Chemical mechanical polishing pad
    1.
    发明授权
    Chemical mechanical polishing pad 有权
    化学机械抛光垫

    公开(公告)号:US08053521B2

    公开(公告)日:2011-11-08

    申请号:US12278103

    申请日:2007-01-30

    摘要: The present invention relates to polishing pads, including at least 60 to 99 parts by weight of a polymer matrix (A) having 1,2-polybutadiene; and 1 to 40 parts by weight of component (B) having a copolymer having a polyether block, where the total amount of the polishing pad is 100 parts by mass, polymer matrix (A) includes 1,2-polybutadiene in an amount of at least 60 parts by weight, relative to 100 parts by mass of the polishing pad, component (B) includes the copolymer having a polyether block in an amount of at most 40 parts by weight relative to 100 parts by mass of the polishing pad, and the polishing pads have a surface resistivity of 2.6×107 to 9.9×1013Ω.

    摘要翻译: 本发明涉及抛光垫,包括至少60至99重量份的具有1,2-聚丁二烯的聚合物基质(A); 和1〜40重量份的具有聚醚嵌段的共聚物的组分(B),其中抛光垫的总量为100质量份,聚合物基质(A)包括一定量的1,2-聚丁二烯 相对于抛光垫100质量份,成分(B)相对于100质量份至少为60重量份,成分(B)相对于抛光垫100质量份,含有聚醚嵌段的配合量为40质量份以下的共聚物, 抛光垫的表面电阻率为2.6×107〜9.9×1013&OHgr。

    CHEMICAL MECHANICAL POLISHING PAD
    2.
    发明申请
    CHEMICAL MECHANICAL POLISHING PAD 有权
    化学机械抛光垫

    公开(公告)号:US20090036045A1

    公开(公告)日:2009-02-05

    申请号:US12278103

    申请日:2007-01-30

    IPC分类号: B24B9/00

    摘要: A chemical mechanical polishing pad which provides a high removal rate, can suppress the production of a scratch on the polished surface completely and can achieve high in-plane uniformity in the amount of polishing of the polished surface.The chemical mechanical polishing pad has a surface resistivity of its polishing layer of 1.0×107 to 9.9×1013Ω. The polishing layer is made of a composition containing (A) a polymer matrix component having a volume resistivity of 1.0×1013 to 9.9×1017 Ω·cm and (B) a component having a volume resistivity of 1.0×106 to 9.9×1012 Ω·cm.

    摘要翻译: 提供高去除率的化学机械抛光垫可以完全抑制抛光表面上的划痕的产生,并且可以实现抛光表面的抛光量的高的面内均匀性。 化学机械抛光垫的抛光层的表面电阻率为1.0×10 7至9.9×10 13 O。 研磨层由含有(A)体积电阻率为1.0×10 13〜9.9×10 17Ω·cm·cm的聚合物基质成分的组合物和(B)体积电阻率为1.0×10 6〜9.9×10 12Ω·cm的组分构成。

    COMPOSITION FOR FORMING POLISHING LAYER OF CHEMICAL MECHANICAL POLISHING PAD, CHEMICAL MECHANICAL POLISHING PAD AND CHEMICAL MECHANICAL POLISHING METHOD
    4.
    发明申请
    COMPOSITION FOR FORMING POLISHING LAYER OF CHEMICAL MECHANICAL POLISHING PAD, CHEMICAL MECHANICAL POLISHING PAD AND CHEMICAL MECHANICAL POLISHING METHOD 有权
    用于形成化学机械抛光垫,化学机械抛光垫和化学机械抛光方法的抛光层组合物

    公开(公告)号:US20090191795A1

    公开(公告)日:2009-07-30

    申请号:US12357706

    申请日:2009-01-22

    摘要: Provided is a composition for forming a polishing layer of a chemical mechanical polishing pad having polishing characteristics such as a high polishing rate, an excellent planarity of the polished object and less scratches of the polished object.The above composition for forming a polishing layer of a chemical mechanical polishing pad comprises (A) a polyurethane having a carbon-carbon double bond on a side chain and (B) a cross-linking agent. The polyurethane (A) is preferably a thermoplastic polyurethane (A′) obtained by mixing at least the following components (a11) to (a13) and component (a2) in a proportion satisfying the following conditions (1) and (2) and reacting them: (a11) an oligomer which has one or more hydroxyl groups and one or more carbon-carbon double bonds and which has a number average molecular weight of 500 to 2500, (a12) an oligomer which has two or more hydroxyl groups and either one or both of an ether bond and an ester bond and which has a number average molecular weight of 500 to 2500 and is different from the component (a11), (a13) a monomer having two hydroxyl groups and (a2) a monomer having two isocyanate groups; and (1) a value of M-1/M-OH is 0.85 to 1.10, and (2) a value of M-2/M-OH is 0.45 to 0.80, wherein M-1 is the number of isocyanate groups contained in the component (a2), M-2 is the number of hydroxyl groups contained in the component (a13) and M-OH is the total number of hydroxyl groups contained in the components (a11), (a12) and (a13).

