Film Formation of Mask and Film Formation Method Using the Same
    1.
    发明申请
    Film Formation of Mask and Film Formation Method Using the Same 审中-公开
    使用它的面膜和成膜方法的成膜方法

    公开(公告)号:US20100080915A1

    公开(公告)日:2010-04-01

    申请号:US12561602

    申请日:2009-09-17

    IPC分类号: B05D1/32 B05C11/00

    CPC分类号: C23C14/042 H01L51/56

    摘要: When a position of a film formation mask is recognized by irradiating the film formation mask with light, an image having a high contrast cannot be obtained, which unstabilizes reproducibility of measurement accuracy for an alignment mark position, leading to an alignment error between a substrate and a mask. Provided is a film formation mask including a mask sheet having a positioning opening and a mask frame, in which a reflective member having a reflectance higher than that of the mask sheet is provided to the positioning opening. When light is irradiated onto the positioning opening of the film formation mask, an intensity difference between light reflected by the mask sheet and light reflected by the reflective member becomes stable. Therefore, the position of the film formation mask may be determined with high reproducibility.

    摘要翻译: 当通过用光照射成膜掩模来识别成膜掩模的位置时,不能获得具有高对比度的图像,这使对准标记位置的测量精度的再现性不稳定,导致基板和 一个面具 本发明提供一种成膜掩模,其包括具有定位开口和掩模框架的掩模片,其中具有高于掩模片的反射率的反射部件设置在定位开口上。 当光照射到成膜掩模的定位开口上时,由掩模片反射的光与由反射部件反射的光之间的强度差变得稳定。 因此,可以以高再现性确定成膜掩模的位置。

    Weight plate of vacuum evaporation apparatus and vacuum evaporation apparatus using the same
    2.
    发明授权
    Weight plate of vacuum evaporation apparatus and vacuum evaporation apparatus using the same 有权
    真空蒸发装置的重量板和使用其的真空蒸发装置

    公开(公告)号:US08328944B2

    公开(公告)日:2012-12-11

    申请号:US12707883

    申请日:2010-02-18

    IPC分类号: C23C14/24

    摘要: A vacuum evaporation apparatus includes an evaporation source, a combined conveyance body in which a glass substrate is superposed and aligned on a shadow mask fixed to a holding member, and a weight plate placed on the glass substrate presses the glass substrate to the shadow mask by gravity for holding the glass substrate, and a convey mechanism for conveying the combined conveyance body. The weight plate includes a shock absorbing member for absorbing an impact applied to the combined conveyance body in an in-plane direction of the glass substrate. The shock absorbing member includes a sliding body connected to the weight plate via a spring and having multiple recesses formed in a surface of the sliding body facing the glass substrate, and includes slide balls disposed in the multiple recesses.

    摘要翻译: 真空蒸发装置包括蒸发源,玻璃基板叠置并对准固定在保持构件上的荫罩上的组合输送体,放置在玻璃基板上的配重板将玻璃基板按压到荫罩上 用于保持玻璃基板的重力,以及用于输送组合输送体的输送机构。 配重板包括用于吸收在玻璃基板的面内方向上施加到组合输送体的冲击的冲击吸收构件。 该冲击吸收件包括一个经由弹簧连接到配重板的滑动体,并且在滑动体的面向玻璃基板的表面上形成有多个凹槽,并且包括设置在多个凹部中的滑动球。

    FILM FORMATION APPARATUS AND FILM FORMATION METHOD USING THE SAME
    3.
    发明申请
    FILM FORMATION APPARATUS AND FILM FORMATION METHOD USING THE SAME 审中-公开
    胶片形成装置及其成膜方法

    公开(公告)号:US20100024733A1

    公开(公告)日:2010-02-04

    申请号:US12509785

    申请日:2009-07-27

    IPC分类号: C23C16/04 B32B37/00

    摘要: Provided are a film formation apparatus and a film formation method which are capable of forming a pixel pattern with good dimensional accuracy and with reduced misalignment in a plane direction between a substrate and a mask when the substrate is pressed against the mask. The film formation apparatus includes an alignment mechanism for aligning a substrate and a mask with each other and a pressing mechanism for pressing the substrate against the mask with a contact member provided to one end of a pressing body, which are provided in a vacuum chamber. After alignment between the substrate and the mask by the alignment mechanism, the contact member of the pressing body is brought into contact with a surface of the substrate, which is on a side opposite to the mask, to press the substrate.

