公开(公告)号：US08325284B2

公开(公告)日：2012-12-04

申请号：US12871370

申请日：2010-08-30

申请人： Takahiro Miyazaki ,  Jun Ooida

发明人： Takahiro Miyazaki ,  Jun Ooida

IPC分类号： G02F1/136

CPC分类号： H01L27/124 ,  G09G3/3648 ,  G09G2300/0426 ,  G09G2320/0204 ,  G09G2320/0219 ,  G09G2320/0223 ,  G09G2320/0233 ,  G09G2320/0257 ,  H01L27/1296

摘要： The manufacturing method of a liquid crystal display device includes a step of forming the scanning signal lines including a step in which a photosensitive material film is exposed using an exposure device having a spatial light modulating element which generates an exposure pattern by a numerical control based on drawing data prepared based on the layout data. The drawing data is prepared by correction such that a shape of a portion of the scanning signal line in the layout data which is overlapped to a source electrode has an area corresponding to the distribution of a film thickness of an insulation layer interposed between the scanning signal line and the source electrode.

摘要翻译： 液晶显示装置的制造方法包括以下步骤：形成扫描信号线，其包括使用具有空间光调制元件的曝光装置曝光感光材料膜的步骤，所述曝光装置通过基于 绘制基于布局数据准备的数据。 通过校正来制作绘图数据，使得与源电极重叠的布局数据中的扫描信号线的一部分的形状具有对应于介于扫描信号之间的绝缘层的膜厚分布的面积 线和源电极。

公开(公告)号：US07916231B2

公开(公告)日：2011-03-29

申请号：US12155612

申请日：2008-06-06

申请人： Jun Ooida ,  Takahiro Miyazaki ,  Ken Ohara ,  Hiroshi Saito ,  Yoshiaki Nakayoshi

发明人： Jun Ooida ,  Takahiro Miyazaki ,  Ken Ohara ,  Hiroshi Saito ,  Yoshiaki Nakayoshi

IPC分类号： G02F1/1368

CPC分类号： G02F1/1368 ,  G02F1/133345 ,  G02F1/133351 ,  G09G3/3648 ,  G09G2300/04 ,  G09G2320/0223

摘要： A display device comprising a plurality of scan signal lines; a plurality of picture signal lines three-dimensionally intersecting the plurality of scan signal lines; and numerous TFT elements arranged in a matrix; and having a display panel in which each of the TFT elements has a gate connected to one of the plurality of scan signal lines, and a drain or source connected to one of the plurality of picture signal lines; wherein the TFT elements respectively differ in terms of channel width, channel length, or both, depending on a distance from a signal input terminal of the scan signal line to which the gate is connected and a distance from a signal input terminal of the picture signal line to which one of the drain and the source is connected.

摘要翻译： 一种显示装置，包括多条扫描信号线; 与所述多个扫描信号线三维相交的多个图像信号线; 和许多布置在矩阵中的TFT元件; 并具有显示面板，其中每个TFT元件具有连接到所述多条扫描信号线之一的栅极，以及连接到所述多条图像信号线之一的漏极或源极; 其中TFT元件在通道宽度，通道长度或二者方面分别根据与栅极连接的扫描信号线的信号输入端的距离和与图像信号的信号输入端的距离而不同 一个漏极和源极连接到其上。

公开(公告)号：US07993179B2

公开(公告)日：2011-08-09

申请号：US12015534

申请日：2008-01-17

申请人： Seiji Ishikawa ,  Jun Ooida ,  Yoshinori Muramatsu ,  Takahiro Miyazaki

发明人： Seiji Ishikawa ,  Jun Ooida ,  Yoshinori Muramatsu ,  Takahiro Miyazaki

IPC分类号： H01J9/24

CPC分类号： G02F1/1333 ,  G02F2001/133354

摘要： An exposure method that suppresses distribution of pattern shapes at the time of exposure.In a manufacturing method for a display unit, a layer forming a reference for pattern arrangement is determined among layers formed on a panel. An arrangement of a pattern in a layer above the reference layer is determined using a value obtained from distribution of the pattern arrangement in the reference layer.

