METHOD FOR MANUFACTURING OPTICAL DEFLECTOR FOR FORMING DICING STREET WITH DOUBLE ETCHING
    2.
    发明申请
    METHOD FOR MANUFACTURING OPTICAL DEFLECTOR FOR FORMING DICING STREET WITH DOUBLE ETCHING 有权
    制造光学偏转器的方法,用于形成具有双重蚀刻的划痕街道

    公开(公告)号:US20130084661A1

    公开(公告)日:2013-04-04

    申请号:US13613847

    申请日:2012-09-13

    申请人: Yoshiaki YASUDA

    发明人: Yoshiaki YASUDA

    IPC分类号: H01L21/66

    摘要: A wafer-level optical deflector assembly is formed on a front surface side of a wafer. Then, the front surface side of the wafer is etched by using elements of the wafer-level optical deflector assembly, to form a front-side dicing street. Then, a transparent substrate with an inside cavity is adhered to the front surface side of the wafer. Then, a second etching mask is formed on a back surface side of the wafer. Then, the back surface side of the wafer is etched to create a back-side dicing street. Then, an adhesive sheet with a ring-shaped rim is adhered to the back surface side of the wafer. Then, the transparent substrate is removed. Finally, the ring-shaped rim is expanded to widen the front-side dicing street and the back-side dicing street to pick up optical deflectors one by one from the wafer.

    摘要翻译: 在晶片的前表面侧形成晶片级的光学偏转器组件。 然后,通过使用晶片级光偏转器组件的元件来蚀刻晶片的前表面侧,以形成前侧切割街。 然后,将具有内腔的透明基板粘附到晶片的前表面侧。 然后,在晶片的背面侧形成第二蚀刻掩模。 然后,蚀刻晶片的背面侧以形成背面切割街。 然后,将具有环形边缘的粘合片粘附到晶片的背面侧。 然后,去除透明基板。 最后,将环形边缘扩大,以扩大前侧切割街道和后侧切割街道,从晶片一个接一个地拾取光学偏转器。

    LIGHT SCATTERING ELEMENT, OPTICAL SCANNING DEVICE, AND IMAGE DISPLAYING DEVICE
    3.
    发明申请
    LIGHT SCATTERING ELEMENT, OPTICAL SCANNING DEVICE, AND IMAGE DISPLAYING DEVICE 有权
    光散射元件,光学扫描装置和图像显示装置

    公开(公告)号:US20120218615A1

    公开(公告)日:2012-08-30

    申请号:US13396952

    申请日:2012-02-15

    申请人: Yoshiaki YASUDA

    发明人: Yoshiaki YASUDA

    IPC分类号: G02B26/10

    摘要: A light scattering element 1 is equipped with a transparent, thin film-like optical element 2 which scatters incident laser light, and a thin film-like piezoelectric element 4, which is sandwiched between two electrodes 3a, 3b and which is laminated on a surface of the optical element 2 that is different from an optical scattering surface 2a. The light scattering element 1 averages a speckle pattern of laser light scatted by the optical scattering surface 2a and emitted therefrom by vibration of the piezoelectric element 4 generated when alternating voltage is applied between the two electrodes 3a, 3b.

    摘要翻译: 光散射元件1配备有散射入射激光的透明薄膜状光学元件2和夹在两个电极3a,3b之间并层叠在表面上的薄膜状压电元件4 不同于光散射面2a的光学元件2。 光散射元件1平均由光散射表面2a散射的激光的散斑图案,并且通过在两个电极3a,3b之间施加交流电压时产生的压电元件4的振动而发射。

    TOUCHSCREEN PANEL INPUT DEVICE MANUFACTURING METHOD, PIEZOELECTRIC ELEMENT AND TOUCHSCREEN PANEL INPUT DEVICE
    4.
    发明申请
    TOUCHSCREEN PANEL INPUT DEVICE MANUFACTURING METHOD, PIEZOELECTRIC ELEMENT AND TOUCHSCREEN PANEL INPUT DEVICE 审中-公开
    触控面板输入装置制造方法,压电元件和触控面板输入装置

    公开(公告)号:US20120075221A1

    公开(公告)日:2012-03-29

    申请号:US13242260

    申请日:2011-09-23

    申请人: Yoshiaki YASUDA

    发明人: Yoshiaki YASUDA

    摘要: A touchscreen panel input device is manufactured by forming a first adhesion layer and a second adhesion layer on a growth substrate, removing only the second adhesion layer from a selected region by irradiating laser, forming a growth base layer on the selected region where the second adhesion layer is removed and on the second adhesion layer and an oxide thin film having piezoelectricity on the growth base layer, transferring the oxide thin film layer on the selected region to a second substrate having first transparent electrodes by peeling-off, and adhering the second substrate to a third substrate having second transparent electrodes by placing the transferred oxide thin film layer between them. The touchscreen panel input device detects a pushing pressure in addition to a touch position with proving a tactile feedback.