    摘要翻译: 提供了一种成膜装置和成膜方法,当基板被压靠在掩模上时,能够形成具有良好的尺寸精度并且在基板和掩模之间的平面方向上的偏移减小的像素图案。 成膜装置包括用于使基板和掩模彼此对准的对准机构和用于将设置在设置在真空室中的按压体的一端的接触构件压靠在掩模上的基板的按压机构。 在通过对准机构对基板和掩模进行对准之后,使按压体的接触构件与位于与掩模相反的一侧的基板的表面接触以按压基板。

    FILM FORMATION APPARATUS
    4.
    发明申请
    FILM FORMATION APPARATUS 审中-公开
    胶片形成装置

    公开(公告)号:US20120006264A1

    公开(公告)日:2012-01-12

    申请号:US13156900

    申请日:2011-06-09

    IPC分类号: B05C11/00

    摘要: Provided is a film formation apparatus capable of reducing vibration and deformation that may be transmitted to an alignment mechanism and thereby suppressing misalignment between a substrate and a mask in a surface direction. The film formation apparatus includes: a film forming chamber; a supporting member; and an alignment mechanism provided on the supporting member in which: the supporting member includes a supporting plate for placing the alignment mechanism, and a leg portion; the supporting plate is provided so as to be spaced apart from a top board of the film forming chamber via the leg portion; and at least a part of the supporting plate is formed of a damping material capable of converting vibration transmitted to the supporting plate into thermal energy, thereby suppressing the vibration.

    摘要翻译: 提供一种成膜装置,其能够减少可能传递到对准机构的振动和变形,从而抑制基板和面罩在表面方向上的未对准。 成膜装置包括:成膜室; 支撑构件; 以及设置在所述支撑构件上的对准机构,其中:所述支撑构件包括用于放置所述对准机构的支撑板和腿部; 所述支撑板设置成经由所述腿部与所述成膜室的顶板隔开; 并且支撑板的至少一部分由能够将传递到支撑板的振动转换成热能的阻尼材料形成,从而抑制振动。

    WEIGHT PLATE OF VACUUM EVAPORATION APPARATUS AND VACUUM EVAPORATION APPARATUS USING THE SAME
    5.
    发明申请
    WEIGHT PLATE OF VACUUM EVAPORATION APPARATUS AND VACUUM EVAPORATION APPARATUS USING THE SAME 有权
    真空蒸发装置的重量平板和真空蒸发装置

    公开(公告)号:US20100212596A1

    公开(公告)日:2010-08-26

    申请号:US12707883

    申请日:2010-02-18

    IPC分类号: C23C14/24

    摘要: Provided is a weight plate of a vacuum evaporation apparatus, and a vacuum evaporation apparatus, which may prevent occurrence of displacement due to an impact or the like during a conveyance by a convey mechanism after a shadow mask and a glass substrate are superposed and aligned. The glass substrate is superposed and aligned on a top surface of a tension mask as the shadow mask fixed to a mask holding member. Then, the weight plate is placed on the glass substrate and presses the glass substrate by gravity to form a combined conveyance body. A liquid metal is filled in a hollow part of the weight plate at a filling factor of from more than 25% to less than 85% or other shock absorbing mechanism is provided for absorbing an impact applied to the combined conveyance body.

    摘要翻译: 本发明提供一种真空蒸发装置的重量板和真空蒸发装置,其可以防止在荫罩和玻璃基板叠置并排列之后通过传送机构传送期间由于冲击等而发生位移。 当固定到掩模保持构件的荫罩时,将玻璃基板叠置并对准在张力掩模的顶表面上。 然后,将配重板放置在玻璃基板上,通过重力按压玻璃基板,形成组合输送体。 以超过25%至小于85%的填充因子将液体金属填充在重量板的中空部分中,或者提供其他减震机构用于吸收施加到组合输送体的冲击。

    Reversible heat-sensitive recording medium
    7.
    发明授权
    Reversible heat-sensitive recording medium 失效
    可逆热敏记录介质

    公开(公告)号:US5965484A

    公开(公告)日:1999-10-12

    申请号:US38129

    申请日:1998-03-11

    IPC分类号: B41M5/36 B41M5/40

    CPC分类号: B41M5/363

    摘要: A reversible heat-sensitive recording medium comprising a support; a heat-sensitive layer formed on top of the support, which layer comprises a resin matrix and a low molecular weight organic compound dispersed in said matrix, and a transparency of which is reversibly changeable depending on the temperature, in which a conductive powder is contained in at least a part of the support and heat-sensitive layer, which medium has a low-surface resistivity and excellent anti-static properties.

