公开(公告)号：US10746635B2

公开(公告)日：2020-08-18

申请号：US14475164

申请日：2014-09-02

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Tzu-Sou Chuang ,  Chi-Wen Kuo

IPC: G01N1/28 ,  G01Q60/24 ,  G01N27/02 ,  G01N27/72 ,  G01Q60/38 ,  G01Q60/46 ,  G01Q60/50 ,  G01Q60/26 ,  G01Q60/30 ,  G01N21/65 ,  G01B5/00 ,  G01N21/84

Abstract: A method for inspecting a process solution is provided. In this method, a process solution is disposed on a surface of a substrate. A liquid of the process solution is removed to form an inspection sample by a spinning method. The surface of the substrate of the inspection sample is inspected by the surface inspection device to identify whether a residue of the process solution is left on the surface of the substrate after removing the liquid of the process solution. Further, an apparatus for inspecting a process solution and a sample preparation apparatus in inspection are also provided herein.

公开(公告)号：US09352263B2

公开(公告)日：2016-05-31

申请号：US14141693

申请日：2013-12-27

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tzu-Sou Chuang ,  Chieh-Jan Huang ,  Chi-Wen Kuo

IPC: B01D47/05 ,  B01D47/02 ,  F24F3/16

CPC classification number: B01D47/021 ,  B01D47/05 ,  B01D2252/103 ,  F24F3/161

Abstract: Embodiments of mechanisms of an air treatment system are provided. The air treatment system includes a heating tank having a heating chamber containing air. The air includes gas, water vapor, a number of contaminants floating thereon. The air treatment system further includes a cooling tank having a first cooling chamber receiving the air from the heating chamber. Some of the water vapor in the first cooling tank condenses to a number of droplets, and some of the contaminants are mixed with into the droplets.

Abstract translation: 提供了空气处理系统的机构的实施例。 空气处理系统包括具有包含空气的加热室的加热罐。 空气包括气体，水蒸气，漂浮在其上的许多污染物。 空气处理系统还包括具有从加热室接收空气的第一冷却室的冷却箱。 第一冷却罐中的一些水蒸汽冷凝成许多液滴，并且一些污染物与液滴混合。