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    THERMAL ACOUSTIC INSULATION BLANKETS
    1.
    发明申请
    THERMAL ACOUSTIC INSULATION BLANKETS 有权
    热声绝缘棉

    公开(公告)号：US20170001709A1

    公开(公告)日：2017-01-05

    申请号：US15106904

    申请日：2014-12-23

    Applicant: SOLVAY SPECIALTY POLYMERS ITALY S.P.A.

    Inventor： Paula COJOCARU ,  Stefano MORTARA ,  Francesco Maria TRIULZI ,  Marco APOSTOLO

    IPC: B64C1/40 ,  B32B5/02 ,  B32B27/06 ,  B32B27/12 ,  C08J5/18 ,  B32B27/28 ,  B32B27/30 ,  C23C18/18 ,  C23C18/42 ,  B32B5/18 ,  B32B27/16

    CPC classification number: B64C1/40 ,  B32B5/02 ,  B32B5/024 ,  B32B5/18 ,  B32B27/065 ,  B32B27/12 ,  B32B27/16 ,  B32B27/288 ,  B32B27/304 ,  B32B2255/10 ,  B32B2255/205 ,  B32B2262/02 ,  B32B2262/10 ,  B32B2307/10 ,  B32B2307/102 ,  B32B2307/304 ,  B32B2307/306 ,  B32B2307/3065 ,  B32B2371/00 ,  B32B2375/00 ,  B32B2605/18 ,  C08J5/18 ,  C08J2371/10 ,  C23C18/1875 ,  C23C18/42

    Abstract: The present invention pertains to an insulation system comprising one or more insulation blankets, wherein each of said multilayer insulation blankets comprises: —a core consisting of an insulation material [material (I)], and —a shell encapsulating said core, said shell comprising at least one multilayer assembly comprising: (1) an outer layer [layer (L1)] consisting of a composition [composition (C1)] comprising, preferably consisting of at least one thermoplastic polymer [polymer (1)] having a limiting oxygen index (LOI) of at least 20% by volume, wherein at least one surface, preferably the inner surface, of said layer (L1) comprises one or more grafted functional groups [surface (L1-f)], (2) directly adhered to said at least one surface (L1-f), a layer consisting of at least one metal compound (M1) [layer (L2)], and (3) optionally, directly adhered to the opposite side of the layer (L2), a layer consisting of at least one metal compound (M2) [layer (L3)], said metal compound (M2) being equal to or different from said metal compound (M1). The present invention also pertains to a process for the manufacture of said insulation system and to uses of said insulation system in various applications including aircraft applications.

    Abstract translation: 本发明涉及一种包括一个或多个绝缘毯的绝缘系统，其中每个所述多层绝缘毯包括： - 由绝缘材料[材料（I）]组成的芯和 - 包封所述芯的壳，所述外壳包括 至少一个多层组件，包括：（1）由组合物[组合物（C1）]组成的外层[层（L1）]，其包含优选由至少一种具有极限氧指数的热塑性聚合物[聚合物（1） （LOI）为至少20体积％，其中所述层（L1）的至少一个表面，优选内表面包含一个或多个接枝官能团[表面（L1-f）]，（2）直接粘附到 所述至少一个表面（L1-f），由至少一种金属化合物（M1）[层（L2）]组成的层和（3）任选地直接粘附到层（L2）的相对侧， 由至少一种金属化合物（M2）[层（L3）]，所述金属化合物（ M2）等于或不同于所述金属化合物（M1）。 本发明还涉及用于制造所述绝缘系统的方法以及所述绝缘系统在包括飞机应用的各种应用中的使用。

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    7.
    发明公开
    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD 审中-公开

    公开(公告)号：US20240066561A1

    公开(公告)日：2024-02-29

    申请号：US18261578

    申请日：2022-01-05

    Applicant: Tokyo Electron Limited

    Inventor： Yuichiro Inatomi

    IPC: B08B3/02 ,  C23C18/18 ,  H01L21/67

    CPC classification number: B08B3/022 ,  C23C18/1875 ,  H01L21/67028

    Abstract: A substrate processing apparatus includes a substrate holder, a rotational driving unit, a cover body, a transfer mechanism, a cleaning liquid supply and a controller. The substrate holder is configured to hold a substrate. The rotational driving unit is configured to rotate the substrate holder. The cover body is configured to cover a top surface of the substrate held by the substrate holder. The transfer mechanism is configured to transfer a cleaning jig to the substrate holder. The cleaning liquid supply is configured to supply a cleaning liquid toward a bottom surface of the cleaning jig held by the substrate holder. The controller is configured to control the rotational driving unit to rotate the substrate holder. The cleaning jig is provided with at least one hole through which the cleaning liquid discharged from the cleaning liquid supply passes toward the cover body.

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