公开(公告)号：US06832888B2

公开(公告)日：2004-12-21

申请号：US10278188

申请日：2002-10-22

申请人： Takashi Kabasawa ,  Manabu Nonaka ,  Tooru Miwata

发明人： Takashi Kabasawa ,  Manabu Nonaka ,  Tooru Miwata

IPC分类号： F04D1904

CPC分类号： F04D29/083 ,  F04D19/048

摘要： A molecular pump for exhausting a chamber has a casing, a stator mounted in the casing, and a rotor mounted in the casing for undergoing rotation relative to the stator during exhaustion of the container. The rotor has a surface disposed opposite to and confronting a surface of the stator. A thread groove is formed in at least one of the opposite and confronting surfaces of the stator and the rotor. A clearance varying device varies a magnitude of a clearance between the opposite and confronting surfaces of the stator and the rotor. An exhaust controlling device controls a degree of exhaustion of the chamber by adjusting the magnitude of the clearance between the opposite and confronting surfaces of the stator and the rotor to a preselected target value during operation of the molecular pump.

摘要翻译： 用于排出腔室的分子泵具有壳体，安装在壳体中的定子和安装在壳体中的转子，用于在容器耗尽期间相对于定子旋转。 转子具有与定子的表面相对并面对定子的表面。 在定子和转子的相对和相对表面中的至少一个中形成螺纹槽。 间隙改变装置改变定子和转子的相对面和相对表面之间的间隙的大小。 排气控制装置通过在分子泵的操作期间将定子和转子的相对面和相对表面之间的间隙的大小调整到预选的目标值来控制室的排气度。

公开(公告)号：US06672827B2

公开(公告)日：2004-01-06

申请号：US10016590

申请日：2001-10-30

申请人： Yoshihiro Yamashita ,  Manabu Nonaka ,  Takashi Kabasawa

发明人： Yoshihiro Yamashita ,  Manabu Nonaka ,  Takashi Kabasawa

IPC分类号： F04D1904

CPC分类号： F04D19/046 ,  F04D17/168 ,  F04D19/044

摘要： To provide a small vacuum pump making it possible to efficiently perform evacuation from the atmosphere to a high vacuum (degree of vacuum: 10−5 Pa) by using a single pump unit. A turbo-molecular pump mechanism portion is arranged on the high-vacuum side, a volute pump mechanism portion is arranged on the atmosphere side, and a thread groove pump mechanism portion is arranged between the turbo-molecular pump mechanism portion and the volute pump mechanism portion. Further, rotor blades of the turbo-molecular pump mechanism portion, a rotor of the thread groove pump mechanism portion, and an impeller of the volute pump mechanism portion are integrally mounted to a single rotor shaft, which is rotated by a single motor.

摘要翻译： 为了提供一种小型真空泵，可以通过使用单个泵单元有效地从大气排出至高真空（真空度：10 -5 Pa）。 在高真空侧配置有涡轮分子泵机构部，在气氛侧配置有涡旋泵机构部，在涡轮分子泵机构部和涡旋泵机构之间配置有螺纹槽泵机构部 一部分。 此外，涡轮分子泵机构部分的转子叶片，螺纹槽泵机构部分的转子和蜗壳泵机构部分的叶轮一体地安装到由单个电动机旋转的单个转子轴上。

公开(公告)号：US06290457B1

公开(公告)日：2001-09-18

申请号：US09537939

申请日：2000-03-29

申请人： Takashi Kabasawa ,  Manabu Nonaka

发明人： Takashi Kabasawa ,  Manabu Nonaka

IPC分类号： F01D136

CPC分类号： F04D19/042 ,  F04D29/324

摘要： A vacuum pump has a rotor body having multiple stages of rotor blades each comprising a plurality of open-ended blades. The uppermost rotor blade formed on the rotor body is located in a position corresponding to a conical portion in a casing. The tip end of the rotor blade is inclined at the same angle as an inclination angle of the conical portion. Accordingly, gas molecules accelerated at the tip end of the rotor blade in a gas molecular region are unlikely to impinge on the casing, and are prevented from staying so that deterioration in discharge capabilities at the tip end can be suppressed. The uppermost rotor blade is located at the conical portion, making it possible to effectively transport the gas molecules toward the outer periphery of the second and following rotor blades.

