公开(公告)号：US11651981B2

公开(公告)日：2023-05-16

申请号：US16996211

申请日：2020-08-18

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Jiao-Rou Liao ,  Sheng-Hsiang Chuang ,  Cheng-Kang Hu ,  Hsu-Shui Liu ,  Jiun-Rong Pai ,  Shou-Wen Kuo

IPC: H01L21/67 ,  H04N5/232 ,  G01B11/14 ,  G06T7/00 ,  H04N5/225 ,  H04N7/18

CPC classification number: H01L21/67288 ,  G01B11/14 ,  G06T7/001 ,  H04N5/2256 ,  H04N5/23299 ,  H04N7/183 ,  G06T2207/30148

Abstract: A system and method for defect detection in a hole array on a substrate is disclosed herein. In one embodiment, a method for defect detection in a hole array on a substrate, includes: scanning a substrate surface using at least one optical detector, generating at least one image of the substrate surface; and analyzing the at least one image to detect defects in the hole array on the substrate surface based on a set of predetermined criteria.

公开(公告)号：US11120539B2

公开(公告)日：2021-09-14

申请号：US16204387

申请日：2018-11-29

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Sheng-Hsiang Chuang ,  Jiao-Rou Liao ,  Cheng-Kang Hu ,  Shou-Wen Kuo ,  Jiun-Rong Pai ,  Hsu-Shui Liu

IPC: G06T7/00 ,  G06T7/62 ,  G01B11/30 ,  G06T5/00 ,  G01B21/04

Abstract: A method for scanning and analyzing a surface, the method comprising: receiving a piece of equipment with a target surface for inspection; receiving an input from a user; determining at least one scan parameter based on the user input; scanning the target surface using an optical detector in accordance with the at least one scan parameter; generating an image of the target surface; correcting the image of the target surface to remove at least one undesired feature to generate a corrected image based on the at least one scan parameter; and analyzing the corrected image to determine at least one geometric parameter of the target surface.