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公开(公告)号:US20170263414A1
公开(公告)日:2017-09-14
申请号:US15174323
申请日:2016-06-06
发明人: FU-RONG CHEN , Tsu-Wei HUANG , Shih-Yi LIU , I-Jiun CHEN , CHIH WEI CHEN , Ying-Shuo TSENG , Yu-Shan HUANG , Hsin-Yu LIN , Jian-Min FANG , Chin-Liang HSU , LI-CHIAO YANG
CPC分类号: H01J37/26 , H01J37/16 , H01J37/18 , H01J37/20 , H01J2237/162 , H01J2237/166 , H01J2237/188 , H01J2237/2001 , H01J2237/2003 , H01J2237/2004 , H01J2237/202
摘要: An electron microscope includes a charged particle beam generator, a detector, a film and a bearing unit. The charged particle beam generator generates a first charged particle beam to bomb an object. The detector detects a second charged particle from the object to form an image. The film disposes on downstream of charged particle beam generator and has a first surface and a second surface. A space between charged particle beam generator and the first surface of film is a vacuum environment. The bearing unit disposes at a side of second surface of film and has a bearing surface and a back surface. The object disposes on the bearing surface of the bearing unit and a distance between an analyzed surface of the object and the film is less than a predetermined spacing. A liquid space exists between the analyzed surface and the film to be filled a liquid.