摘要:
When a position of a film formation mask is recognized by irradiating the film formation mask with light, an image having a high contrast cannot be obtained, which unstabilizes reproducibility of measurement accuracy for an alignment mark position, leading to an alignment error between a substrate and a mask. Provided is a film formation mask including a mask sheet having a positioning opening and a mask frame, in which a reflective member having a reflectance higher than that of the mask sheet is provided to the positioning opening. When light is irradiated onto the positioning opening of the film formation mask, an intensity difference between light reflected by the mask sheet and light reflected by the reflective member becomes stable. Therefore, the position of the film formation mask may be determined with high reproducibility.
摘要:
A vacuum evaporation apparatus includes an evaporation source, a combined conveyance body in which a glass substrate is superposed and aligned on a shadow mask fixed to a holding member, and a weight plate placed on the glass substrate presses the glass substrate to the shadow mask by gravity for holding the glass substrate, and a convey mechanism for conveying the combined conveyance body. The weight plate includes a shock absorbing member for absorbing an impact applied to the combined conveyance body in an in-plane direction of the glass substrate. The shock absorbing member includes a sliding body connected to the weight plate via a spring and having multiple recesses formed in a surface of the sliding body facing the glass substrate, and includes slide balls disposed in the multiple recesses.
摘要:
Provided are a film formation apparatus and a film formation method which are capable of forming a pixel pattern with good dimensional accuracy and with reduced misalignment in a plane direction between a substrate and a mask when the substrate is pressed against the mask. The film formation apparatus includes an alignment mechanism for aligning a substrate and a mask with each other and a pressing mechanism for pressing the substrate against the mask with a contact member provided to one end of a pressing body, which are provided in a vacuum chamber. After alignment between the substrate and the mask by the alignment mechanism, the contact member of the pressing body is brought into contact with a surface of the substrate, which is on a side opposite to the mask, to press the substrate.
摘要:
Provided is a film formation apparatus capable of reducing vibration and deformation that may be transmitted to an alignment mechanism and thereby suppressing misalignment between a substrate and a mask in a surface direction. The film formation apparatus includes: a film forming chamber; a supporting member; and an alignment mechanism provided on the supporting member in which: the supporting member includes a supporting plate for placing the alignment mechanism, and a leg portion; the supporting plate is provided so as to be spaced apart from a top board of the film forming chamber via the leg portion; and at least a part of the supporting plate is formed of a damping material capable of converting vibration transmitted to the supporting plate into thermal energy, thereby suppressing the vibration.
摘要:
Provided is a weight plate of a vacuum evaporation apparatus, and a vacuum evaporation apparatus, which may prevent occurrence of displacement due to an impact or the like during a conveyance by a convey mechanism after a shadow mask and a glass substrate are superposed and aligned. The glass substrate is superposed and aligned on a top surface of a tension mask as the shadow mask fixed to a mask holding member. Then, the weight plate is placed on the glass substrate and presses the glass substrate by gravity to form a combined conveyance body. A liquid metal is filled in a hollow part of the weight plate at a filling factor of from more than 25% to less than 85% or other shock absorbing mechanism is provided for absorbing an impact applied to the combined conveyance body.
摘要:
A lubricating agent contains at least one alkylene oxide derivative having an alkylene oxide group and an ester moiety or an ammonium salt moiety, which is represented by the following general formula (1), (2), (3) or (4): R.sup.1 --O--(R.sup.2 O).sub.m --R.sup.3 --COO--R.sup.4 (1) R.sup.1 O--(R.sup.2 O).sub.m --R.sup.3 --COONH.sub.3 --R.sup.4 (2) R.sup.4 --OCO--R.sup.3 --O--(R.sup.2 O).sub.m --R.sup.3 --COO--R.sup.4 (3) R.sup.4 --NH.sub.3 OCO--R.sup.3 --O--(R.sup.2 O).sub.m --R.sup.3 --COONH.sub.3 --R.sup.4 (4) wherein R.sup.1 is a hydrocarbon group having 1 to 26 carbon atoms or a hydrogen atom, R.sup.2 is a hydrocarbon group having 1 to 6 carbon atoms, R.sup.3 is a hydrocarbon group having 1 to 26 carbon atoms, R.sup.4 is a hydrocarbon or fluorocarbon group having 1 to 26 carbon atoms, and m is from 1 to 12. There is also disclosed a magnetic recording medium having a non-magnetic substrate and a magnetic layer provided on at least one surface of the substrate, wherein the magnetic layer has the lubricating agent in or on the magnetic layer.
摘要:
A reversible heat-sensitive recording medium comprising a support; a heat-sensitive layer formed on top of the support, which layer comprises a resin matrix and a low molecular weight organic compound dispersed in said matrix, and a transparency of which is reversibly changeable depending on the temperature, in which a conductive powder is contained in at least a part of the support and heat-sensitive layer, which medium has a low-surface resistivity and excellent anti-static properties.
摘要:
A magnetic recording medium having a non-magnetic substrate, a ferromagnetic metal thin film layer formed on one surface of the substrate and water adsorbed on the magnetic layer, wherein an ester having a lower hydrolysis speed than n-butyl stearate coexists on the ferromagnetic metal thin film layer with the water.
摘要:
A polycarbonate polyol having a main chain of the formula: ##STR1## wherein R is an aliphatic or alicyclic hydrocarbon group having 4 to 10 carbon atoms, and n is a number of 2.00 to 20.00, and having an aliphatic OH group at the terminal; an aromatic polycarbonate polyurethane resin prepared from the polycarbonate polyol as set forth above and a polyisocyanate compound having two or more isocyanate groups in the molecule and optionally other components, particularly a chain extender having a polar group; a coating agent comprising the polycarbonate polyol and/or aromatic polycarbonate polyurethane resin as set forth above and optionally a polyisocyanate compound as set forth above and a solvent; a cast film comprising a coating film formed from the polycarbonate polyol and/or aromatic polycarbonate polyurethane resin as set forth above and a base film; and a magnetic recording medium comprising a magnetic layer formed from the aromatic polycarbonate polyurethane resin as set forth above and optionally the polyisocyanate compound as set forth above, and a base film.
摘要:
A polycarbonate polyol having a main chain of the formula: ##STR1## wherein R is an aliphatic or alicyclic hydrcarbon group having 4 to 10 carbon atoms, and n is a number of 2.00 to 20.00, and having an aliphatic OH group at the terminal; an aromatic polycarbonate polyurethane resin prepared from the polycarbonate polyol as set forth above and a polyisocyanate compound having two or more isocyanate groups in the molecule and optionally other components, particularly a chain extender having a polar group; a coating agent comprising the polycarbonate polyol and/or aromatic polycarbonate polyurethane resin as set forth above and optionally a polyisocyanate compound as set forth above and a solvent; a cast film comprising a coating film formed from the polycarbonate polyol and/or aromatic polycarbonate polyurethane resin as set forth above and a base film; and a magnetic recording medium compriisng a magnetic layer formed from the aromatic polycarbonate polyurethane resin as set forth above and optionally the polyisocyanate compound as set forth above, and a base film.