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公开(公告)号：US20240389215A1
公开(公告)日：2024-11-21
申请号：US18787736
申请日：2024-07-29
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Tai-Yu Chen , Cho-Ying Lin , Sagar Deepak Khivsara , Hsiang Chen , Chieh Hsieh , Sheng-Kang Yu , Shang-Chieh Chien , Kai Tak Lam , Li-Jui Chen , Heng-Hsin Liu , Zhiqiang Wu
Abstract: A light source is provided capable of maintaining the temperature of a collector surface at or below a predetermined temperature. The light source in accordance with various embodiments of the present disclosure includes a processor, a droplet generator for generating a droplet to create extreme ultraviolet light, a collector for reflecting the extreme ultraviolet light into an intermediate focus point, a light generator for generating pre-pulse light and main pulse light, and a thermal image capture device for capturing a thermal image from a reflective surface of the collector.
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公开(公告)号：US11243479B2
公开(公告)日：2022-02-08
申请号：US16683432
申请日：2019-11-14
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor： Hsiang Chen , Sheng-Kang Yu , Shang-Chieh Chien , Li-Jui Chen
Abstract: A method of controlling a temperature of the semiconductor device includes operating an semiconductor apparatus; maintaining a temperature of a vessel of the semiconductor apparatus with a first cooling output by a cooling controller; heating the vessel for removing a material on the vessel; transferring a first signal, by a converter, to the cooling controller when heating the vessel; and reducing the first cooling output to a second cooling output by the cooling controller base on the first signal.
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公开(公告)号：US12096544B2
公开(公告)日：2024-09-17
申请号：US18298927
申请日：2023-04-11
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Tai-Yu Chen , Cho-Ying Lin , Sagar Deepak Khivsara , Hsiang Chen , Chieh Hsieh , Sheng-Kang Yu , Shang-Chieh Chien , Kai Tak Lam , Li-Jui Chen , Heng-Hsin Liu , Zhiqiang Wu
CPC classification number: H05G2/008 , G03F7/70033 , G03F7/7055 , G03F7/7085 , H05G2/006
Abstract: A light source is provided capable of maintaining the temperature of a collector surface at or below a predetermined temperature. The light source in accordance with various embodiments of the present disclosure includes a processor, a droplet generator for generating a droplet to create extreme ultraviolet light, a collector for reflecting the extreme ultraviolet light into an intermediate focus point, a light generator for generating pre-pulse light and main pulse light, and a thermal image capture device for capturing a thermal image from a reflective surface of the collector.
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公开(公告)号：US11647578B2
公开(公告)日：2023-05-09
申请号：US17462563
申请日：2021-08-31
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Tai-Yu Chen , Cho-Ying Lin , Sagar Deepak Khivsara , Hsiang Chen , Chieh Hsieh , Sheng-Kang Yu , Shang-Chieh Chien , Kai Tak Lam , Li-Jui Chen , Heng-Hsin Liu , Zhiqiang Wu
CPC classification number: H05G2/008 , G03F7/70033 , G03F7/7055 , G03F7/7085 , H05G2/006
Abstract: A light source is provided capable of maintaining the temperature of a collector surface at or below a predetermined temperature. The light source in accordance with various embodiments of the present disclosure includes a processor, a droplet generator for generating a droplet to create extreme ultraviolet light, a collector for reflecting the extreme ultraviolet light into an intermediate focus point, a light generator for generating pre-pulse light and main pulse light, and a thermal image capture device for capturing a thermal image from a reflective surface of the collector.
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