摘要翻译： 抑制曝光时图案形状分布的曝光方法。 在显示单元的制造方法中，在形成在面板上的层之间确定形成图案布置用基准的层。 使用从参考层中的图案布置的分布获得的值来确定参考层上方的图案中的图案的布置。

公开(公告)号：US07655510B2

公开(公告)日：2010-02-02

申请号：US11878397

申请日：2007-07-24

申请人： Yoshiaki Nakayoshi ,  Takahiro Miyazaki ,  Jun Ooida ,  Ken Ohara

发明人： Yoshiaki Nakayoshi ,  Takahiro Miyazaki ,  Jun Ooida ,  Ken Ohara

IPC分类号： H01L21/00 ,  H01L21/84

CPC分类号： H01L27/1288 ,  G03B27/42 ,  H01L27/1214

摘要： A display panel manufacturing method in which forming a thin film on a substrate and etching the thin film are repeated a plurality of times to form on the substrate a plurality of scanning signal lines, a plurality of video signal lines that three-dimensionally intersects the plurality of scanning signal lines with an insulating layer between them, and TFT elements and pixel electrodes each disposed in a pixel area enclosed with two adjacent scanning signal lines and two adjacent video signal lines. The method also includes: exposing a resist film using exposure dimensions numerically expressed based on design patterns prepared in advance; etching the thin film using etching resists formed by developing the exposed resist film so as to form thin-film patterns; and correcting the design patterns according to the complete dimensions of the formed thin-film patterns.

摘要翻译： 在基板上形成薄膜并蚀刻薄膜的显示面板制造方法重复多次，以在基板上形成多条扫描信号线，与多个扫描信号线三维相交的多条视频信号线 在它们之间具有绝缘层的扫描信号线，以及每个设置在由两个相邻扫描信号线和两个相邻视频信号线包围的像素区域中的TFT元件和像素电极。 该方法还包括：使用基于预先制备的设计图案数字表示的曝光尺寸曝光抗蚀剂膜; 使用通过显影曝光的抗蚀剂膜形成的蚀刻抗蚀剂来蚀刻薄膜以形成薄膜图案; 并根据所形成的薄膜图案的完整尺寸校正设计图案。

公开(公告)号：US20110050552A1

公开(公告)日：2011-03-03

申请号：US12871370

申请日：2010-08-30

申请人： Takahiro MIYAZAKI ,  Jun Ooida

发明人： Takahiro MIYAZAKI ,  Jun Ooida

IPC分类号： G09G3/36 ,  H01L29/786

CPC分类号： H01L27/124 ,  G09G3/3648 ,  G09G2300/0426 ,  G09G2320/0204 ,  G09G2320/0219 ,  G09G2320/0223 ,  G09G2320/0233 ,  G09G2320/0257 ,  H01L27/1296

摘要： The manufacturing method of a liquid crystal display device includes a step of forming the scanning signal lines including a step in which a photosensitive material film is exposed using an exposure device having a spatial light modulating element which generates an exposure pattern by a numerical control based on drawing data prepared based on the layout data. The drawing data is prepared by correction such that a shape of a portion of the scanning signal line in the layout data which is overlapped to a source electrode has an area corresponding to the distribution of a film thickness of an insulation layer interposed between the scanning signal line and the source electrode.

摘要翻译： 液晶显示装置的制造方法包括以下步骤：形成扫描信号线，其包括使用具有空间光调制元件的曝光装置曝光感光材料膜的步骤，所述曝光装置通过基于 绘制基于布局数据准备的数据。 通过校正来制作绘图数据，使得与源电极重叠的布局数据中的扫描信号线的一部分的形状具有对应于介于扫描信号之间的绝缘层的膜厚分布的面积 线和源电极。