    摘要翻译: 提供一种用于形成化学机械抛光垫的抛光层的组合物,其具有抛光特性如抛光速度高,抛光对象的优良平面度和抛光对象的划痕少。 用于形成化学机械抛光垫的抛光层的上述组合物包括(A)侧链上具有碳 - 碳双键的聚氨酯和(B)交联剂。 聚氨酯(A)优选为通过以满足以下条件(1)和(2)的比例混合至少以下成分(a11)〜(a13)和成分(a2)而得到的热塑性聚氨酯(A'), 它们:(a11)具有一个或多个羟基和一个或多个碳 - 碳双键且数均分子量为500至2500的低聚物,(a12)具有两个或更多个羟基的低聚物和 醚键和酯键中的一种或两种,并且其数均分子量为500至2500,并且不同于组分(a11),(a13)具有两个羟基的单体和(a2)具有两个羟基的单体 异氰酸酯基; 和(1)M-1 / M-OH的值为0.85〜1.10,(2)M-2 / M-OH的值为0.45〜0.80,M-1为 组分(a2),M-2是组分(a13)中包含的羟基数,M-OH是组分(a11),(a12)和(a13)中所含羟基的总数。

    POLYURETHANE, COMPOSITION FOR FORMATION OF POLISHING LAYERS THAT CONTAINS SAME, PAD FOR CHEMICAL MECHANICAL POLISHING, AND CHEMICAL MECHANICAL POLISHING METHOD USING SAME
    5.
    发明申请
    POLYURETHANE, COMPOSITION FOR FORMATION OF POLISHING LAYERS THAT CONTAINS SAME, PAD FOR CHEMICAL MECHANICAL POLISHING, AND CHEMICAL MECHANICAL POLISHING METHOD USING SAME 审中-公开
    聚氨酯,用于形成包含相同的抛光层的组合物,用于化学机械抛光的胶料,以及使用其的化学机械抛光方法

    公开(公告)号:US20120083187A1

    公开(公告)日:2012-04-05

    申请号:US13375849

    申请日:2010-05-31

    摘要: A polyurethane is produced by reacting a mixture including at least (A) a diisocyanate, (B) a polyol, and (C) a chain extender, the polyol (B) having the number average molecular weight of 400 to 5000, the chain extender (C) including (C1) a compound shown by the following general formula (1) and (C2) a compound shown by the following general formula (2), the compound (C1) and the compound (C2) having a number average molecular weight of less than 400, and a ratio “M1/(M1+M2)” calculated by using the number of moles (M1) of the compound (C1) and the number of moles (M2) of the compound (C2) being 0.25 to 0.9. HO—(CR1R2)2m+1—OH  (1) HO—(CR3R4)2n—OH  (2)

    摘要翻译: 聚氨酯通过至少包含(A)二异氰酸酯,(B)多元醇和(C)扩链剂的混合物,数均分子量为400〜5000的多元醇(B),扩链剂 (C)包括(C1)由以下通式(1)表示的化合物和(C2)由以下通式(2)表示的化合物,化合物(C1)和化合物(C2)的数均分子量 重量小于400,通过使用化合物(C1)的摩尔数(M1)和化合物(C2)的摩尔数(M2)计算的比例“M1 /(M1 + M2)”为0.25 至0.9。 HO-(CR1R2)2m + 1-OH(1)HO-(CR3R4)2n-OH(2)

    Color conversion definition creating method, color conversion definition creating apparatus, and color conversion definition creating program storage medium
    6.
    发明授权
    Color conversion definition creating method, color conversion definition creating apparatus, and color conversion definition creating program storage medium 有权
    颜色转换定义创建方法,颜色转换定义创建装置和颜色转换定义创建程序存储介质

    公开(公告)号:US07180633B2

    公开(公告)日:2007-02-20

    申请号:US10280051

    申请日:2002-10-25

    申请人: Takahiro Okamoto

    发明人: Takahiro Okamoto

    IPC分类号: G06F15/00

    CPC分类号: H04N1/6022 H04N1/603

    摘要: In color conversion definition creating method and color conversion definition creating apparatus for creating a color conversion definition defining a relation of data conversion between RGB data for a printer and CMYK data for printing to perform printing in which a color of an image outputted by a printer receiving the RGB data and outputting the image is reproduced, a data conversion algorithm 60, in which color conversion parameters customized by a skilled person in color customizing are set up, is used to determine a curve of K on a gray axis (a first K-function creating section 54), and the data conversion algorithm 60 is altered into a color conversion algorithm faithful in colorimetry as to K to determine values of K of the whole color spaces (a second K-function creating section 54). With respect to C, M and Y besides K, values are determined so that calorimetric values are matched.

