METHOD AND APPARATUS FOR IN-LINE QUALITY CONTROL OF WAFERS
    3.
    发明申请
    METHOD AND APPARATUS FOR IN-LINE QUALITY CONTROL OF WAFERS 失效
    用于在线质量控制的方法和装置

    公开(公告)号:US20100138027A1

    公开(公告)日:2010-06-03

    申请号:US12449948

    申请日:2008-03-08

    申请人: Sergei Ostapenko

    发明人: Sergei Ostapenko

    IPC分类号: G01N29/00 G06F19/00

    摘要: A method and apparatus for in-line mechanical quality control of wafers, the method allows for fast detection of cracks including the determination of their size and position on a wafer. The method comprises steps of coupling the wafer and an actuator and exciting a superposition of ultrasonic vibrations in the wafer by sweeping the frequency of the actuator simultaneously around at least two predetermined resonance peaks, recording the resonance frequency, amplitude and bandwidth of resonant frequency curves and comparing that with the resonance frequency, amplitude and bandwidth of reference frequency curves recorded for a mechanically sound crack-free standard wafer. Based on the comparison a reject-accept command is generated using a statistical rejection algorithm.

    摘要翻译: 一种用于晶片的在线机械质量控制的方法和装置,该方法允许快速检测裂纹,包括其在晶片上的尺寸和位置的确定。 该方法包括以下步骤:通过在至少两个预定的谐振峰值周围同时扫描致动器的频率,记录共振频率曲线的谐振频率,振幅和带宽,并且使谐振频率曲线的共振频率,幅度和带宽同时地将晶片和致动器耦合并激发超声振动的叠加, 将其与针对机械无声无裂纹标准晶片记录的参考频率曲线的共振频率,幅度和带宽进行比较。 基于比较,使用统计拒绝算法生成reject-accept命令。

    Method and apparatus for detecting cracks and delamination in composite materials

    公开(公告)号:US09933394B2

    公开(公告)日:2018-04-03

    申请号:US13843042

    申请日:2013-03-15

    申请人: Sergei Ostapenko

    发明人: Sergei Ostapenko

    摘要: A method is disclosed for testing for delamination of a first composite component from a second composite component a composite material. The method comprises coupling a broad-band actuator to the composite material and connecting sweeping frequencies to the broad-band actuator for vibrating the composite material. An acoustic sensor is coupled to the composite material for measuring a resonant frequency curve of the vibrating composite material. The measured resonant frequency curve of the vibrating composite material is compared with a reference resonant frequency curve. A delaminated composite material produces a change in the measured resonant frequency curve relative to the reference resonant frequency curve. The method is suitable for detecting delamination in fuel cells as well as ceramic body armor.

    Method of detecting and monitoring stresses in a semiconductor wafer

    公开(公告)号:US06413789B1

    公开(公告)日:2002-07-02

    申请号:US09767980

    申请日:2001-01-23

    申请人: Sergei Ostapenko

    发明人: Sergei Ostapenko

    IPC分类号: H01L2166

    摘要: A method of detecting and monitoring elastic strains in a semiconductor wafer (12) comprising the steps of coupling the wafer (12) to a transducer (10) having a periphery (11). This is followed by operating the transducer (10) to produce ultrasonic vibrations at a predetermined wavelength &lgr; and propagating a standing wave through the wafer (12) in response to the ultrasonic vibrations. The method is characterized by extending the wafer (12) in a cantilevered section L from the periphery (11) of the transducer (10) to a distal end (13), and measuring the amplitude of the standing wave &lgr; in the cantilevered section L. For maximum efficiency, the cantilevered section L is substantially one quarter of the predetermined wavelength (&lgr;/4).

    Method and apparatus for in-line quality control of wafers
    6.
    发明授权
    Method and apparatus for in-line quality control of wafers 失效
    硅片在线质量控制的方法和装置

    公开(公告)号:US08528407B2

    公开(公告)日:2013-09-10

    申请号:US12449948

    申请日:2008-03-08

    申请人: Sergei Ostapenko

    发明人: Sergei Ostapenko

    IPC分类号: G01N29/00 G01N29/04 G01M7/00

    摘要: An apparatus and a method are disclosed for testing the quality of a wafer. The apparatus and a method comprise coupling a broad-band actuator to the wafer. Sweeping frequencies are connected to the broad-band actuator for vibrating the wafer. An acoustic sensor is coupled to the wafer for measuring a resonant frequency of the vibrating wafer. The measured resonant frequency of the vibrating wafer is compared with a reference resonant frequency to deterring the quality of the wafer.

    摘要翻译: 公开了一种用于测试晶片质量的装置和方法。 该装置和方法包括将宽带致动器耦合到晶片。 扫频频率连接到宽带致动器以振动晶片。 声学传感器耦合到晶片以测量振动晶片的谐振频率。 将测得的振荡晶片的谐振频率与参考谐振频率进行比较以阻止晶片的质量。

    METHOD AND APPARATUS FOR DETECTING CRACKS AND DELAMINATION IN COMPOSITE MATERIALS
    7.
    发明申请
    METHOD AND APPARATUS FOR DETECTING CRACKS AND DELAMINATION IN COMPOSITE MATERIALS 审中-公开
    用于检测复合材料中的裂纹和分层的方法和装置

    公开(公告)号:US20130213137A1

    公开(公告)日:2013-08-22

    申请号:US13843042

    申请日:2013-03-15

    申请人: Sergei Ostapenko

    发明人: Sergei Ostapenko

    IPC分类号: G01N29/12

    摘要: A method is disclosed for testing for delamination of a first composite component from a second composite component a composite material. The method comprises coupling a broad-band actuator to the composite material and connecting sweeping frequencies to the broad-band actuator for vibrating the composite material. An acoustic sensor is coupled to the composite material for measuring a resonant frequency curve of the vibrating composite material. The measured resonant frequency curve of the vibrating composite material is compared with a reference resonant frequency curve. A delaminated composite material produces a change in the measured resonant frequency curve relative to the reference resonant frequency curve. The method is suitable for detecting delamination in fuel cells as well as ceramic body armor.

    摘要翻译: 公开了一种用于测试第一复合部件从第二复合部件分层复合材料的方法。 该方法包括将宽带致动器耦合到复合材料并将扫频频率连接到宽带致动器以振动复合材料。 声传感器耦合到复合材料,用于测量振动复合材料的共振频率曲线。 将振动复合材料的测量谐振频率曲线与参考谐振频率曲线进行比较。 分层复合材料相对于参考共振频率曲线产生测量的谐振频率曲线的变化。 该方法适用于检测燃料电池以及陶瓷装甲的分层。