公开(公告)号：US20080036987A1

公开(公告)日：2008-02-14

申请号：US11878397

申请日：2007-07-24

申请人： Yoshiaki Nakayoshi ,  Takahiro Miyazaki ,  Jun Ooida ,  Ken Ohara

发明人： Yoshiaki Nakayoshi ,  Takahiro Miyazaki ,  Jun Ooida ,  Ken Ohara

IPC分类号： H01L21/77 ,  G03B27/42

CPC分类号： H01L27/1288 ,  G03B27/42 ,  H01L27/1214

摘要： An object of the present invention is to readily minimize inhomogeneity in image quality in a display field on one liquid crystal display panel. A display panel manufacturing method in which a step of forming a thin film on a substrate and a step of etching the thin film are repeated a plurality of times in order to form on the substrate a plurality of scanning signal lines, a plurality of video signal lines that three-dimensionally intersects the plurality of scanning signal lines with an insulating layer between them, and TFT elements and pixel electrodes each disposed in a pixel area enclosed with two adjacent scanning signal lines and two adjacent video signal lines, includes: a step of exposing a resist film using exposure dimensions numerically expressed based on design patterns prepared in advance; a step of etching the thin film using etching resists formed by developing the exposed resist film so as to form thin-film patterns; and a step of correcting the design patterns according to the complete dimensions of the formed thin-film patterns.

摘要翻译： 本发明的目的是在一个液晶显示面板的显示领域中容易地使图像质量的不均匀性最小化。 一种显示面板的制造方法，其中在衬底上形成薄膜的步骤和蚀刻薄膜的步骤重复多次，以便在衬底上形成多条扫描信号线，多条视频信号 与多个扫描信号线在它们之间具有绝缘层三维相交的线，以及每个设置在由两个相邻扫描信号线和两个相邻视频信号线包围的像素区域中的TFT元件和像素电极，包括： 使用基于预先制备的设计图案数字表示的曝光尺寸曝光抗蚀剂膜; 使用通过显影曝光的抗蚀剂膜形成的蚀刻抗蚀剂来蚀刻薄膜以形成薄膜图案的步骤; 以及根据形成的薄膜图案的完整尺寸校正设计图案的步骤。

公开(公告)号：US20090033817A1

公开(公告)日：2009-02-05

申请号：US12155612

申请日：2008-06-06

申请人： Jun Ooida ,  Takahiro Miyazaki ,  Ken Ohara ,  Hiroshi Saito ,  Yoshiaki Nakayoshi

发明人： Jun Ooida ,  Takahiro Miyazaki ,  Ken Ohara ,  Hiroshi Saito ,  Yoshiaki Nakayoshi

IPC分类号： G02F1/136

CPC分类号： G02F1/1368 ,  G02F1/133345 ,  G02F1/133351 ,  G09G3/3648 ,  G09G2300/04 ,  G09G2320/0223

摘要： A display device comprising a plurality of scan signal lines; a plurality of picture signal lines three-dimensionally intersecting the plurality of scan signal lines; and numerous TFT elements arranged in a matrix; and having a display panel in which each of the TFT elements has a gate connected to one of the plurality of scan signal lines, and a drain or source connected to one of the plurality of picture signal lines; wherein the TFT elements respectively differ in terms of channel width, channel length, or both, depending on a distance from a signal input terminal of the scan signal line to which the gate is connected and a distance from a signal input terminal of the picture signal line to which one of the drain and the source is connected.

摘要翻译： 一种显示装置，包括多条扫描信号线; 与所述多个扫描信号线三维相交的多个图像信号线; 和许多布置在矩阵中的TFT元件; 并具有显示面板，其中每个TFT元件具有连接到所述多条扫描信号线之一的栅极，以及连接到所述多条图像信号线之一的漏极或源极; 其中TFT元件在通道宽度，通道长度或二者方面分别根据与栅极连接的扫描信号线的信号输入端的距离和与图像信号的信号输入端的距离而不同 一个漏极和源极连接到其上。

公开(公告)号：US20080176478A1

公开(公告)日：2008-07-24

申请号：US12015534

申请日：2008-01-17

申请人： Seiji ISHIKAWA ,  Jun Ooida ,  Yoshinori Muramatsu ,  Takahiro Miyazaki

发明人： Seiji ISHIKAWA ,  Jun Ooida ,  Yoshinori Muramatsu ,  Takahiro Miyazaki

IPC分类号： G02F1/1337

CPC分类号： G02F1/1333 ,  G02F2001/133354

摘要： An exposure method that suppresses distribution of pattern shapes at the time of exposure.In a manufacturing method for a display unit, a layer forming a reference for pattern arrangement is determined among layers formed on a panel. An arrangement of a pattern in a layer above the reference layer is determined using a value obtained from distribution of the pattern arrangement in the reference layer.

