不超过组合物的0.3重量%。

    THERMOPLASTIC RESIN COMPOSITION FOR VEHICLE LAMP HOUSINGS
    5.
    发明申请
    THERMOPLASTIC RESIN COMPOSITION FOR VEHICLE LAMP HOUSINGS 有权
    汽车灯泡用热塑性树脂组合物

    公开(公告)号:US20120322945A1

    公开(公告)日:2012-12-20

    申请号:US13581791

    申请日:2011-02-28

    IPC分类号: C08L51/04

    摘要: A thermoplastic resin composition for vehicle lamp housings, includes: 5 to 80 parts by weight of a graft copolymer (A) obtained by graft polymerizing at least one monomer (a-2) selected from the group consisting of aromatic vinyl-based monomers, vinyl cyanide-based monomers, and (meth)acrylic ester-based monomers and maleimide-based monomers, under the presence of an acrylic ester-based rubbery polymer (a-1) having a weight average particle size of 100 to 400 nm; and 20 to 95 parts by weight of a (co)polymer (B) in which at least one monomer (a-2) selected from the group consisting of aromatic vinyl-based monomers, vinyl cyanide-based monomers, (meth)acrylic ester-based monomers and maleimide-based monomers is polymerized, in which a content of total volatiles at 260° C. is no more than 0.7% by weight of the composition overall, and a content of oligomer component having a weight average molecular weight of 200 to 1000 is no more than 0.3% by weight of the composition overall.

    摘要翻译: 一种车载灯座用热塑性树脂组合物,包括:5〜80重量份的接枝共聚物(A),其通过将至少一种选自芳香族乙烯基系单体,乙烯基系单体(a-2) 氰化物类单体和(甲基)丙烯酸酯类单体和马来酰亚胺类单体,在重均粒径为100〜400nm的丙烯酸酯系橡胶状聚合物(a-1)的存在下, 和20至95重量份的(共)聚合物(B),其中至少一种选自芳族乙烯基类单体,乙烯基氰化物系单体,(甲基)丙烯酸酯类的单体(a-2) 基于单体和马来酰亚胺的单体聚合,其中260℃下总挥发物的含量不超过组合物总重量的0.7重量%,重均分子量为200的低聚物组分的含量 至1000不超过组合物的0.3重量%。