摘要翻译： 真空泵具有转子体，该转子体具有多个转子叶片，每个转子叶片包括多个开放式叶片。 形成在转子体上的最上面的转子叶片位于对应于壳体中的锥形部分的位置。 转子叶片的尖端以与锥形部分的倾斜角度相同的角度倾斜。 因此，在气体分子区域中在转子叶片的尖端加速的气体分子不太可​​能撞击到壳体上，并且被阻止停留，从而可以抑制末端的排出能力的劣化。 最上面的转子叶片位于锥形部分，使得有可能有​​效地将气体分子传送到第二和随后的转子叶片的外周。

公开(公告)号：US06910850B2

公开(公告)日：2005-06-28

申请号：US10315636

申请日：2002-12-10

申请人： Manabu Nonaka ,  Takashi Kabasawa

发明人： Manabu Nonaka ,  Takashi Kabasawa

IPC分类号： F04D19/04 ,  F01D1/36

CPC分类号： F04D19/042

摘要： A vacuum pump has a pump case having a gas suction port at an upper part of the pump case and a gas exhaust port at a lower part of the pump case. A stator column extends from a base of the pump case and has an outer circumferential surface. A rotor shaft is rotatably supported in the pump case by the stator column. A spacer is removably integrally connected to the outer circumferential surface of the stator column. The spacer has an outer circumferential surface spaced apart from an inner circumferential surface of the rotor and a through-hole extending form the outer circumferential surface to an inner circumferential surface thereof. A connecting member extends through the through-hole of the spacer and contacts the outer circumferential surface of the stator column to thereby removably integrally connect the spacer to the outer circumferential surface of the stator column.

摘要翻译： 真空泵具有在壳体的上部具有气体吸入口的泵壳体和泵壳体的下部的排气口。 定子柱从泵壳的基部延伸并具有外圆周表面。 转子轴由定子柱可旋转地支撑在泵壳体中。 间隔件可移除地一体地连接到定子柱的外圆周表面。 间隔件具有与转子的内周面间隔开的外周面和从外周面延伸到其内周面的通孔。 连接构件延伸穿过间隔件的通孔并与定子柱的外周表面接触，从而将隔离件可移除地一体地连接到定子柱的外圆周表面。

公开(公告)号：US06454524B1

公开(公告)日：2002-09-24

申请号：US09354873

申请日：1999-07-16

申请人： Takashi Okada ,  Manabu Nonaka ,  Takashi Kabasawa

发明人： Takashi Okada ,  Manabu Nonaka ,  Takashi Kabasawa

IPC分类号： F01D136

CPC分类号： F04D19/04 ,  F04D27/00

摘要： A vacuum pump and a vacuum apparatus are provided in which gas suction and discharge force can be adjusted without producing dust. The vacuum apparatus includes a vacuum pump 1 for sucking and discharging gas within a chamber 90. The vacuum pump 1 is provided with a communicating pipe 85 that pierces the casing for communicating between the outside of the apparatus and the rotor blades and the stator blades of the turbomolecular pump section. An inert gas is supplied to the turbomolecular pump section through the communicating pipe 85 so that the inert gas is mixed with the gas that has sucked from the chamber 90. The communicating pipe 85 includes a valve 86, and an open/close operation of the valve 86 is controlled in accordance with an output from a pressure sensor 97 witnin the chamber 90. An amount of the inert to be supplied to the turbomolecular pump section T and then mixed, is adjusted by the valve 86 so that a pressure within the vacuum pump 1 is adjusted, with the result that a gas suction force from the chamber 90 can be adjusted.

摘要翻译： 提供真空泵和真空装置，其中可以调节气体吸入和排出力而不产生灰尘。 该真空装置包括：真空泵1，用于在腔室90内吸入和排出气体。真空泵1设置有连通管85，该连通管85刺穿壳体，用于在设备外部与转子叶片之间连通，以及定子叶片 涡轮分子泵部分。 通过连通管85将惰性气体供给到涡轮分子泵部，使惰性气体与从室90吸入的气体混合。连通管85包括阀86，以及开闭 根据来自腔室90的压力传感器97的输出来控制阀86.通过阀86调节供给到涡轮分子泵部T然后混合的惰性量，使得真空内的压力 泵1被调节，结果可以调节来自腔室90的吸气力。