摘要翻译： 抑制曝光时图案形状分布的曝光方法。 在显示单元的制造方法中，在形成在面板上的层之间确定形成图案布置用基准的层。 使用从参考层中的图案布置的分布获得的值来确定参考层上方的图案中的图案的布置。

公开(公告)号：US07595506B2

公开(公告)日：2009-09-29

申请号：US11375108

申请日：2006-03-15

申请人： Ken Ohara ,  Jun Ooida ,  Hiroshi Saito ,  Yoshiaki Nakayoshi

发明人： Ken Ohara ,  Jun Ooida ,  Hiroshi Saito ,  Yoshiaki Nakayoshi

IPC分类号： H01L29/06

CPC分类号： H01L27/1296 ,  G02F1/136227

摘要： The present invention provides a technique which can make an image quality on a screen of a TFT liquid crystal display device uniform. A liquid crystal display device includes a TFT substrate on which TFT circuits are arranged in an array, a counter substrate which is arranged to face a surface of the TFT substrate on which the TFTs are formed, and a liquid crystal material which is filled between the TFT substrate and the counter substrate, wherein in the TFT substrate, assuming a film thickness and a width of a conductive film of the gate electrode lines in a first region thereof as GLD1 and GLW1 respectively, and a film thickness and a width of a conductive film of the gate electrode lines in a second region thereof which differs from the first region as GLD2 and GLW2 respectively, when the relationship GLD1 GLW2 is established.

摘要翻译： 本发明提供能够使TFT液晶显示装置的画面上的图像质量均匀的技术。 一种液晶显示装置，其特征在于，具备以TFT阵列为阵列的TFT基板，配置在与形成有TFT的TFT基板的表面相对的对置基板， TFT基板和对置基板，其中在TFT基板中，将栅极电极线的第一区域的导电膜的膜厚度和宽度分别设为GLD1和GLW1，并且膜厚度和导电宽度 当第一区域与GLD2和GLW2分别不同时，栅极电极线的第二区域的膜分别为GLD1 GLW2。

公开(公告)号：US20080212010A1

公开(公告)日：2008-09-04

申请号：US12071776

申请日：2008-02-26

申请人： Ken Ohara ,  Tsunenori Yamamoto ,  Yoshiaki Nakayoshi ,  Hiroshi Saito ,  Jun Ooida

发明人： Ken Ohara ,  Tsunenori Yamamoto ,  Yoshiaki Nakayoshi ,  Hiroshi Saito ,  Jun Ooida

IPC分类号： G02F1/1343 ,  G02F1/13

CPC分类号： G02F1/134336 ,  G02F1/136286 ,  G02F2001/13606 ,  G02F2001/136218 ,  G02F2001/136254

摘要： The present invention provides a liquid crystal display device which can easily prevent the generation of longitudinal smear. The display device includes a display panel having a plurality of scanning signal lines, a plurality of video signal lines, a plurality of thin film transistors and a plurality of pixel electrodes arranged in a matrix array. In a state that a gap between two neighboring video signal lines with one pixel electrode out of the plurality of pixel electrodes sandwiched therebetween in a region where one pixel electrode is arranged is larger than a gap between two neighboring video signal lines with another pixel electrode different from one pixel electrode sandwiched therebetween in a region where another electrode is arranged, a size of one pixel electrode is set larger than a size of another pixel electrode.

摘要翻译： 本发明提供一种能够容易地防止纵向涂片的产生的液晶显示装置。 显示装置包括具有多个扫描信号线，多个视频信号线，多个薄膜晶体管和以矩阵阵列排列的多个像素电极的显示面板。 在配置有一个像素电极的区域中夹在其间的多个像素电极之间的具有一个像素电极的两个相邻视频信号线之间的间隙大于具有另一个像素电极的两个相邻视频信号线之间的间隙 从设置有其他电极的区域夹着的一个像素电极，将一个像素电极的尺寸设定为大于另一像素电极的尺寸。