PRESSURE SENSOR ARRANGEMENT AND METHOD OF MANUFACTURING A PRESSURE SENSOR ARRANGEMENT

    公开(公告)号:US20250155305A1

    公开(公告)日:2025-05-15

    申请号:US18839674

    申请日:2023-02-08

    Abstract: In an embodiment a pressure sensor arrangement includes a sensor element having a top side and a bottom side, wherein the sensor element comprises a membrane configured to be exposed to a medium and at least one detection element configured to measure a pressure of the medium, a substrate serving as a carrier of the sensor element, wherein the substrate comprises glass and a connection interface, produced by laser welding, arranged between the sensor element and the substrate, wherein the sensor element and the substrate are mechanically firmly and hermetically connected to one another at the connection interface.

Patent Agency Ranking