-
1.发明申请Cvd apparatus having means for cleaning with fluorine gas and method of cleaning cvd apparatus with fluorine gas 审中-公开具有用氟气清洗的装置的Cvd装置以及用氟气清洗cvd装置的方法公开(公告)号：US20050252451A1
公开(公告)日：2005-11-17
申请号：US10490217
申请日：2003-03-13
申请人： Tatsuro Beppu , Katsuo Sakai , Seiji Okura , Masaji Sakamura , Kaoru Abe , Hitoshi Murata , Etsuo Wani , Kenji Kameda , Yuki Mitsui , Yutaka Ohira , Taisuke Yonemura , Akira Sekiya
发明人： Tatsuro Beppu , Katsuo Sakai , Seiji Okura , Masaji Sakamura , Kaoru Abe , Hitoshi Murata , Etsuo Wani , Kenji Kameda , Yuki Mitsui , Yutaka Ohira , Taisuke Yonemura , Akira Sekiya
CPC分类号： B08B7/0035 , C23C16/4405 , H01J37/32357 , H01J37/32862 , Y02C20/30 , Y02P70/605
摘要： It is an object to provide a cleaning method in a CVD apparatus capable of efficiently removing a by-product such as SiO2 or Si3N4 which is adhered to and deposited on the surfaces of an inner wall, an electrode and the like in a reaction chamber at a film forming step. Furthermore, it is an object to provide a cleaning method in which the amount of a cleaning gas to be discharged is very small, an influence on an environment such as global warming is also lessened and a cost can also be reduced. An energy is applied to a fluorine compound to react the fluorine compound, thereby generating a fluorine gas component and a component other than the fluorine gas component. Furthermore, the fluorine gas component and the component other than the fluorine gas component which are generated are separated from each other so that the fluorine gas component is separated and refined. After a film forming process for a base material is carried out by a CVD apparatus, a separated and refined fluorine gas is then converted to a plasma to remove a by-product adhered into the reaction chamber.
摘要翻译： 本发明的目的是提供一种能够有效地除去SiO 2或Si 3 N 4 N 2的副产物的CVD装置中的清洗方法。 >，其在膜形成步骤中在反应室中粘附并沉积在内壁，电极等的表面上。 此外，其目的在于提供一种清理方法，其中排出的清洁气体的量非常小，对全球变暖等环境的影响也减少，成本也降低。 向氟化合物施加能量以使氟化合物反应，从而产生氟气成分和氟气成分以外的成分。 此外，氟气成分和除了产生的氟气成分以外的成分彼此分离，使氟气成分分离精制。 在通过CVD装置进行基材的成膜处理之后，将分离精制的氟气转化为等离子体，除去附着在反应室中的副产物。
-
公开(公告)号：US08277560B2
公开(公告)日：2012-10-02
申请号：US10492539
申请日：2003-03-19
申请人： Katsuo Sakai , Seiji Okura , Masaji Sakamura , Kaoru Abe , Hitoshi Murata , Etsuo Wani , Kenji Kameda , Yuki Mitsui , Yutaka Ohira , Taisuke Yonemura , Akira Sekiya
发明人： Katsuo Sakai , Seiji Okura , Masaji Sakamura , Kaoru Abe , Hitoshi Murata , Etsuo Wani , Kenji Kameda , Yuki Mitsui , Yutaka Ohira , Taisuke Yonemura , Akira Sekiya
CPC分类号： C23C16/45593 , C23C16/4405 , C23C16/4412 , H01L21/02046 , Y02C20/30 , Y02P70/605
摘要： A CVD apparatus cleaning method that efficiently removes by-product such as SiO2 or Si3N4 adhered to and deposited on surfaces of an inner wall, an electrode, and the like in a reaction chamber at a film forming step. In the cleaning method the discharged cleaning gas amount is very small, environmental influences such as global warming can be lessened, and cost can be reduced. A CVD apparatus supplying reactive gas into a reaction chamber and forming a deposited film on a surface of a base material provided in the reaction chamber includes an exhaust gas recycling path recycling an exhaust gas reaching the reaction chamber from downstream of a pump on an exhaust path for exhausting a gas from an inner part of the reaction chamber through the pump.