公开(公告)号：US06851848B2

公开(公告)日：2005-02-08

申请号：US10395673

申请日：2003-03-24

申请人： Tooru Miwata ,  Manabu Nonaka ,  Takashi Kabasawa

发明人： Tooru Miwata ,  Manabu Nonaka ,  Takashi Kabasawa

IPC分类号： F04D19/04 ,  F04D27/00 ,  G01J5/04 ,  G01J5/06 ,  G01K1/16

CPC分类号： G01J5/041 ,  F04D19/04 ,  F04D27/00 ,  G01J5/06

摘要： A turbo-molecular pump has components including a stator column, a rotary shaft, and a blade connected to the rotary shaft for rotation therewith. A radiation temperature measuring apparatus has a radiation thermometer for measuring a temperature of a preselected one of the components of the turbo-molecular pump disposed within a view angle range of the radiation thermometer and in accordance with heat energy radiated from the preselected component. A hood is connected to the radiation thermometer so as to not interfere with the view angle range of the radiation thermometer and is configured to block heat energy radiated from components of the turbo-molecular pump disposed outside of the view angle range of the radiation thermometer.

摘要翻译： 涡轮分子泵具有包括定子柱，旋转轴和连接到旋转轴的叶片以与其一起旋转的部件。 辐射温度测量装置具有辐射温度计，用于测量设置在辐射温度计的视角范围内并根据从预选部件辐射的热能的涡轮分子泵的预选一个部件的温度。 罩与辐射温度计连接，不会与辐射温度计的视角范围相干扰，并且被构造成阻挡从设置在辐射温度计的视角范围外的涡轮分子泵的部件所辐射的热能。

公开(公告)号：US06779969B2

公开(公告)日：2004-08-24

申请号：US10308795

申请日：2002-12-03

申请人： Manabu Nonaka ,  Tooru Miwata ,  Takashi Kabasawa

发明人： Manabu Nonaka ,  Tooru Miwata ,  Takashi Kabasawa

IPC分类号： F01D136

CPC分类号： F04D29/083 ,  F04D19/044 ,  F04D19/046

摘要： A thread-groove pump mechanism portion PB employs a turn-back structure including a rotor formed of a multiple cylinder having an inner cylindrical rotor and an outer cylindrical rotor and a stator formed of a multiple cylinder having an inner cylindrical stator and on outer cylindrical stator. Gaps g1 and g3 defined by the outer walls of the rotor and the stator walls, and a gap g2 defined by the inner cylinder wall of the rotor and the stator wall during the rest of the pump are formed such that they increase with the distance from the rotor shaft center and g1>g2 and g1>g3 are satisfied. Thus, even if displacement occurs by the centrifugal force and thermal expansion during the operation of pump, predetermined gaps can be provided therebetween.

摘要翻译： 螺纹槽泵机构部分PB采用回转结构，其包括由具有内圆柱形转子和外圆筒形转子的多缸的转子和由具有内圆柱形定子的多个圆筒形成的定子和外圆柱定子 。 由转子的外壁和定子壁限定的间隙g1和g3，并且在泵的其余部分期间形成由转子的内筒壁和定子壁限定的间隙g2，使得它们随着距离 转子轴心和g1> g2和g1> g3。 因此，即使在泵的运转过程中由离心力和热膨胀发生位移，也可以在其间设置规定的间隙。

公开(公告)号：US06419444B1

公开(公告)日：2002-07-16

申请号：US09572743

申请日：2000-05-16

申请人： Takashi Kabasawa ,  Manabu Nonaka

发明人： Takashi Kabasawa ,  Manabu Nonaka

IPC分类号： F04D302

CPC分类号： F04D19/044

摘要： A screw groove-type pump has a rotor member mounted for undergoing rotation, a stator member arranged so as to be coaxial with the rotor member and having a peripheral wall disposed opposite to and spaced-apart from a circumferential wall of the rotor member, an inlet port for introducing gas into a space between the circumferential wall of the rotor member and the peripheral wall of the stator member, and an outlet port for discharging gas introduced into the space between the circumferential wall of the rotor member and the peripheral wall of the stator member. A screw groove is formed on one of the circumferential wall of the rotor member and the peripheral wall of the stator member for transferring gas introduced into the inlet port through the space between the circumferential wall of the rotor member and the peripheral wall of the stator member and to the outlet port during rotation of the rotor member. The depth of the screw groove at a point thereof which is nearest the inlet port is equal to or larger than ¼ the diameter of one of the circumferential wall of the rotor member and the peripheral wall of the stator member. An angle of elevation of the screw groove with respect to a radial axis of the rotor member decreases toward the outlet port from the inlet port.

