公开(公告)号：US3843916A

公开(公告)日：1974-10-22

申请号：US26942172

申请日：1972-07-06

Applicant: THOMSON CSF

Inventor： TROTEL J ,  GUILLOT G ,  FAY B

IPC: H01J37/304 ,  H01J37/305 ,  H01J37/317 ,  H01L21/00 ,  G05B1/06

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/3045 ,  H01J37/3056 ,  H01J37/3175 ,  H01J2237/31779 ,  H01L21/00 ,  Y10S148/006 ,  Y10S148/016 ,  Y10S148/106 ,  Y10S438/943

Abstract: An electronic apparatus for the mass production of masks for integrated circuits, comprises a master mask arranged in an evacuated chamber. In response to diffuse ultra-violet radiation, it emits from its transparent areas electrons which are focussed by uniform electric and magnetic fields which are parallel to one another. The master mask is positioned in relation to the wafer being printed, by means of piezoelectric elements which receive supply voltage increments produced following the illumination of two pairs of markers respectively arranged on the master mask and the wafer.

Abstract translation: 一种用于大规模生产用于集成电路的掩模的电子设备，包括布置在抽真空室中的主掩模。 响应于漫射的紫外线辐射，它从其透明区域发射的电子被彼此平行的均匀电场和磁场聚焦。 主掩模通过压电元件相对于正在印刷的晶片定位，压电元件接收在分别布置在主掩模和晶片上的两对标记的照明之后产生的电源电压增量。

公开(公告)号：US3816719A

公开(公告)日：1974-06-11

申请号：US37146873

申请日：1973-06-19

Applicant: THOMSON CSF

Inventor： TROTEL J ,  SIGELLE R

IPC: H05K3/00 ,  B43L13/00 ,  G06F3/153 ,  G09G1/08 ,  G09G1/10 ,  H01L21/027 ,  H01L21/82 ,  G06F3/14

CPC classification number: G09G1/10

Abstract: A system is capable on the basis of data produced by a data processing machine of generating signals which can be applied to the horizontal and vertical deflection systems of an electronic device capable of producing predetermined traces. Each trace is broken down into elementary figures of three predetermined shapes, rectangle or parallelograms. The beam scans line-by-line, alternately from left to right and right to left, point by point, through each elementary figure, under the control of circuits supplied with the coordinates of a point in each figure, a number corresponding to the number of points to be scanned, the number of lines in each figure and a shape code.

Abstract translation: 系统能够基于由数据处理机产生的数据产生信号，该信号可以应用于能够产生预定迹线的电子设备的水平和垂直偏转系统。 每个迹线分解成三个预定形状，矩形或平行四边形的基本图形。 光束在每个图中的点的坐标控制下，逐行扫描，从左到右，从左到右逐点扫描，通过每个基本图，对应于数字的数字 要扫描的点数，每个图形中的行数和形状代码。