公开(公告)号：US11920238B2

公开(公告)日：2024-03-05

申请号：US17871810

申请日：2022-07-22

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Peng-Cheng Hong ,  Jun-Liang Pu ,  W. L. Hsu ,  Chung-Hao Kao ,  Chia-Chun Hung ,  Cheng-Yi Wu ,  Chin-Szu Lee

IPC: B29D99/00 ,  C23C14/02 ,  C23C14/20 ,  C23C14/34 ,  C23C16/44 ,  C23C18/18 ,  C25D7/04 ,  H01J37/32 ,  B29K19/00 ,  C23C18/20 ,  C23C18/24 ,  C23C18/28 ,  C23C18/30 ,  C25D5/56

CPC classification number: C23C16/4409 ,  B29D99/0053 ,  C23C14/021 ,  C23C14/205 ,  C23C14/34 ,  C23C18/1875 ,  C25D7/04 ,  H01J37/32513 ,  B29K2019/00 ,  C23C18/2086 ,  C23C18/24 ,  C23C18/285 ,  C23C18/30 ,  C25D5/56

Abstract: A method of making a sealing article that includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.

公开(公告)号：US11851754B2

公开(公告)日：2023-12-26

申请号：US15801497

申请日：2017-11-02

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Peng-Cheng Hong ,  Jun-Liang Pu ,  W. L. Hsu ,  Chung-Hao Kao ,  Chia-Chun Hung ,  Cheng-Yi Wu ,  Chin-Szu Lee

IPC: C23C16/44 ,  C23C14/02 ,  C23C18/18 ,  B29D99/00 ,  C23C14/34 ,  C25D7/04 ,  H01J37/32 ,  C23C14/20 ,  B29K19/00 ,  C25D5/56 ,  C23C18/28 ,  C23C18/24 ,  C23C8/30 ,  C23C18/20 ,  C23C18/30

CPC classification number: C23C16/4409 ,  B29D99/0053 ,  C23C14/021 ,  C23C14/205 ,  C23C14/34 ,  C23C18/1875 ,  C25D7/04 ,  H01J37/32513 ,  B29K2019/00 ,  C23C18/2086 ,  C23C18/24 ,  C23C18/285 ,  C23C18/30 ,  C25D5/56

Abstract: A sealing article includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.

公开(公告)号：US12227839B2

公开(公告)日：2025-02-18

申请号：US18513448

申请日：2023-11-17

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Peng-Cheng Hong ,  Jun-Liang Pu ,  W. L. Hsu ,  Chung-Hao Kao ,  Chia-Chun Hung ,  Cheng-Yi Wu ,  Chin-Szu Lee

IPC: C23C16/44 ,  B29D99/00 ,  B29K19/00 ,  C23C14/02 ,  C23C14/20 ,  C23C14/34 ,  C23C18/18 ,  C23C18/20 ,  C23C18/24 ,  C23C18/28 ,  C23C18/30 ,  C25D5/56 ,  C25D7/04 ,  H01J37/32

Abstract: A sealing article includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.