摘要翻译： 一种CVD装置清洗方法，其在成膜步骤中有效地除去在反应室内附着和沉积在内壁，电极等的表面上的副产物如SiO 2或Si 3 N 4。 在清洁方法中，排出的清洁气体量非常小，可以减少诸如全球变暖的环境影响，并且可以降低成本。 将反应气体供应到反应室中并在设置在反应室中的基材的表面上形成沉积膜的CVD装置包括排气回收路径，从排气路径上的泵下游到达反应室的废气再循环 用于从反应室的内部通过泵排出气体。
-
公开(公告)号：US20060207630A1
公开(公告)日：2006-09-21
申请号：US10548874
申请日：2004-03-12
申请人： Katsuo Sakai , Kaoru Abe , Seiji Okura , Masaji Sakamura , Hitoshi Murata , Kenji Kameda , Etsuo Wani , Akira Sekiya
发明人： Katsuo Sakai , Kaoru Abe , Seiji Okura , Masaji Sakamura , Hitoshi Murata , Kenji Kameda , Etsuo Wani , Akira Sekiya
CPC分类号： C23C16/52 , C23C16/4405
摘要： An apparatus for cleaning a CVD apparatus that can efficiently remove a by-product such as SiO2 or Si3N4 stuck and deposited onto the surface of an internal wall, an electrode, or the like in a reaction chamber in a film forming process, and a method for cleaning a CVD apparatus. A control monitors luminous intensity data of an F radical in a reaction chamber by optical emission spectroscopy and compares the data with calibrated prestored luminous intensity data, and ends cleaning after a predetermined time passes from reaching a luminous intensity saturation point. Furthermore, concentration data of SiF4 in a gas discharged from the reaction chamber are monitored by a Fourier transform infrared spectrometry and compared with prestored concentration data of SiF4 to decide that the predetermined time has passed when a predetermined cleaning end point concentration is reached, thereby ending the cleaning.
摘要翻译： 一种用于清洁可以有效地除去诸如SiO 2或Si 3 N 4 N 3的副产物的CVD装置的装置，其被粘附并沉积到 在成膜工艺中的反应室中的内壁，电极等的表面，以及CVD装置的清洗方法。 控制器通过光发射光谱监测反应室中F自由基的发光强度数据，并将该数据与校准的预存的发光强度数据进行比较，并且在经过预定时间从达到发光强度饱和点之后结束清洁。 此外，通过傅里叶变换红外光谱法监测从反应室排出的气体中SiF 4的浓度数据，并与SiF 4的预先存储的浓度数据进行比较，以确定 当达到预定的清洁终点浓度时已经过了预定的时间，从而结束清洁。
-
公开(公告)号：US08043438B2
公开(公告)日：2011-10-25
申请号：US10548874
申请日：2004-03-12
申请人： Katsuo Sakai , Kaoru Abe , Seiji Okura , Masaji Sakamura , Hitoshi Murata , Kenji Kameda , Etsuo Wani , Akira Sekiya
发明人： Katsuo Sakai , Kaoru Abe , Seiji Okura , Masaji Sakamura , Hitoshi Murata , Kenji Kameda , Etsuo Wani , Akira Sekiya
IPC分类号： B08B9/00
CPC分类号： C23C16/52 , C23C16/4405
摘要： An apparatus for cleaning a CVD apparatus that can efficiently remove a by-product such as SiO2 or Si3N4 stuck and deposited onto the surface of an internal wall, an electrode, or the like in a reaction chamber in a film forming process, and a method for cleaning a CVD apparatus. A control monitors luminous intensity data of an F radical in a reaction chamber by optical emission spectroscopy and compares the data with calibrated prestored luminous intensity data, and ends cleaning after a predetermined time passes from reaching a luminous intensity saturation point. Furthermore, concentration data of SiF4 in a gas discharged from the reaction chamber are monitored by a Fourier transform infrared spectrometry and compared with prestored concentration data of SiF4 to decide that the predetermined time has passed when a predetermined cleaning end point concentration is reached, thereby ending the cleaning.
