SELF-ALIGNED GATE STRUCTURE
    2.
    发明申请

    公开(公告)号:US20250142866A1

    公开(公告)日:2025-05-01

    申请号:US18783955

    申请日:2024-07-25

    Abstract: The present disclosure generally relates to semiconductor processing for a self-aligned gate structure and corresponding semiconductor device. In an example, a semiconductor device includes a semiconductor substrate, a semiconductor gate layer, an offset dielectric layer, and a gate metal contact. The semiconductor gate layer is over the semiconductor substrate. The offset dielectric layer is over the semiconductor gate layer. The gate metal contact is over the offset dielectric layer and is through an opening through the offset dielectric layer. The gate metal contact contacts the semiconductor gate layer through the opening through the offset dielectric layer. A first sidewall of the semiconductor gate layer, a second sidewall of the offset dielectric layer, and a third sidewall of the gate metal contact are vertically aligned over the semiconductor substrate.

    SOURCE DOWN POWER FET WITH INTEGRATED TEMPERATURE SENSOR

    公开(公告)号:US20200295748A1

    公开(公告)日:2020-09-17

    申请号:US16794275

    申请日:2020-02-19

    Abstract: A device includes an epitaxial layer located over a semiconductor substrate, the epitaxial layer and the substrate both having a first conductivity type. A field-effect transistor (FET) includes source and drain regions having an opposite second conductivity type disposed in the epitaxial layer, and a gate structure over the substrate and between the source and drain regions. A diode includes first and second p-type regions and an n-type region all disposed in the epitaxial layer, the n-type region touching the first p-type region. A conductive plug electrically connects the first p-type region to the source region via the substrate.

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