公开(公告)号：US20130107269A1

公开(公告)日：2013-05-02

申请号：US13581767

申请日：2011-03-17

Applicant: Tatsutoshi Shioda

Inventor： Tatsutoshi Shioda

IPC: G01J3/45

CPC classification number: G01J3/45 ,  G01B9/02083 ,  G01B9/0209 ,  G01J3/4535 ,  G01N21/17

Abstract: Every depth of the measurement object measures energy structural information, refractive index, transmittance, reflectance other than property information of (as for the resolution several microns), e.g., space information at the same time. A spectrum measurement device receives a reference wave propagating in a reference path and a measurement wave propagating in a measurement path having a start point same as a start point of the reference path, and derives a spectrum of the measurement wave. The space information of the measuring object, energy structural information, refractive index, transmittance, a reflective index using spectrum measurement device are derived.

Abstract translation: 测量对象的每个深度测量能量结构信息，折射率，透射率，反射率，而不是属性信息（如分辨率几微米），例如空间信息在同一时间。 频谱测量装置接收在参考路径中传播的参考波和在具有与参考路径的起始点相同的起始点的测量路径中传播的测量波，并且导出测量波的频谱。 导出测量对象的空间信息，能量结构信息，折射率，透射率，使用光谱测量装置的反射指数。

公开(公告)号：US20120206730A1

公开(公告)日：2012-08-16

申请号：US13262389

申请日：2010-03-30

Applicant: Tatsutoshi Shioda

Inventor： Tatsutoshi Shioda

IPC: G01B9/02

CPC classification number: G01B9/0209

Abstract: The light from the light source of the wideband light is reflected by VIPA so that reflection distance varies step by step. In VIPA, the light that phase changed is generated depending on the depth of the step. A interference profile is measured by this reflected light and optical path length modulator by synthetic light with the generated optical frequency comb. The interferometer does not have a movable scanning mechanism, and the operation of the Fourier transform is unnecessary. Thus, it has the measurement of the short time. The measurement of the coaxial tomography and the one-dimensional coaxial tomography of the depth direction is possible. The measurement of the two-dimensional coaxial tomography of the depth direction is possible.

Abstract translation: 来自宽带光源的光源的光被VIPA反射，使反射距离逐步变化。 在VIPA中，根据步长的深度产生相位改变的光。 通过所产生的光频梳的合成光由该反射光和光路长度调制器测量干涉分布。 干涉仪不具有可动扫描机构，并且傅里叶变换的操作是不必要的。 因此，它具有短时间的测量。 同轴断层扫描和深度方向的一维同轴断层扫描的测量是可能的。 深度方向的二维同轴断层扫描的测量是可能的。

公开(公告)号：US20130342849A1

公开(公告)日：2013-12-26

申请号：US13820045

申请日：2011-08-30

Applicant: Tatsutoshi Shioda

Inventor： Tatsutoshi Shioda

IPC: G01B11/24

CPC classification number: G01B11/2441 ,  G01B9/02008 ,  G01B9/02027 ,  G01B9/0209 ,  G01B2290/25 ,  G01N21/958

Abstract: The shape measurement device 1 comprises a light source 11, a measuring beam illumination system 13, a reference comb light separator 14, an optical multiplexer 15 and photodetector 16. The reference comb light separator 14 enters with a broadband light, and it separates in a reference comb light with broadband light. The frequency interval of the reference comb light changes continually depending on a size of Y-coordinate level in the image formation point, when the emission direction is assumed Z-axis direction. X-axis means a virtual cutout line for the measuring object, and Y-coordinate means depth for measuring. The interference image emerging in the detective surface is a tomogram for the measurement substantially. Using the reference comb light, the two-dimensional dislocation of depth direction is measured, wherein the dynamic range is extremely wide. When an emission direction is assumed Z-axis direction, a frequency interval of a reference comb light changes depending on size of Y-coordinate level in image formation point continually.

Abstract translation: 形状测量装置1包括光源11，测量光束照明系统13，参考梳光分离器14，光复用器15和光电检测器16.参考梳光分离器14进入宽带光，并且其分离成 参考梳光带宽带灯。 当发射方向为Z轴方向时，参考梳光的频率间隔根据图像形成点中的Y坐标水平的大小而连续变化。 X轴表示测量对象的虚拟切口线，Y坐标表示测量深度。 检测表面中出现的干涉图像是用于测量的断层图像。 使用参考梳光，测量深度方向的二维位错，其中动态范围非常宽。 当发射方向被假设为Z轴方向时，参考梳光的频率间隔将连续地根据图像形成点中的Y坐标水平的大小而变化。

公开(公告)号：US20120232818A1

公开(公告)日：2012-09-13

申请号：US13262107

申请日：2010-03-29

Applicant: Tatsutoshi Shioda

Inventor： Tatsutoshi Shioda

IPC: G06F19/00

CPC classification number: H03D13/00

Abstract: It detects the relative phase of two measured signals using two reference signals. The relative phase detector 1 comprises reference signal generator 11, beat signal processor 12 and detecting element 13. As for reference signal generator 11, a frequency interval generates two reference signals which are the same as the frequency interval of the measured signal of two above. The beat signal processor 12 generates two beat signals from the reference signal of two measured signals and two above, and generation does the multiplication signal of these two beat signals. It removes constant decided by detection system from the DC component of the multiplication signal, and detecting element 13 detects the relative phase of two measured signals.

Abstract translation: 它使用两个参考信号来检测两个测量信号的相对相位。 相对相位检测器1包括参考信号发生器11，拍频信号处理器12和检测元件13.对于参考信号发生器11，频率间隔产生与上述两个测量信号的频率间隔相同的两个参考信号。 节拍信号处理器12根据两个测量信号和上述两个测量信号的参考信号产生两个拍频信号，并产生这两个拍频信号的相乘信号。 它从乘法信号的直流分量中去除由检测系统决定的常数，检测元件13检测两个测量信号的相对相位。