Method for fabricating large scale integrated circuits with discretionary wiring
    1.
    发明授权
    Method for fabricating large scale integrated circuits with discretionary wiring 失效
    用分散布线制作大规模集成电路的方法

    公开(公告)号:US3581385A

    公开(公告)日:1971-06-01

    申请号:US3581385D

    申请日:1967-10-04

    Inventor: LATHROP JAY W

    CPC classification number: H01L27/118 H01L23/522 H01L2924/0002 H01L2924/00

    Abstract: A MET''OD FOR PRODUCING A LARGE SCALE INTEGRATED CIRCUIT ARRAY WITH DISCRETIONARY WIRING BY DETERMINING THE DISTORTION IN THE RECTANGULAR PATTER PRODUCED BY A COMPUTER CONTROLLED CATHODE RAY TUBE, PRODUCING AN ARRAY OF INTEGRATED CIRCUITS ON A SINGLE SEMICONDUCTOR SLICE IN WHICH THE CIRCUITS ARE DISPOSED IN A CORRESPONDINGLY DISTORTED PATTERN, TESTING THE CIRCUITS IN SITU TO DETERMINE THE OPERATIVE CIRCUITS, PRODUCING A PHOTOMASK BY MEANS OF THE CATHODE RAY TUBE, DEFINING THE WIRING NEEDED TO INTERCONNECT THE OPERATIVE CIRCUITS INTO THE DESIRED SYSTEM, AND PATTERNING A METAL FILM BY MEANS OF THE PHOTOMASK.

Patent Agency Ranking