    摘要翻译: 一种可逆热敏记录介质,其包含支撑体; 形成在支撑体顶部的热敏层,该层包含分散在所述基质中的树脂基质和低分子量有机化合物,其透明度根据其中含有导电粉末的温度可逆地改变 在支撑和热敏层的至少一部分中,该介质具有低表面电阻率和优异的抗静电性能。

    Magnetic recording medium having a magnetic layer formed from an
aromatic polycarbonate polyurethane resin
    9.
    发明授权
    Magnetic recording medium having a magnetic layer formed from an aromatic polycarbonate polyurethane resin 失效
    具有由芳族聚碳酸酯聚氨酯树脂形成的磁性层的磁记录介质

    公开(公告)号:US5219663A

    公开(公告)日:1993-06-15

    申请号:US710397

    申请日:1991-06-05

    IPC分类号: C08G18/44 C08G18/66 G11B5/702

    摘要: A polycarbonate polyol having a main chain of the formula: ##STR1## wherein R is an aliphatic or alicyclic hydrocarbon group having 4 to 10 carbon atoms, and n is a number of 2.00 to 20.00, and having an aliphatic OH group at the terminal; an aromatic polycarbonate polyurethane resin prepared from the polycarbonate polyol as set forth above and a polyisocyanate compound having two or more isocyanate groups in the molecule and optionally other components, particularly a chain extender having a polar group; a coating agent comprising the polycarbonate polyol and/or aromatic polycarbonate polyurethane resin as set forth above and optionally a polyisocyanate compound as set forth above and a solvent; a cast film comprising a coating film formed from the polycarbonate polyol and/or aromatic polycarbonate polyurethane resin as set forth above and a base film; and a magnetic recording medium comprising a magnetic layer formed from the aromatic polycarbonate polyurethane resin as set forth above and optionally the polyisocyanate compound as set forth above, and a base film.

    摘要翻译: 具有下式主链的聚碳酸酯多元醇:其中R是碳原子数为4〜10的脂肪族或脂环族烃基,n为2.00〜20.00,末端具有脂肪族OH基; 由上述聚碳酸酯多元醇制备的芳族聚碳酸酯聚氨酯树脂和分子中具有两个或多个异氰酸酯基团的任选的其它组分的多异氰酸酯化合物,特别是具有极性基团的扩链剂; 包含如上所述的聚碳酸酯多元醇和/或芳族聚碳酸酯聚氨酯树脂和任选的上述多异氰酸酯化合物和溶剂的涂层剂; 包括由上述聚碳酸酯多元醇和/或芳族聚碳酸酯聚氨酯树脂形成的涂膜和基膜的流延膜; 以及包含由上述芳族聚碳酸酯聚氨酯树脂形成的磁性层和任选的如上所述的多异氰酸酯化合物和基膜的磁记录介质。

    Polycarbonate polyol, aromatic polycarbonate polyurethane resin, coating
agent, cast film, magnetic recording medium
    10.
    发明授权
    Polycarbonate polyol, aromatic polycarbonate polyurethane resin, coating agent, cast film, magnetic recording medium 失效
    聚碳酸酯多元醇,芳香族聚碳酸酯聚氨酯树脂,涂布剂,流延膜,磁记录介质

    公开(公告)号:US5045622A

    公开(公告)日:1991-09-03

    申请号:US368607

    申请日:1989-06-20

    摘要: A polycarbonate polyol having a main chain of the formula: ##STR1## wherein R is an aliphatic or alicyclic hydrcarbon group having 4 to 10 carbon atoms, and n is a number of 2.00 to 20.00, and having an aliphatic OH group at the terminal; an aromatic polycarbonate polyurethane resin prepared from the polycarbonate polyol as set forth above and a polyisocyanate compound having two or more isocyanate groups in the molecule and optionally other components, particularly a chain extender having a polar group; a coating agent comprising the polycarbonate polyol and/or aromatic polycarbonate polyurethane resin as set forth above and optionally a polyisocyanate compound as set forth above and a solvent; a cast film comprising a coating film formed from the polycarbonate polyol and/or aromatic polycarbonate polyurethane resin as set forth above and a base film; and a magnetic recording medium compriisng a magnetic layer formed from the aromatic polycarbonate polyurethane resin as set forth above and optionally the polyisocyanate compound as set forth above, and a base film.

    摘要翻译: 具有下式主链的聚碳酸酯多元醇:其中R是碳原子数为4〜10的脂肪族或脂环族烃基,n为2.00〜20.00,末端具有脂肪族OH基; 由上述聚碳酸酯多元醇制备的芳族聚碳酸酯聚氨酯树脂和分子中具有两个或多个异氰酸酯基团的任选的其它组分的多异氰酸酯化合物,特别是具有极性基团的扩链剂; 包含如上所述的聚碳酸酯多元醇和/或芳族聚碳酸酯聚氨酯树脂和任选的上述多异氰酸酯化合物和溶剂的涂层剂; 包括由上述聚碳酸酯多元醇和/或芳族聚碳酸酯聚氨酯树脂形成的涂膜和基膜的流延膜; 以及由上述芳族聚碳酸酯聚氨酯树脂形成的磁性层和任选的上述多异氰酸酯化合物和基膜的磁记录介质。