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1.发明授权公开(公告)号：US10145743B2
公开(公告)日：2018-12-04
申请号：US14773359
申请日：2014-03-04
发明人： Andrey Timofeev , Juha Hassel , Arttu Luukanen , Panu Helistö , Leif Grönberg
摘要： A superconducting thermal detector (bolometer) of THz (sub-millimeter) wave radiation based on sensing the change in the amplitude or phase of a resonator circuit, consisting of a capacitor (Csh) and a superconducting temperature dependent inductor where the said inductor is thermally isolated from the heat bath (chip substrate) by micro-suspensions. The bolometer design includes a thin film inductor located on the membrane, a single or/and multi-layered thin film capacitor, and a thin film absorber of incoming radiation. The bolometer design can also include a lithographic antenna with antenna termination and/or a back reflector beneath the membrane for optimal wavelength detection by the resonance circuit. The superconducting thermal detector (bolometer) and arrays of these detectors operate in a temperature range from 1 Kelvin to 10 Kelvin.
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2.发明申请Superconducting thermal detector (bolometer) of terahertz (sub-millimeter wave) radiation 审中-公开太赫兹（亚毫米波）辐射超导热探测器（辐射热计）公开(公告)号：US20160018267A1
公开(公告)日：2016-01-21
申请号：US14773359
申请日：2014-03-04
发明人： Andrey Timofeev , Juha Hassel , Arttu Luukanen , Panu Helistö , Leif Grönberg
CPC分类号： G01J5/20 , G01J5/024 , G01J2005/106 , G01J2005/208 , H01L37/00
摘要： A superconducting thermal detector (bolometer) of THz (sub-millimeter) wave radiation based on sensing the change in the amplitude or phase of a resonator circuit, consisting of a capacitor (Csh) and a superconducting temperature dependent inductor where the said inductor is thermally isolated from the heat bath (chip substrate) by micro-suspensions. The bolometer design includes a thin film inductor located on the membrane, a single or/and multi-layered thin film capacitor, and a thin film absorber of incoming radiation. The bolometer design can also include a lithographic antenna with antenna termination and/or a back reflector beneath the membrane for optimal wavelength detection by the resonance circuit. The superconducting thermal detector (bolometer) and arrays of these detectors operate in a temperature range from 1 Kelvin to 10 Kelvin.
摘要翻译： 基于感测谐振器电路的幅度或相位的变化的THz（亚毫米）波辐射的超导热探测器（辐射热计），由电容器（Csh）和超导温度依赖电感器组成，其中所述电感器是热的 通过微悬浮液从热浴（芯片基板）分离。 测辐射热计设计包括位于膜上的薄膜电感器，单层或/和多层薄膜电容器和进入辐射的薄膜吸收器。 测辐射热计设计还可以包括具有天线终端的光刻天线和/或膜下方的后反射器，用于谐振电路的最佳波长检测。 超导热探测器（测辐射热计）和这些探测器的阵列在1开尔文到10开尔文的温度范围内工作。
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