    摘要翻译: 在颜色转换定义创建方法和颜色转换定义创建装置中,用于创建定义用于打印机的RGB数据和用于打印的CMYK数据之间的数据转换关系的颜色转换定义,以进行打印,其中打印机输出的图像的颜色 再现RGB数据并输出图像,其中建立了由本领域技术人员定制的颜色定制中的颜色转换参数的数据转换算法60来确定K在灰度轴上的曲线(第一K- 功能创建部分54),并且数据转换算法60被改变为颜色转换算法,在K的比色法中忠实地确定整个颜色空间的K值(第二K函数创建部分54)。 除了K之外,对于C,M和Y,确定值,使得量热值相匹配。

    Chemical mechanical polishing pad, production method thereof, and chemical mechanical polishing process
    7.
    发明申请
    Chemical mechanical polishing pad, production method thereof, and chemical mechanical polishing process 审中-公开
    化学机械抛光垫,其生产方法和化学机械抛光工艺

    公开(公告)号:US20050222336A1

    公开(公告)日:2005-10-06

    申请号:US11050730

    申请日:2005-02-07

    CPC分类号: B24B37/24 B24D18/00

    摘要: A chemical mechanical polishing pad comprising a water-insoluble matrix which comprises (A) a styrene polymer and (B) a diene polymer. A method for producing the above chemical mechanical polishing pad, the method comprising the steps of preparing a composition comprising (A) a styrene polymer, (B) a diene polymer and (C) a crosslinking agent, shaping the above composition into a predetermined shape, and heating the composition during or after shaping to cure it. A chemical mechanical polishing process which comprises polishing a surface to be polished of an object to be polished by use of the chemical mechanical polishing pad. According to the present invention, it is possible to provide a chemical mechanical polishing pad which can be suitably applied to polishing of metal film and insulation film, particularly to an STI technique, provides a flat polished surface, can provide a high polishing rate and has a satisfactory useful life.

    摘要翻译: 一种包含水不溶性基质的化学机械抛光垫,其包含(A)苯乙烯聚合物和(B)二烯聚合物。 一种制备上述化学机械抛光垫的方法,所述方法包括以下步骤:制备包含(A)苯乙烯聚合物,(B)二烯聚合物和(C)交联剂的组合物,将上述组合物成形为预定形状 并且在成形期间或之后加热组合物以使其固化。 一种化学机械抛光工艺,其包括通过使用化学机械抛光垫抛光待抛光物体的待抛光表面。 根据本发明,可以提供一种适用于金属膜和绝缘膜的抛光的化学机械抛光垫,特别是对于STI技术,提供平坦的抛光表面,可以提供高抛光速率并具有 令人满意的使用寿命。

    Method of establishing color correction functions
    8.
    发明授权
    Method of establishing color correction functions 有权
    通过使用灰度和色彩图来建立色彩校正功能的方法

    公开(公告)号:US06734899B1

    公开(公告)日:2004-05-11

    申请号:US09133432

    申请日:1998-08-13

    申请人: Takahiro Okamoto

    发明人: Takahiro Okamoto

    IPC分类号: H04N1700

    CPC分类号: H04N17/02 H04N9/69

    摘要: The gray balance of an input signal produced when a gray chart is read by a digital camera is adjusted by a color processor. Thereafter, a color chart is read by the digital camera, and color correction functions in the color processor are corrected so that chromaticities of an output signal with the adjusted gray balance will be in conformity with the chromaticities of the color chart.

    摘要翻译: 当由数码相机读取灰度图形时产生的输入信号的灰度平衡由颜色处理器调节。 此后,通过数字照相机读取彩色图表,并且校正彩色处理器中的色彩校正功能,使得具有经调整的灰度平衡的输出信号的色度将与色彩图的色度一致。

    Display unit
    9.
    发明授权
    Display unit 有权
    显示单元

    公开(公告)号:US07915554B2

    公开(公告)日:2011-03-29

    申请号:US11652987

    申请日:2007-01-12

    IPC分类号: H01H9/00

    摘要: A display unit, attached to a bar forming a handlebar, frame or stem of a bicycle with a securing tool, comprises a body having a display part capable of realizing a first display state displaying first data (traveling speed, for example) and a second state displaying second data (traveling distance, for example). The first and second display states are switched by pressing down body from above.

    摘要翻译: 安装在具有固定工具的自行车的把手,框架或杆的杆上的显示单元包括具有显示部分的主体,该主体能够实现第一显示状态显示第一数据(例如行驶速度)和第二显示状态 状态显示第二数据(例如行驶距离)。 通过从上方按下身体来切换第一和第二显示状态。