摘要翻译： 一种用于清洁CVD装置的装置，其可以有效地除去在成膜过程中在反应室中粘附并沉积到反应室内的表面上的诸如SiO 2或Si 3 N 4的副产物，以及方法 用于清洁CVD装置。 控制器通过光发射光谱监测反应室中F自由基的发光强度数据，并将该数据与校准的预存的发光强度数据进行比较，并且在经过预定时间从达到发光强度饱和点之后结束清洁。 此外，通过傅里叶变换红外光谱法监测从反应室排出的气体中SiF 4的浓度数据，并与SiF 4的预先存储的浓度数据进行比较，以确定在达到预定清洗终点浓度时经过了预定时间，从而结束 清洁。
-
公开(公告)号：US20060201533A1
公开(公告)日：2006-09-14
申请号：US10548873
申请日：2004-03-12
申请人： Etsuo Wani , Katsuo Sakai , Seiji Okura , Masaji Sakamura , Kaoru Abe , Hitoshi Murata , Kenji Kameda
发明人： Etsuo Wani , Katsuo Sakai , Seiji Okura , Masaji Sakamura , Kaoru Abe , Hitoshi Murata , Kenji Kameda
CPC分类号： H01J37/32862 , C23C16/4405 , H01J37/32082
摘要： There is provided a CVD apparatus capable of efficiently removing a by-product such as SiO2 or Si3N4 which is stuck and deposited onto the surface of an internal wall, an electrode or the like in a CVD chamber in a film forming process, and furthermore, executing cleaning having a small damage over an upper electrode and a counter electrode stage (a lower electrode) and manufacturing a thin film of high quality, and a CVD apparatus cleaning method using the same. In a CVD apparatus cleaning method of introducing a cleaning gas to carry out plasma cleaning over an inside of a CVD chamber after forming a deposited film on a surface of a substrate, a frequency of an RF to be applied to an RF electrode is switched into a first frequency to be applied for forming a film and a second frequency to be applied when executing the plasma cleaning.
摘要翻译： 提供了一种CVD装置，其能够有效地除去被粘附并沉积到其上的副产物如SiO 2或Si 3 N 4 N 4 在成膜工艺中在CVD室中的内壁，电极等的表面，此外，执行在上电极和对电极台（下电极）上具有小损伤的清洁并制造薄膜 的高质量的CVD装置清洗方法。 在CVD基板的表面形成沉积膜之后，在CVD装置的清洗方法中，在CVD室内引入清洗气体进行等离子体清洗，将施加到RF电极的RF的频率切换成 用于形成膜的第一频率和在执行等离子体清洗时要施加的第二频率。
-
公开(公告)号：US07236720B2
公开(公告)日：2007-06-26
申请号：US11011193
申请日：2004-12-15
IPC分类号： G03G21/18
CPC分类号： G03G15/75 , G03G15/0803
摘要： An image forming apparatus is disclosed that is able to improve transfer efficiency and image quality. The image forming apparatus includes an organic photo-conductor with latent images formed thereon, and a developing unit for developing the latent images. The organic photo-conductor has surface friction coefficient less than or equal to 0.3. The developing unit develops the latent images while transporting a two-composition developing agent including a toner T and a carrier C by a traveling wave electric field.
摘要翻译： 公开了能够提高转印效率和图像质量的图像形成装置。 图像形成装置包括其上形成有潜像的有机光导体和用于显影潜像的显影单元。 有机光导体的表面摩擦系数小于或等于0.3。 显影单元在通过行波电场传送包括调色剂T和载体C的双组分显影剂的同时显影潜像。
-
公开(公告)号：US07187892B2
公开(公告)日：2007-03-06
申请号：US10863294
申请日：2004-06-09
IPC分类号： G03G15/08
CPC分类号： G03G15/0818
摘要： An image-forming device that is capable of minimizing toner charge deficiency while feeding an adequate amount of toner to an electrostatic toner transport substrate for transporting toner by an EH effect, having a first storage chamber for storing a mixture of toner and a friction-promoting substance; a second storage chamber; a first transport screw for stirring the mixture in the containers; a second transport screw; and a mesh provided to the first storage chamber; wherein a toner feeding unit is provided for sifting the toner in the mixture in the first storage chamber through the mesh and feeding the toner to a first electrostatic toner transport substrate (not pictured). A potential difference generator is also provided for creating an electrical potential difference between the first transport screw and the mesh, and between the mesh and the first electrostatic toner transport substrate.
摘要翻译： 一种图像形成装置，其能够在向用于通过EH效果输送调色剂的静电调色剂输送基板供给足够量的调色剂的同时最小化调色剂电荷不足，具有用于储存调色剂和摩擦促进剂的混合物的第一储存室 物质; 第二储存室; 用于搅拌容器中的混合物的第一输送螺杆; 第二个运输螺丝; 以及设置到所述第一储存室的网; 其中提供调色剂供给单元，用于通过所述筛子筛选所述第一储存室中的混合物中的调色剂并将调色剂供给到第一静电调色剂输送基材（未示出）。 还提供电位差发生器用于在第一输送螺杆和网之间以及网和第一静电调色剂输送基板之间产生电位差。
-
公开(公告)号：US20060251449A1
公开(公告)日：2006-11-09
申请号：US11376434
申请日：2006-03-16
IPC分类号： G03G15/08
CPC分类号： G03G15/065 , G03G15/0803 , G03G2215/0653
摘要： An image forming apparatus having a developing apparatus using a development system in which toner is moved by means of a traveling wave electric field. The image forming apparatus comprises a plurality of developing apparatuses having toner conveyance members which convey toner by means of a phase-shift electric field created by voltages of n phases applied to a plurality of electrodes, to a region opposing an image carrier on which an electrostatic latent image is formed; and a voltage application device which applies a voltage having an average potential value between the potential of the image portions of the latent image on the image carrier and the non-image portions of same, to the electrodes of the toner conveyance members of the respective developing apparatuses.
