摘要:
A chemically amplified positive-type photosensitive resin composition capable of suppressing the phenomenon of footing in which the width of the bottom (the side proximal to the surface of a support) becomes narrower than that of the top (the side proximal to the surface of a resist layer) when a resist pattern serving as a template for a plated article is formed on a metal surface of a substrate using the composition. A mercapto compound is contained in the composition which includes an acid generator capable of producing an acid when irradiated with an active ray or radiation and a resin whose solubility in alkali increases under the action of acid.
摘要:
A chemically amplified positive-type photosensitive resin composition capable of suppressing the phenomenon of footing in which the width of the bottom (the side proximal to the surface of a support) becomes narrower than that of the top (the side proximal to the surface of a resist layer) when a resist pattern serving as a template for a plated article is formed on a metal surface of a substrate using the composition. A mercapto compound is contained in the composition which includes an acid generator capable of producing an acid when irradiated with an active ray or radiation and a resin whose solubility in alkali increases under the action of acid.
摘要:
A polymer having a high refractive index and providing a molded product that has excellent solvent resistance; a triazine compound; a method for producing the triazine compound; a method for producing the polymer using the triazine compound; a non-photosensitive liquid composition including the polymer; a method for producing a molded product using the composition; a molded product of the composition; a film formed from the molded product; a microlens formed from the molded product; and an optical element including the microlens. A polymer including a unit having a specific structure in which an aromatic group having a hydroxy group protected with a tert-butoxycarbonyloxy group, a tert-butoxycarbonylamino group, or an acetal protecting group is linked to a triazine ring through a specific linking group.
摘要:
What is provided is a positive-type photoresist composition containing an acid generator (A) capable of generating an acid when irradiated with an active ray or radiation, a resin (B) whose solubility in alkali increases under the action of acid, and an organic solvent (S), the photoresist composition further containing an alkali-metal salt (C).
摘要:
What is provided is a positive-type photoresist composition containing an acid generator (A) capable of generating an acid when irradiated with an active ray or radiation, a resin (B) whose solubility in alkali increases under the action of acid, and an organic solvent (S), the photoresist composition further containing an alkali-metal salt (C).