公开(公告)号：US20200075371A1

公开(公告)日：2020-03-05

申请号：US16518352

申请日：2019-07-22

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Sheng KUO ,  Guan-Wei Huang ,  Chih-Hung Huang ,  Yang-Ann Chu ,  Hsu-Shui Liu ,  Jiun-Rong Pai

IPC: H01L21/67 ,  H01L21/02 ,  H01L21/66

Abstract: In certain embodiments, a workstation includes: a cleaning station configured to clean a die vessel, wherein the die vessel is configured to secure a semiconductor die; an inspection station configured to inspect the die vessel after cleaning to determine whether the die vessel is identified as passing inspection; and a conveyor configured to move the die vessel between the cleaning station and the inspection station.

公开(公告)号：US20230095609A1

公开(公告)日：2023-03-30

申请号：US18074410

申请日：2022-12-02

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Sheng Kuo ,  Yang-Ann Chu ,  Chih-Hung Huang ,  Guan-Wei Huang ,  Jiun-Rong Pai ,  Hsuan Lee

IPC: H01L21/677 ,  B65G1/137 ,  B65G47/90 ,  B65G47/46

Abstract: A system, includes, a semiconductor processing unit, an Automated Materials Handling System (AMHS) vehicle, and a warehouse apparatus, wherein the warehouse apparatus comprises at least one input port, at least one output port, and at least one load/unload port, wherein the warehouse apparatus is configured to perform one of the following: receiving a plurality of tray cassette containers from the AMHS vehicle at the at least one input port, transporting at least one tray cassette in each of a plurality of tray cassette containers to the at least one load/unload port via the at least one input port, transporting at least one first tray from the at least one tray cassette to the semiconductor processing unit via a tray feeder conveyor, and receiving at least one second tray from the semiconductor processing unit via the tray feeder conveyor.

公开(公告)号：US11721572B2

公开(公告)日：2023-08-08

申请号：US17874174

申请日：2022-07-26

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Sheng Kuo ,  Guan-Wei Huang ,  Chih-Hung Huang ,  Yang-Ann Chu ,  Hsu-Shui Liu ,  Jiun-Rong Pai

IPC: H01L21/67 ,  H01L21/66 ,  H01L21/02

CPC classification number: H01L21/67288 ,  H01L21/02057 ,  H01L21/67051 ,  H01L22/12

Abstract: In certain embodiments, a workstation includes: a cleaning station configured to clean a die vessel, wherein the die vessel is configured to secure a semiconductor die; an inspection station configured to inspect the die vessel after cleaning to determine whether the die vessel is identified as passing inspection; and a conveyor configured to move the die vessel between the cleaning station and the inspection station.

公开(公告)号：US11527425B2

公开(公告)日：2022-12-13

申请号：US16731679

申请日：2019-12-31

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Sheng Kuo ,  Yang-Ann Chu ,  Chih-Hung Huang ,  Guan-Wei Huang ,  Jiun-Rong Pai ,  Hsuan Lee

IPC: H01L21/677 ,  B65G1/137 ,  B65G47/90 ,  B65G47/46 ,  H01L21/673 ,  H01L21/67

Abstract: A system, includes, a semiconductor processing unit, an Automated Materials Handling System (AMHS) vehicle, and a warehouse apparatus, wherein the warehouse apparatus comprises at least one input port, at least one output port, and at least one load/unload port, wherein the warehouse apparatus is configured to perform one of the following: receiving a plurality of tray cassette containers from the AMHS vehicle at the at least one input port, transporting at least one tray cassette in each of a plurality of tray cassette containers to the at least one load/unload port via the at least one input port, transporting at least one first tray from the at least one tray cassette to the semiconductor processing unit via a tray feeder conveyor, and receiving at least one second tray from the semiconductor processing unit via the tray feeder conveyor.

公开(公告)号：US11488848B2

公开(公告)日：2022-11-01

申请号：US16518352

申请日：2019-07-22

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Sheng Kuo ,  Guan-Wei Huang ,  Chih-Hung Huang ,  Yang-Ann Chu ,  Hsu-Shui Liu ,  Jiun-Rong Pai

IPC: H01L21/67 ,  H01L21/66 ,  H01L21/02

Abstract: In certain embodiments, a workstation includes: a cleaning station configured to clean a die vessel, wherein the die vessel is configured to secure a semiconductor die; an inspection station configured to inspect the die vessel after cleaning to determine whether the die vessel is identified as passing inspection; and a conveyor configured to move the die vessel between the cleaning station and the inspection station.

公开(公告)号：US12125725B2

公开(公告)日：2024-10-22

申请号：US18222328

申请日：2023-07-14

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Sheng Kuo ,  Guan-Wei Huang ,  Chih-Hung Huang ,  Yang-Ann Chu ,  Hsu-Shui Liu ,  Jiun-Rong Pai

IPC: H01L21/67 ,  H01L21/02 ,  H01L21/66

CPC classification number: H01L21/67288 ,  H01L21/02057 ,  H01L21/67051 ,  H01L22/12

Abstract: In certain embodiments, a workstation includes: a cleaning station configured to clean a die vessel, wherein the die vessel is configured to secure a semiconductor die; an inspection station configured to inspect the die vessel after cleaning to determine whether the die vessel is identified as passing inspection; and a conveyor configured to move the die vessel between the cleaning station and the inspection station.