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公开(公告)号：US20230400627A1
公开(公告)日：2023-12-14
申请号：US17836879
申请日：2022-06-09
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Weiwei SONG , Stefan RUSU
CPC classification number: G02B6/13 , G02B6/122 , G02B2006/12061
Abstract: Photonic device, system and methods of making photonic devices and systems, the method including: providing a substrate, forming an insulator layer over the substrate, depositing a plurality of waveguide layers and a plurality of insulator spacers at different vertical levels over the insulator layer, wherein adjacent waveguide layers in the plurality of waveguide layers are isolated by one or more insulator spacers in the plurality of insulator spacers, and forming a plurality of waveguide patterns at the plurality of waveguide layers, wherein at least two waveguide patterns at different vertical levels in the plurality of waveguide patterns are coupled.
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公开(公告)号：US20230114059A1
公开(公告)日：2023-04-13
申请号：US18080684
申请日：2022-12-13
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Weiwei SONG , Stefan RUSU , Mohammed Rabiul ISLAM
Abstract: Structures and methods for high speed interconnection in photonic systems are described herein. In one embodiment, a photonic device is disclosed. The photonic device includes: a substrate; a plurality of metal layers on the substrate; a photonic material layer comprising graphene over the plurality of metal layers; and an optical routing layer comprising a waveguide on the photonic material layer.
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Patent Agency Ranking
公开(公告)号：US20220066099A1
公开(公告)日：2022-03-03
申请号：US17007743
申请日：2020-08-31
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Weiwei SONG , Stefan RUSU , Mohammed Rabiul ISLAM
Abstract: Structures and methods for high speed interconnection in photonic systems are described herein. In one embodiment, a photonic device is disclosed. The photonic device includes: a substrate; a plurality of metal layers on the substrate; a photonic material layer comprising graphene over the plurality of metal layers; and an optical routing layer comprising a waveguide on the photonic material layer.
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公开(公告)号：US20210302650A1
公开(公告)日：2021-09-30
申请号：US17150628
申请日：2021-01-15
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Weiwei SONG , Chan-Hong Chern , Chih-Chang Lin , Stefan Rusu , Min-Hsiang Hsu
Abstract: Methods of fabricating optical devices with high refractive index materials are disclosed. The method includes forming a first oxide layer on a substrate and forming a patterned template layer with first and second trenches on the first oxide layer. A material of the patterned template layer has a first refractive index. The method further includes forming a first portion of a waveguide and a first portion of an optical coupler within the first and second trenches, respectively, forming a second portion of the waveguide and a second portion of the optical coupler on a top surface of the patterned template layer, and depositing a cladding layer on the second portions of the waveguide and optical coupler. The waveguide and the optical coupler include materials with a second refractive index that is greater than the first refractive index.
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公开(公告)号：US20240219626A1
公开(公告)日：2024-07-04
申请号：US18434636
申请日：2024-02-06
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Weiwei SONG , Stefan RUSU
CPC classification number: G02B6/12002 , G02B6/122 , G02B6/13 , G02B2006/12061 , G06N3/067
Abstract: Photonic device, system and methods of making photonic devices and systems, the method including: providing a substrate, forming an insulator layer over the substrate, depositing a plurality of waveguide layers and a plurality of insulator spacers at different vertical levels over the insulator layer, wherein adjacent waveguide layers in the plurality of waveguide layers are isolated by one or more insulator spacers in the plurality of insulator spacers, and forming a plurality of waveguide patterns at the plurality of waveguide layers, wherein at least two waveguide patterns at different vertical levels in the plurality of waveguide patterns are coupled.
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公开(公告)号：US20230393337A1
公开(公告)日：2023-12-07
申请号：US18232338
申请日：2023-08-09
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Weiwei SONG , Stefan RUSU , Mohammed Rabiul ISLAM
CPC classification number: G02B6/132 , G02B6/136 , H04B10/25 , G02B2006/12164
Abstract: Structures and methods for high speed interconnection in photonic systems are described herein. In one embodiment, a photonic device is disclosed. The photonic device includes: a substrate; a plurality of metal layers on the substrate; a photonic material layer comprising graphene over the plurality of metal layers; and an optical routing layer comprising a waveguide on the photonic material layer.
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公开(公告)号：US20220155524A1
公开(公告)日：2022-05-19
申请号：US17097270
申请日：2020-11-13
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Weiwei SONG , Chan-Hong CHERN , Chewn-Pu JOU , Stefan RUSU , Min-Hsiang HSU
Abstract: An optical system with different optical coupling device configurations and a method of fabricating the same are disclosed. An optical system includes a substrate, a waveguide disposed on the substrate, an optical fiber optically coupled to the waveguide, and an optical coupling device disposed between the optical fiber and the waveguide. The optical coupling device configured to optically couple the optical fiber to the waveguide. The optical coupling device includes a dielectric layer disposed on the substrate, a semiconductor tapered structure disposed in a first horizontal plane within the dielectric layer, and a multi-tip dielectric structure disposed in a second horizontal plane within the dielectric layer. The first and second horizontal planes are different from each other
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