公开(公告)号：US20190061094A1

公开(公告)日：2019-02-28

申请号：US15882511

申请日：2018-01-29

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Kanyu Han ,  Juster Huang ,  Fang-Chi Chien ,  Stone Chen ,  Sheng-Tai Peng

IPC: B24B37/04 ,  B24B37/24 ,  B24B57/02 ,  H01L21/321

CPC classification number: B24B37/042 ,  B24B37/013 ,  B24B37/105 ,  B24B37/12 ,  B24B37/205 ,  B24B37/245 ,  B24B57/02 ,  H01L21/3212 ,  H01L21/7684

Abstract: A stopper includes a head portion sized and configured to be coupled to an upper platen of a chemical-mechanical planarization system and a stopper leg sized and configured to direct a flow of liquid slurry applied to an upper planar surface of the upper platen substantially away from a lower surface of the upper platen.