公开(公告)号：US12188686B2

公开(公告)日：2025-01-07

申请号：US17733657

申请日：2022-04-29

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chia-Wei Wu ,  Hao Yang ,  Hsiao-Chieh Chou ,  Chun-Hung Chao ,  Jao Sheng Huang ,  Neng-Jye Yang ,  Kuo-Bin Huang

IPC: F24F9/00 ,  H01L21/67 ,  H01L21/687

Abstract: The present disclosure is at least directed to utilizing air curtain devices to form air curtains to separate and isolate areas in which respective workpieces are stored from a transfer compartment within a workpiece processing apparatus. The transfer compartment of the workpiece processing apparatus includes a robot configured to transfer or transport ones of the workpieces to and from these respective storage areas through the transfer compartment and to and from a tool compartment. A tool is present in the tool compartment for processing and refining the respective workpieces. Clean dry air (CDA) may be circulated through the respective storage areas. The air curtains formed by the air curtain devices and the circulation of CDA through the respective storage areas reduces the likelihood of the generation of defects, damages, and degradation of the workpieces when present within the workpiece processing apparatus.