摘要翻译： 一种图像形成装置，具有使用其中通过行波电场移动调色剂的显影系统的显影装置。 图像形成装置包括多个显影装置，其具有调色剂传送部件，其通过由施加到多个电极的n相的电压产生的相移电场将调色剂输送到与静电图像载体相对的区域 形成潜像; 以及电压施加装置，其将具有在图像载体上的潜像的图像部分的电位与其非图像部分之间的平均电位值的电压施加到各个显影剂的调色剂传送构件的电极 设备。
-
公开(公告)号：US06597887B2
公开(公告)日：2003-07-22
申请号：US09995596
申请日：2001-11-29
申请人： Katsuo Sakai , Shunuchi Abe , Yuichi Aoyama
发明人： Katsuo Sakai , Shunuchi Abe , Yuichi Aoyama
IPC分类号： G03G1516
CPC分类号： G03G15/238 , G03G2215/0119 , G03G2215/0626
摘要： In a duplex image transferring device of the present invention, a first bicolor toner image formed by a developing liquid is transferred to one side of a sheet. This toner image on the sheet includes a carrier liquid layer containing a liquid carrier of an amount not great enough to serve as an electrophoresis medium for a toner layer deposited on the sheet, but sufficient to serve as a parting agent for the toner layer and an intermediate image transfer belt contacting the toner image. Subsequently, a bicolor toner image of the same polarity as the toner layer is transferred to the other side of the sheet. It is possible to transfer the toner images to both sides of the sheet without switching back the one-sided sheet, without using two kinds of toner each being chargeable to particular polarity or without charging one toner image to the opposite polarity with a corona charger.
摘要翻译： 在本发明的双面图像转印装置中，由显影液形成的第一双色调色剂图像被转印到片材的一侧。 片上的这种调色剂图像包括载体液体层，其载体量不足以用作沉积在片材上的调色剂层的电泳介质，但足以用作调色剂层的脱模剂，和 中间图像转印带与调色剂图像接触。 随后，将与调色剂层相同极性的双色调色剂图像转印到片材的另一侧。 可以将调色剂图像转印到纸张的两面而不将背面片材倒转，而不使用两种可以充电到特定极性的调色剂，或者不用电晕充电器将一个调色剂图像充电到相反的极性。
-
10.发明授权公开(公告)号：US06597884B2
公开(公告)日：2003-07-22
申请号：US09948576
申请日：2001-09-10
申请人： Yohichiroh Miyaguchi , Takeshi Takemoto , Hiroyuki Okamoto , Chikara Imai , Katsuo Sakai , Nobuaki Kondou , Tsukuru Kai , Makoto Obu
发明人： Yohichiroh Miyaguchi , Takeshi Takemoto , Hiroyuki Okamoto , Chikara Imai , Katsuo Sakai , Nobuaki Kondou , Tsukuru Kai , Makoto Obu
IPC分类号： G03G1508
CPC分类号： G03G15/08 , G03G2215/0619 , G03G2215/0641
摘要： An electrophotographic image forming apparatus of the present invention deposits charged toner on a latent image formed on a photoconductive drum or similar image carrier to thereby produce a corresponding toner image. The apparatus includes a toner flying device for electrostatically conveying the toner along the conveying surface of a conveyance board to one end of the conveyance board. The toner is caused to fly toward the image carrier from the end of the conveyance board.
摘要翻译： 本发明的电子照相图像形成装置将电荷调色剂沉积在形成在感光鼓或类似图像载体上的潜像上，从而产生相应的调色剂图像。 该装置包括用于将调色剂沿输送板的输送面静电输送到输送板的一端的调色剂飞行装置。 使调色剂从输送板的端部朝向图像载体飞行。
-
-
-
-
-
-
-
-
-
搜索结果
49 条记录 (耗时 0.052 秒)
