公开(公告)号：US09970105B2

公开(公告)日：2018-05-15

申请号：US14138495

申请日：2013-12-23

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Chun-Ta Chen ,  Cheng-Chieh Chen ,  Hong-Hsing Chou ,  Yeh-Chieh Wang ,  Jeng-Yann Tsay ,  Shyue-Shin Tsai ,  Tsung-Yang Liu

IPC分类号： C23C16/44 ,  H01L21/67 ,  H01J37/32

CPC分类号： C23C16/4409 ,  H01J37/32513 ,  H01L21/67126

摘要： Embodiments of method for cooling a wafer are provided. A method for cooling a wafer includes placing the wafer in a processing module via a passage of a seat member. The method also includes moving a closure member toward the seat member in a diagonal manner. The method further includes engaging the seat member and the closure member and placing a portion of the closure member inside the passage. In addition, the method includes performing a process on the wafer in the processing module.

公开(公告)号：US11226564B2

公开(公告)日：2022-01-18

申请号：US16405530

申请日：2019-05-07

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

发明人： Jhan-Hong Yeh ,  Cheng-Chieh Chen ,  Jeng-Yann Tsay ,  Li-Jui Chen ,  Henry Yee Shian Tong ,  Wen-Chih Wang ,  Hsin-Liang Chen

IPC分类号： G03F7/20 ,  H05G2/00

摘要： In a method of diagnosing an RF generator of a laser produced plasma extreme ultra violet (LPP EUV) radiation source apparatus, a testing system is connected to the RF generator of the LPP EUV radiation source apparatus. An output power is measured by the testing system with changing an input power of the RF generator. Using a computer system, the measured output power is analyzed. Based on the analyzed measured output power, whether the RF generator is operating properly is determined.

公开(公告)号：US11158989B2

公开(公告)日：2021-10-26

申请号：US16846103

申请日：2020-04-10

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

发明人： Henry Yee-Shian Tong ,  Wen-Chih Wang ,  Hsin-Liang Chen ,  Louis Chun-Lin Chang ,  Cheng-Chieh Chen ,  Li-Jui Chen ,  Po-Chung Cheng ,  Jeng-Yann Tsay

IPC分类号： H01S3/0971 ,  H01S3/00 ,  H05G2/00 ,  G01J3/443 ,  G03F7/20 ,  G01J3/02

摘要： A device includes a laser source, an amplifier, an optical sensor and a spectrometer. The laser source is configured to produce a seed laser beam. The amplifier includes gain medium and a discharging unit. The discharging unit is configured to pump the gain medium for amplifying power of the seed laser beam. The optical sensor is coupled to the amplifier and configured for sensing an optical emission generated in the amplifier while the gain medium is discharging. The spectrometer is coupled with the optical sensor and configured to measure a spectrum of the optical emission.