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公开(公告)号：US20120107514A1
公开(公告)日：2012-05-03
申请号：US12980531
申请日：2010-12-29
申请人： Tae-Kyun JEONG , Kyong-Deuk Jeong , Jong-Ik Park , Myung-Shik Kim , Hyoung-Won Kim , Dong-Ki Shin , Jeong-Hak Choi
发明人： Tae-Kyun JEONG , Kyong-Deuk Jeong , Jong-Ik Park , Myung-Shik Kim , Hyoung-Won Kim , Dong-Ki Shin , Jeong-Hak Choi
CPC分类号： B05B15/52 , B05B3/12 , B05B15/5223 , B05B15/55 , B05B15/70 , B05C3/09 , B05C3/10 , B05C11/11 , B05C13/00 , B05D1/005 , B05D1/02 , B05D1/26 , B41J2/16547 , C03C17/002 , G03F7/16 , G11B7/266 , H01L21/67051 , Y10S134/902 , Y10S135/902
摘要： A coating apparatus includes: a nozzle having a nozzle front end configured to spray a coating solution and a head configured to store the coating solution; a movement axis configured to cause the nozzle to move back and forth in a straight line; a rotating connection member configured to connect the movement axis with the nozzle and allow the nozzle to rotate; a stage disposed under the movement axis; and a cleaning means disposed at an end of the movement axis, and having a nozzle front end insertion unit in a concave shape of the nozzle front end and a base fixing the insertion unit, wherein the nozzle is fixed in a normal direction of a surface of the stage by the movement axis, moves back and forth in an extension direction of the movement axis, and rotates with respect to the movement axis.
摘要翻译： 一种涂布装置，其特征在于，包括喷嘴，喷嘴前端构成为喷涂涂布液，喷头构造成存储涂布液; 运动轴构造成使喷嘴以直线前后移动; 旋转连接构件，其构造成将运动轴线与喷嘴连接并允许喷嘴旋转; 设置在移动轴线下方的台阶; 以及设置在所述移动轴线的端部的清洁装置，并且具有喷嘴前端的凹形形状的喷嘴前端插入单元和固定所述插入单元的底座，其中所述喷嘴沿表面的法线方向固定 通过运动轴线在舞台的移动轴线的延伸方向上前后移动，并且相对于运动轴线旋转。
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2.发明授权Coating apparatus including nozzle cleaning mechanism and method of forming coating layer using the same 有权包括喷嘴清洁机构和使用其的涂层形成方法的涂布装置公开(公告)号：US09561521B2
公开(公告)日：2017-02-07
申请号：US12980531
申请日：2010-12-29
申请人： Tae-Kyun Jeong , Kyong-Deuk Jeong , Jong-Ik Park , Myung-Shik Kim , Hyoung-Won Kim , Dong-Ki Shin , Jeong-Hak Choi
发明人： Tae-Kyun Jeong , Kyong-Deuk Jeong , Jong-Ik Park , Myung-Shik Kim , Hyoung-Won Kim , Dong-Ki Shin , Jeong-Hak Choi
IPC分类号： B05C3/10 , B05B15/02 , B05B15/10 , B05D1/26 , C03C17/00 , G03F7/16 , B05C3/09 , B05C11/11 , H01L21/67 , B41J2/165 , B05D1/00 , G11B7/26 , B05D1/02
CPC分类号： B05B15/52 , B05B3/12 , B05B15/5223 , B05B15/55 , B05B15/70 , B05C3/09 , B05C3/10 , B05C11/11 , B05C13/00 , B05D1/005 , B05D1/02 , B05D1/26 , B41J2/16547 , C03C17/002 , G03F7/16 , G11B7/266 , H01L21/67051 , Y10S134/902 , Y10S135/902
摘要： A coating apparatus includes: a nozzle having a nozzle front end configured to spray a coating solution and a head configured to store the coating solution; a movement axis configured to cause the nozzle to move back and forth in a straight line; a rotating connection member configured to connect the movement axis with the nozzle and allow the nozzle to rotate; a stage disposed under the movement axis; and a cleaning means disposed at an end of the movement axis, and having a nozzle front end insertion unit in a concave shape of the nozzle front end and a base fixing the insertion unit, wherein the nozzle is fixed in a normal direction of a surface of the stage by the movement axis, moves back and forth in an extension direction of the movement axis, and rotates with respect to the movement axis.
摘要翻译： 一种涂布装置，其特征在于，包括喷嘴，喷嘴前端构成为喷涂涂布液，喷头构造成存储涂布液; 运动轴构造成使喷嘴以直线前后移动; 旋转连接构件，其构造成将运动轴线与喷嘴连接并允许喷嘴旋转; 设置在移动轴线下方的台阶; 以及设置在所述移动轴线的端部的清洁装置，并且具有喷嘴前端的凹形形状的喷嘴前端插入单元和固定所述插入单元的底座，其中所述喷嘴沿表面的法线方向固定 通过运动轴线在舞台的移动轴线的延伸方向上前后移动，并且相对于运动轴线旋转。
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