摘要翻译： 螺旋槽型泵具有安装成转动的转子部件，与转子部件同轴配置的定子部件，具有与转子部件的周壁相对且间隔开的周壁， 用于将气体引入到转子构件的圆周壁与定子构件的周壁之间的空间中的入口，以及用于排出导入到转子构件的周壁与周向壁之间的空间的气体的出口 定子构件。 在转子构件的圆周壁和定子构件的周壁之一上形成螺纹槽，用于通过转子构件的周壁与定子构件的周壁之间的空间输送引入入口的气体 并且在转子构件旋转期间到出口。 在最靠近入口的点处的螺纹槽的深度等于或大于转子构件的圆周壁和定子构件的周壁之一的直径。 螺旋槽相对于转子构件的径向轴线的高度角从入口端朝向出口减小。

公开(公告)号：US06755611B1

公开(公告)日：2004-06-29

申请号：US09572745

申请日：2000-05-16

申请人： Takashi Kabasawa ,  Manabu Nonaka ,  Takashi Okada

发明人： Takashi Kabasawa ,  Manabu Nonaka ,  Takashi Okada

IPC分类号： F01D136

CPC分类号： F04D29/30 ,  F04D17/168 ,  F04D19/042 ,  F04D29/384

摘要： A vacuum pump has a casing having an interior space, an inlet port for introducing gas molecules into the interior space, and an outlet port for discharging the gas molecules from the interior space. A rotor shaft extends into the interior space of the casing for undergoing rotation about a rotational axis. A stator is connected to the casing and has stator blades extending into the interior space of the casing. A rotor is disposed between the casing and the rotor shaft. The rotor has a preselected number of rotor blades disposed at an uppermost stage thereof and alternately disposed between the stator blades for undergoing rotation with the rotor shaft to direct gas molecules toward the outlet port. A rotational member is disposed between the inlet port and the rotor for undergoing rotation with the rotor shaft about the rotational axis. The rotational member has a generally conical-shaped surface gradually decreasing toward the inlet port. Guiding blades are disposed on the conical-shaped surface of the rotational member for undergoing rotation with the rotational member about the rotational axis to impart movement to the gas molecules in the interior space of the casing in a radial direction relative to the rotational axis.

摘要翻译： 真空泵具有具有内部空间的壳体，用于将气体分子引入内部空间的入口端口和用于从内部空间排出气体分子的出口。 转子轴延伸到壳体的内部空间中以围绕旋转轴线旋转。 定子连接到壳体并且具有延伸到壳体的内部空间中的定子叶片。 转子设置在壳体和转子轴之间。 转子具有设置在其最上段的预定数量的转子叶片，并且交替地设置在定子叶片之间，用于与转子轴一起旋转以将气体分子引导到出口。 旋转构件设置在入口和转子之间，以使转子轴绕旋转轴线转动。 旋转构件具有朝向入口端逐渐减小的大致圆锥形表面。 引导叶片设置在旋转构件的锥形表面上，用于与旋转构件绕旋转轴线旋转，以使其相对于旋转轴线在径向方向上移动到壳体的内部空间中的气体分子。

公开(公告)号：US06607365B1

公开(公告)日：2003-08-19

申请号：US09383652

申请日：1999-08-26

申请人： Takashi Kabasawa ,  Takashi Okada ,  Manabu Nonaka

发明人： Takashi Kabasawa ,  Takashi Okada ,  Manabu Nonaka

IPC分类号： F04B4900

CPC分类号： F04D19/04 ,  F04D27/0253

摘要： A vacuum pump capable of controlling a gas sucking performance is provided. A conductance variable mechanism (50) is arranged at an inlet port (16) formed inside a flange (11). The conductance variable mechanism (50) allows the area of a cross-section of the inlet port to be increased or decreased relative to the direction where gas is fed, so that an amount of gas to be sucked from the inlet port (16) can be controlled.

摘要翻译： 提供能够控制吸气性能的真空泵。 导电变量机构（50）布置在形成在凸缘（11）内的入口（16）处。 电导可变机构（50）允许入口的横截面的面积相对于气体被供给的方向增加或减小，从而能够从入口（16）吸入的气体量可以 被控制。