公开(公告)号：US06666943B2

公开(公告)日：2003-12-23

申请号：US09998227

申请日：2001-12-03

申请人： Takatsugu Wada ,  Hidetoshi Nojiri ,  Masatake Akaike ,  Takehiko Kawasaki ,  Rei Kurashima ,  Satoshi Nozu ,  Kozo Hokayama

发明人： Takatsugu Wada ,  Hidetoshi Nojiri ,  Masatake Akaike ,  Takehiko Kawasaki ,  Rei Kurashima ,  Satoshi Nozu ,  Kozo Hokayama

IPC分类号： B44C1165

CPC分类号： H01L41/316 ,  B41J2/161 ,  B41J2/1626 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1634 ,  B41J2/1646 ,  H01L41/0926 ,  H01L41/1876 ,  H01L41/253 ,  H01L41/313 ,  Y10S117/915 ,  Y10S428/914 ,  Y10T428/2486 ,  Y10T428/24917

摘要： A device is formed by transferring a film onto a substrate when the film requires but the substrate is not adapted to a high temperature heat treatment process. The film having layers and formed on a first substrate having layers is transferred onto a second substrate having layers. The method of transferring the film comprises a first step of forming a lift-off layer and the film to be transferred on the first substrate, a second step of bonding the film to be transferred to the second substrate and a third step of separating the film to be transferred from the first substrate by etching the lift-off layer and transferring it onto the second substrate.

公开(公告)号：US20080081387A1

公开(公告)日：2008-04-03

申请号：US11855304

申请日：2007-09-14

申请人： Satoshi Nozu

发明人： Satoshi Nozu

IPC分类号： H01L21/311

CPC分类号： B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  Y10T29/42 ,  Y10T29/49401

摘要： There is disclosed a manufacturing method in which depths of individual liquid chambers can be set to be small. The manufacturing method is a manufacturing method of a liquid discharge head having a liquid chamber which communicates with a discharge port for discharging a liquid, and includes: etching a first Si layer of an SOI substrate by use of an insulating layer as an etching stop layer to form the liquid chamber at the first Si layer, the SOI substrate being constituted by the first Si layer, the insulating layer and a second Si layer in this order; and removing a part or all of the second Si layer.

摘要翻译： 公开了可以将各个液室的深度设定得较小的制造方法。 制造方法是具有与用于排出液体的排出口连通的液体室的排液头的制造方法，包括：通过使用绝缘层作为蚀刻停止层来蚀刻SOI衬底的第一Si层 为了在第一Si层形成液体室，SOI衬底依次由第一Si层，绝缘层和第二Si层构成; 以及去除所述第二Si层的一部分或全部。

公开(公告)号：US07955509B2

公开(公告)日：2011-06-07

申请号：US11855304

申请日：2007-09-14

申请人： Satoshi Nozu

发明人： Satoshi Nozu

IPC分类号： B41J2/16

CPC分类号： B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  Y10T29/42 ,  Y10T29/49401

摘要： There is disclosed a manufacturing method in which depths of individual liquid chambers can be set to be small. The manufacturing method is a manufacturing method of a liquid discharge head having a liquid chamber which communicates with a discharge port for discharging a liquid, and includes: etching a first Si layer of an SOI substrate by use of an insulating layer as an etching stop layer to form the liquid chamber at the first Si layer, the SOI substrate being constituted by the first Si layer, the insulating layer and a second Si layer in this order; and removing a part or all of the second Si layer.

摘要翻译： 公开了可以将各个液室的深度设定得较小的制造方法。 制造方法是具有与用于排出液体的排出口连通的液体室的排液头的制造方法，包括：通过使用绝缘层作为蚀刻停止层来蚀刻SOI衬底的第一Si层 为了在第一Si层形成液体室，SOI衬底依次由第一Si层，绝缘层和第二Si层构成; 以及去除所述第二Si层的一部分或全部。

公开(公告)号：US07935264B2

公开(公告)日：2011-05-03

申请号：US11847891

申请日：2007-08-30

申请人： Satoshi Nozu ,  Tatsuo Furuta ,  Takehito Nishida

发明人： Satoshi Nozu ,  Tatsuo Furuta ,  Takehito Nishida

IPC分类号： G01D15/00 ,  G11B5/127

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14258 ,  Y10T29/49401

摘要： A liquid discharge head includes a plurality of liquid chambers for pressurizing a liquid, the plurality of liquid chambers communicating with discharge ports respectively; and a plurality of piezoelectric elements provided in correspondence with the plurality of liquid chambers, respectively, the plurality of piezoelectric elements each including a lower electrode, a piezoelectric body film, and an upper electrode which are sequentially laminated in the stated order from the plurality of liquid chambers side. The lower electrode is provided up to a region corresponding to a portion between the plurality of liquid chambers. The piezoelectric body film is reduced in thickness at the region corresponding to the portion between the plurality of liquid chambers relative to the thickness of a region corresponding to the plurality of liquid chambers and completely covers at least the lower electrode provided to the region corresponding to the portion between the plurality of liquid chambers.

摘要翻译： 液体排出头包括用于对液体加压的多个液体室，多个液体室分别与排出口连通; 以及分别与所述多个液体室对应地设置的多个压电元件，所述多个压电元件分别包括下部电极，压电体膜和上部电极，所述压电元件从所述多个液体室依次层叠 液室侧。 下电极被设置到对应于多个液体室之间的部分的区域。 压电体膜相对于与多个液体室对应的区域的厚度对应于多个液体室之间的部分的区域的厚度减小，并且至少完全覆盖设置在对应于该多个液体室的区域的下部电极 在多个液体室之间的部分。

公开(公告)号：US20080062230A1

公开(公告)日：2008-03-13

申请号：US11847891

申请日：2007-08-30

申请人： Satoshi Nozu ,  Tatsuo Furuta ,  Takehito Nishida

发明人： Satoshi Nozu ,  Tatsuo Furuta ,  Takehito Nishida

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14258 ,  Y10T29/49401

摘要： A liquid discharge head, comprising: a plurality of liquid chambers for pressurizing a liquid, the plurality of liquid chambers communicating with discharge ports respectively; and a plurality of piezoelectric elements provided in correspondence with the plurality of liquid chambers respectively, the plurality of piezoelectric elements each including a lower electrode, a piezoelectric body film, and an upper electrode which are sequentially laminated in the stated order from the plurality of liquid chambers side, the lower electrode being provided up to a region corresponding to a portion between the plurality of liquid chambers, wherein the piezoelectric body film is reduced in thickness at the region corresponding to the portion between the plurality of liquid chambers than at a region corresponding to the plurality of liquid chambers and completely covers at least the lower electrode provided to the region corresponding to the portion between the plurality of liquid chambers.

摘要翻译： 一种液体排出头，包括：多个用于对液体加压的液体室，所述多个液体室分别与排出口连通; 以及分别与所述多个液体室对应地设置的多个压电元件，所述多个压电元件各自包括下部电极，压电体膜和上部电极，所述压电元件从所述多个液体依次层叠 所述下电极设置到与所述多个液室之间的部分对应的区域，其中所述压电体膜在与所述多个液室之间的部分对应的区域处的厚度减小， 并且至少完全覆盖设置在与多个液体室之间的部分对应的区域的下部电极。