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公开(公告)号：US20120129329A1
公开(公告)日：2012-05-24
申请号：US13362049
申请日：2012-01-31
IPC分类号： H01L21/28
CPC分类号： H01L27/127 , H01L21/32136 , H01L21/67207 , H01L27/12 , H01L27/1214 , H01L29/42384 , H01L29/4908 , H01L29/78621 , H01L29/78627 , H01L29/78645 , H01L2029/7863
摘要： The present invention is provided in order to remove contamination due to contaminant impurities of the interfaces of each film which forms a TFT, which is the major factor that reduces the reliability of TFTs. By connecting a washing chamber and a film formation chamber, film formation can be carried out without exposing TFTs to the air during the time from washing step to the film formation step and it becomes possible to maintain the cleanliness of the interfaces of each film which form the TFT.
摘要翻译： 提供本发明是为了消除由于形成TFT的每个膜的界面的污染物杂质引起的污染，这是降低TFT的可靠性的主要因素。 通过连接洗涤室和成膜室，可以在从洗涤步骤到成膜步骤的时间内不将TFT暴露于空气中进行成膜，并且可以保持形成的每个膜的界面的清洁度 TFT。
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公开(公告)号：US20110315969A1
公开(公告)日：2011-12-29
申请号：US13225586
申请日：2011-09-06
IPC分类号： H01L27/32
CPC分类号： H01L27/3258 , H01L21/7684 , H01L21/76841 , H01L27/12 , H01L27/1214 , H01L27/1248 , H01L27/1251 , H01L27/1255 , H01L27/3244 , H01L27/3246 , H01L27/3248 , H01L33/0041 , H01L51/5221 , H01L51/5253 , H01L2227/323 , H01L2924/0002 , H01L2924/00
摘要： In the case where a material containing an alkaline-earth metal in a cathode, is used, there is a fear of the diffusion of an impurity ion (such as alkaline-earth metal ion) from the EL element to the TFT being generated and causing the variation of characteristics of the TFT. Therefore, as the insulating film provided between TFT and EL element, a film containing a material for not only blocking the diffusion of an impurity ion such as an alkaline-earth metal ion but also aggressively absorbing an impurity ion such as an alkaline-earth metal ion is used.
摘要翻译： 在使用阴极中含有碱土类金属的材料的情况下，担心从EL元件向所产生的TFT扩散杂质离子（如碱土类金属离子）扩散至产生的TFT TFT的特性变化。 因此，作为设置在TFT和EL元件之间的绝缘膜，含有不仅阻挡诸如碱土金属离子等杂质离子扩散的材料的膜，而且还积极地吸收杂质离子如碱土金属 离子。
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