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1.发明申请Fluorine-Containing Sulfonates Having Polymerizable Anions and Manufacturing Method Therefor, Fluorine-Containing Resins, Resist Compositions, and Pattern-Forming Method Using Same 有权具有可聚合阴离子的含氟磺酸盐及其制造方法，含氟树脂，抗蚀剂组合物和使用其的图案形成方法公开(公告)号：US20110177453A1
公开(公告)日：2011-07-21
申请号：US13121315
申请日：2009-10-08
IPC分类号： G03F7/004 , C08F222/24 , C07C69/34 , G03F7/20
CPC分类号： C07C303/32 , C07C309/12 , C07C309/20 , C07C381/12 , C08F220/24 , C08F220/38 , G03F7/0045 , G03F7/0046 , G03F7/0382 , G03F7/0397 , G03F7/2041 , G03F7/30 , Y10S430/108 , Y10S430/111 , C08F220/28
摘要： According to the present invention, there is provided a polymerizable fluorine-containing sulfonic acid onium salt of the following general formula (2) and a resin obtained by polymerization thereof. It is possible by the use of this sulfonate resin of the present invention to provide a resist composition with high resolution, board depth of focus tolerance (DOF), small line edge roughness (LER) and high sensitivity. In the formula, Z represents a substituted or unsubstituted C1-C6 straight or branched alkylene group, or a divalent moiety in which substituted or unsubstituted C1-C6 straight or branched alkylene groups are bonded in series to a divalent group obtained by elimination of two hydrogen atoms from an alicyclic or aromatic hydrocarbon; R represents a hydrogen atom, a halogen atom, or a C1-C3 alkyl or fluorine-containing alkyl group; and Q+ represents a sulfonium cation or an iodonium cation.
摘要翻译： 根据本发明，提供了以下通式（2）的可聚合的含氟磺酸鎓盐和通过其聚合获得的树脂。 通过使用本发明的磺酸树脂可以提供具有高分辨率，板聚焦偏差（DOF），小线边缘粗糙度（LER）和高灵敏度的抗蚀剂组合物。 在该式中，Z表示取代或未取代的C1-C6直链或支链亚烷基或其中取代或未取代的C1-C6直链或支链亚烷基与通过除去两个氢而获得的二价基团串联结合的二价部分 来自脂环族或芳族烃的原子; R表示氢原子，卤素原子或C1-C3烷基或含氟烷基; Q +表示锍阳离子或碘鎓阳离子。
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2.发明授权Fluorine-containing sulfonates having polymerizable anions and manufacturing method therefor, fluorine-containing resins, resist compositions, and pattern-forming method using same 有权含有可聚合阴离子的含氟磺酸盐及其制造方法，含氟树脂，抗蚀剂组合物和使用其的图案形成方法公开(公告)号：US08663897B2
公开(公告)日：2014-03-04
申请号：US13121315
申请日：2009-10-08
IPC分类号： G03F7/004 , G03F7/30 , C07C303/32 , C07C309/20 , C08F220/24 , G03F7/039
CPC分类号： C07C303/32 , C07C309/12 , C07C309/20 , C07C381/12 , C08F220/24 , C08F220/38 , G03F7/0045 , G03F7/0046 , G03F7/0382 , G03F7/0397 , G03F7/2041 , G03F7/30 , Y10S430/108 , Y10S430/111 , C08F220/28
摘要： According to the present invention, there is provided a polymerizable fluorine-containing sulfonic acid onium salt of the following general formula (2) and a resin obtained by polymerization thereof. It is possible by the use of this sulfonate resin of the present invention to provide a resist composition with high resolution, board depth of focus tolerance (DOF), small line edge roughness (LER) and high sensitivity. In the formula, Z represents a substituted or unsubstituted C1-C6 straight or branched alkylene group, or a divalent moiety in which substituted or unsubstituted C1-C6 straight or branched alkylene groups are bonded in series to a divalent group obtained by elimination of two hydrogen atoms from an alicyclic or aromatic hydrocarbon; R represents a hydrogen atom, a halogen atom, or a C1-C3 alkyl or fluorine-containing alkyl group; and Q+ represents a sulfonium cation or an iodonium cation.
摘要翻译： 根据本发明，提供了以下通式（2）的可聚合的含氟磺酸鎓盐和通过其聚合获得的树脂。 通过使用本发明的磺酸树脂可以提供具有高分辨率，板聚焦偏差（DOF），小线边缘粗糙度（LER）和高灵敏度的抗蚀剂组合物。 在该式中，Z表示取代或未取代的C1-C6直链或支链亚烷基或其中取代或未取代的C1-C6直链或支链亚烷基与通过除去两个氢而获得的二价基团串联结合的二价部分 来自脂环族或芳族烃的原子; R表示氢原子，卤素原子或C1-C3烷基或含氟烷基; Q +表示锍阳离子或碘鎓阳离子。
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公开(公告)号：US20120004447A1
公开(公告)日：2012-01-05
申请号：US13256101
申请日：2010-03-12
IPC分类号： C07C309/69 , C07C313/06
CPC分类号： C07C313/04 , C07C303/32 , C07C381/12 , G03F7/0045 , G03F7/0046 , G03F7/0392 , C07C309/08 , C07C309/12
摘要： An ammonium hydroxyfluoroalkanesulfinate is obtained by using an organic base while sulfinating a bromofluoroalcohol with a sulfinating agent. An ammonium hydroxyfluoroalkanesulfonate is obtained by oxidizing the ammonium hydroxyfluoroalkanesulfinate. An onium fluoroalkanesulfonate is obtained by converting the ammonium hydroxyfluoroalkanesulfonate into an onium salt through esterification. This onium fluoroalkanesulfonate is useful as a photoacid generator in chemically amplified resists and the like.
