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1.发明授权
公开(公告)号：US3371213A
公开(公告)日：1968-02-27
申请号：US37816064
申请日：1964-06-26
Applicant: TEXAS INSTRUMENTS INC
Inventor： ADAMS HERBERT D , COTTONGIM BILLIE J
IPC: G01J1/04 , H01L31/0232 , H01L31/052 , H01L31/068 , H01L31/103
CPC classification number: H01L31/1035 , G01J1/0209 , G01J1/04 , G01J1/0411 , H01L31/02327 , H01L31/0543 , H01L31/0682 , Y02E10/52 , Y02E10/547 , Y10S148/005
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