    摘要翻译: 通过在生长基板上形成第一粘附层和第二粘合层,通过照射激光从选择区域除去第二粘附层来制造触摸屏面板输入装置,在所选择的区域上形成生长基底层,其中第二粘附 在第二粘合层上和在生长基底层上具有压电性的氧化物薄膜,通过剥离将选定区域上的氧化物薄膜层转印到具有第一透明电极的第二基板上,并且将第二基板 通过将转印的氧化物薄膜层放置在第三基板上而具有第二透明电极。 触摸屏面板输入装置除了触摸位置之外还检测推压压力,证明了触觉反馈。

    CONDUCTIVE SHEET AND ELECTRODE
    5.
    发明申请
    CONDUCTIVE SHEET AND ELECTRODE 有权
    导电片和电极

    公开(公告)号:US20110318642A1

    公开(公告)日:2011-12-29

    申请号:US13226010

    申请日:2011-09-06

    摘要: The present invention provides a conductive sheet having a surface resistance of 10 Ω/sq or lower on both surfaces, the conductive sheet comprising a sheet (A) and a sheet (B) laminated to the sheet (A), the sheet (A) having an apparent specific gravity of 0.05 g/cm3 to 0.50 g/cm3 and being formed from fibers having a diameter within the range between 3 and 20 μm, and the sheet (B) being formed from fibers having a diameter of 3 μm or smaller. The sheet (A) may be a fibrous material comprises an organic polymer fiber as its main component.

    摘要翻译: 本发明提供一种导电片,其表面电阻在两面上具有10Ω·cm 2 / sq以下的表面电阻,所述导电片包括层压到片材(A)上的片材(A)和片材(B),片材(A ),其表观比重为0.05g / cm 3至0.50g / cm 3,并且由直径在3至20μm之间的纤维形成,并且所述片材(B)由直径为3μm的纤维形成,或 较小。 片材(A)可以是以有机聚合物纤维为主要成分的纤维材料。

    DRIVER FOR OPTICAL DEFLECTOR USING COMPLEX-SINUSOIDAL-WAVE DRIVE VOLTAGES AND METHOD FOR SETTING THE SAME
    6.
    发明申请
    DRIVER FOR OPTICAL DEFLECTOR USING COMPLEX-SINUSOIDAL-WAVE DRIVE VOLTAGES AND METHOD FOR SETTING THE SAME 有权
    使用复杂的SINUSOIDAL-WAVE驱动电压的光学偏移器的驱动器及其设置方法

    公开(公告)号:US20120224240A1

    公开(公告)日:2012-09-06

    申请号:US13411101

    申请日:2012-03-02

    IPC分类号: G02B26/08

    CPC分类号: G02B26/0858

    摘要: A driver for driving an optical deflector includes a mirror, a movable frame for supporting the mirror, a support body surrounding the movable frame, and a first group of piezoelectric actuators and a second group of piezoelectric actuators alternating with the first group of piezoelectric actuators. A first drive voltage for the first group of piezoelectric actuators has first repeated waves each with a first rising period. A second drive voltage for the second group of piezoelectric actuators has second repeated waves each with a second falling period corresponding to the first rising period of the first drive voltage and a second rising period corresponding to the first falling period of the first drive voltage. Frequencies of the first and second repeated waves exclude natural frequencies of a mechanically-vibrating system of the mirror with respect to the axis thereof depending upon the piezoelectric actuators.

    摘要翻译: 用于驱动光偏转器的驱动器包括反射镜,用于支撑反射镜的可移动框架,围绕可移动框架的支撑体,以及与第一组压电致动器交替的第一组压电致动器和第二组压电致动器。 用于第一组压电致动器的第一驱动电压具有第一重复波,每个具有第一上升周期。 用于第二组压电致动器的第二驱动电压具有第二重复波,每个重复波具有对应于第一驱动电压的第一上升周期的第二下降周期和对应于第一驱动电压的第一下降周期的第二上升周期。 根据压电致动器,第一和第二重复波的频率相对于其轴线排除了反射镜的机械振动系统的固有频率。

    ACTUATOR DEVICE FOR OPTICAL DEFLECTOR
    7.
    发明申请
    ACTUATOR DEVICE FOR OPTICAL DEFLECTOR 有权
    用于光学偏移器的执行器装置

    公开(公告)号:US20100245966A1

    公开(公告)日:2010-09-30

    申请号:US12750714

    申请日:2010-03-31

    申请人: Yoshiaki YASUDA

    发明人: Yoshiaki YASUDA

    IPC分类号: G02B26/08

    CPC分类号: G02B26/0858 H01L41/0953

    摘要: An actuator device for optical deflector includes a base for mounting an optical deflector deflecting a light beam from a light source, at least one piezoelectric actuator translating and vibrating said base; and a supporting body supporting said piezoelectric actuator.

    摘要翻译: 用于光学偏转器的致动器装置包括用于安装偏转来自光源的光束的光学偏转器的基座,至少一个平移和振动所述基座的压电致动器; 以及支撑所述压电致动器的支撑体。