摘要翻译： 通过使用有机碱，同时用硫酸化剂硫化溴氟醇来获得羟基氟烷基亚磺酸铵。 通过氧化羟基氟烷基亚磺酸铵得到羟基氟烷基磺酸铵。 通过酯化将羟基氟烷基磺酸铵转化成鎓盐得到氟代烷基磺酸鎓鎓盐。 该氟鎓烷基磺酸鎓可用作化学放大抗蚀剂等中的光致酸产生剂。
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公开(公告)号：US08877960B2
公开(公告)日：2014-11-04
申请号：US13254708
申请日：2010-03-12
IPC分类号： C07C313/04 , G03F7/00 , G03F7/004 , C07C303/32 , C07C381/12 , G03F7/039
CPC分类号： C07C313/04 , C07C303/32 , C07C381/12 , C07C2601/08 , C07C2601/14 , C07C2602/42 , C07C2603/74 , G03F7/0045 , G03F7/0046 , G03F7/0392 , C07C309/12 , C07C309/10
摘要： When sulfinating a carboxylic acid bromofluoroalkyl ester by using a sulfinating agent, an organic base is used, thereby obtaining a fluoroalkanesulfinic acid ammonium salt. This is oxidized to obtain a fluoroalkanesulfonic acid ammonium salt. This is used as the raw material and is converted to an onium salt or is converted to an onium salt by going through saponification and esterification, thereby obtaining a fluoroalkanesulfonic acid onium salt. This fluoroalkanesulfonic acid onium salt is useful as a photoacid generator used for chemically amplified resist materials, etc.
摘要翻译： 当通过使用硫酸化剂将羧酸溴氟烷基酯硫化时，使用有机碱，从而得到氟代烷基亚磺酸铵盐。 将其氧化得到氟烷基磺酸铵盐。 将其用作原料并转化为鎓盐，或通过皂化和酯化转化为鎓盐，从而得到氟烷基磺酸鎓盐。 该氟烷基磺酸鎓盐可用作用于化学放大抗蚀剂材料等的光致酸产生剂。
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公开(公告)号：US20110313190A1
公开(公告)日：2011-12-22
申请号：US13254708
申请日：2010-03-12
IPC分类号： C07C69/78 , C07C309/08 , C07C69/533 , C07C69/75
CPC分类号： C07C313/04 , C07C303/32 , C07C381/12 , C07C2601/08 , C07C2601/14 , C07C2602/42 , C07C2603/74 , G03F7/0045 , G03F7/0046 , G03F7/0392 , C07C309/12 , C07C309/10
摘要： When sulfinating a carboxylic acid bromofluoroalkyl ester by using a sulfinating agent, an organic base is used, thereby obtaining a fluoroalkanesulfinic acid ammonium salt. This is oxidized to obtain a fluoroalkanesulfonic acid ammonium salt. This is used as the raw material and is converted to an onium salt or is converted to an onium salt by going through saponification and esterification, thereby obtaining a fluoroalkanesulfonic acid onium salt. This fluoroalkanesulfonic acid onium salt is useful as a photoacid generator used for chemically amplified resist materials, etc.
摘要翻译： 当通过使用硫酸化剂将羧酸溴氟烷基酯硫化时，使用有机碱，从而得到氟代烷基亚磺酸铵盐。 将其氧化得到氟烷基磺酸铵盐。 将其用作原料并转化为鎓盐，或通过皂化和酯化转化为鎓盐，从而得到氟烷基磺酸鎓盐。 该氟烷基磺酸鎓盐可用作用于化学放大抗蚀剂材料等的光致酸产生剂。
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公开(公告)号：US09024058B2
公开(公告)日：2015-05-05
申请号：US13256101
申请日：2010-03-12
IPC分类号： C07C309/00 , C07C313/04 , C07C303/32 , C07C381/12 , G03F7/004 , G03F7/039
CPC分类号： C07C313/04 , C07C303/32 , C07C381/12 , G03F7/0045 , G03F7/0046 , G03F7/0392 , C07C309/08 , C07C309/12
摘要： An ammonium hydroxyfluoroalkanesulfinate is obtained by using an organic base while sulfinating a bromofluoroalcohol with a sulfinating agent. An ammonium hydroxyfluoroalkanesulfonate is obtained by oxidizing the ammonium hydroxyfluoroalkanesulfinate. An onium fluoroalkanesulfonate is obtained by converting the ammonium hydroxyfluoroalkanesulfonate into an onium salt through esterification. This onium fluoroalkanesulfonate is useful as a photoacid generator in chemically amplified resists and the like.
摘要翻译： 通过使用有机碱，同时用硫酸化剂硫化溴氟醇来获得羟基氟烷基亚磺酸铵。 通过氧化羟基氟烷基亚磺酸铵得到羟基氟烷基磺酸铵。 通过酯化将羟基氟烷基磺酸铵转化成鎓盐得到氟代烷基磺酸鎓鎓盐。 该氟鎓烷基磺酸鎓可用作化学放大抗蚀剂等中的光致酸产生剂。
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