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    HOT PRESS MOLDING METHOD, ARTICLE MOLDED BY HOT PRESS MOLDING, AND MOLD FOR HOT PRESSING
    1.
    发明申请
    HOT PRESS MOLDING METHOD, ARTICLE MOLDED BY HOT PRESS MOLDING, AND MOLD FOR HOT PRESSING 审中-公开
    热压成型方法，通过热压成型制成的模具和热压模具

    公开(公告)号：US20140302341A1

    公开(公告)日：2014-10-09

    申请号：US14353624

    申请日：2011-12-26

    申请人： Tetsuji Egawa ,  Takanobu Suzuki ,  Hidetoshi Kimura ,  Hideaki Ikezawa ,  Kenji Kato ,  Masaki Furuhashi

    发明人： Tetsuji Egawa ,  Takanobu Suzuki ,  Hidetoshi Kimura ,  Hideaki Ikezawa ,  Kenji Kato ,  Masaki Furuhashi

    IPC分类号： B21J5/02

    CPC分类号： B21J5/02 ,  B21D22/022 ,  B21D22/208 ,  B21D37/16 ,  B21D53/88 ,  Y10T428/12389

    摘要： In a hot press molding method for press-molding a heated material and cooling the material while holding the material in a mold, during press molding of the material, shape changes including a portion that curves with respect to a longitudinal direction of the material are molded at longitudinal opposite end portions of the material and resistance to thermal contraction force of the material in the longitudinal direction during cooling is imparted. In one embodiment of the present invention, the shape changes molded on the material during the press molding are minute protrusions provided on surfaces of the longitudinal opposite end portions of the material. The invention makes it possible to suppress thermal contraction of the material during cooling in hot press molding to thereby prevent defects associated therewith.

    摘要翻译： 在加热材料的压制成型并将材料保持在模具中的同时冷却材料的热压成型方法中，在材料的压制成型期间，包括相对于材料的纵向方向弯曲的部分的形状变化 在材料的纵向相对端部处，并且赋予材料在冷却期间在纵向方向上的热收缩力的能力。 在本发明的一个实施例中，在压制成型期间模制在材料上的形状变化是在材料的纵向相对端部的表面上设置的微小突起。 本发明可以抑制热压成型时的冷却过程中材料的热收缩，从而防止与其相关的缺陷。

    Electrostatic chuck
    4.
    发明申请
    Electrostatic chuck 有权
    静电吸盘

    公开(公告)号：US20050207088A1

    公开(公告)日：2005-09-22

    申请号：US11001298

    申请日：2004-12-02

    申请人： Shinya Nishimoto ,  Hiroyuki Nakayama ,  Hidetoshi Kimura

    发明人： Shinya Nishimoto ,  Hiroyuki Nakayama ,  Hidetoshi Kimura

    IPC分类号： H01L21/68 ,  B23Q3/15 ,  H01L21/00 ,  H01L21/683 ,  H02H1/00

    CPC分类号： H01L21/67109 ,  H01L21/6831

    摘要： An electrostatic chuck for attracting and holding a substrate by using an electrostatic force includes a plurality of protrusion portions to be brought into contact with the substrate. The protrusion portions are formed of a ceramic dielectric including grains each having a specified particle diameter, and contact surfaces of the protrusion portions with the substrate are formed to have a surface roughness depending on the particle diameter.

    摘要翻译： 用于通过使用静电力吸引和保持基板的静电卡盘包括与基板接触的多个突出部分。 突出部由陶瓷电介质形成，该陶瓷电介质包括各自具有特定粒径的晶粒，并且突出部与基板的接触表面形成为具有取决于粒径的表面粗糙度。

    Magnetron plasma processing apparatus
    8.
    发明授权
    Magnetron plasma processing apparatus 有权
    磁控管等离子体处理装置

    公开(公告)号：US06764575B1

    公开(公告)日：2004-07-20

    申请号：US10069512

    申请日：2002-03-04

    申请人： Tomomi Yamasaki ,  Hidetoshi Kimura ,  Junichi Arami ,  Hiroo Ono ,  Akira Koshiishi ,  Koji Miyata

    发明人： Tomomi Yamasaki ,  Hidetoshi Kimura ,  Junichi Arami ,  Hiroo Ono ,  Akira Koshiishi ,  Koji Miyata

    IPC分类号： C23C1434

    CPC分类号： H01J37/3266 ,  H01J37/3408

    摘要： When a substrate 30 is to be subjected to a magnetron plasma process, a dipole ring magnet 21 is provided, in which a large number of anisotropic segment magnets 22 are arranged in a ring-like shape around the outer wall of a chamber 1. A magnetic field gradient, wherein the magnetic field strength decreases from the E pole side toward the W pole side in a direction perpendicular to a magnetic field direction B, is formed in a plane perpendicular to the direction of an electric field between a pair of electrodes separated from each other. The anisotropic segment magnets have a first section a including anisotropic segment magnets arranged in the vicinity of a region A located outside an E pole side end of the process substrate with an N pole thereof being directed toward this region, and a second portion b including anisotropic segment magnets arranged with an S pole thereof being directed toward this region, to locally increase the magnetic field strengths of the first and second regions.

    摘要翻译： 当对基板30进行磁控管等离子体处理时，设置偶极环磁体21，其中大量的各向异性磁体22围绕室1的外壁排列成环状。 其磁场强度在与磁场方向B垂直的方向从E极侧朝向W极侧的磁场强度形成在与分离的一对电极之间的电场方向垂直的面内 从彼此。 各向异性区段磁体具有第一区段a，其包括各向异性区段磁体，其布置在位于处理衬底的E极侧端外侧的区域A的附近，其N极指向该区域，第二部分b包括各向异性 将其S极布置的段磁体指向该区域，以局部地增加第一和第二区域的磁场强度。

    Apparatus for attaching belt-like materials
    10.
    发明授权
    Apparatus for attaching belt-like materials 失效
    用于安装带状材料的装置

    公开(公告)号：US4844768A

    公开(公告)日：1989-07-04

    申请号：US181346

    申请日：1988-04-14

    申请人： Hidetoshi Kimura

    发明人： Hidetoshi Kimura

    IPC分类号： B29D30/30

    CPC分类号： B29D30/3007 ,  B29D2030/463 ,  Y10T156/13

    摘要： An apparatus for attaching belt-like materials has a rotating unit for rotating a forming drum, a holding unit located apart from the forming drum for holding continuous belt-like materials along entire widths to be supplied to the forming drum, embracing units located between the forming drum and the holding units for embracing the belt-like materials along entire widths. A reciprocating unit is used for reciprocating the embracing units between the holding unit and the forming drum. A cutting unit is used for cutting in width directions the belt-like materials held by the holding unit and the embracing units. The apparatus includes control unit for controlling the rotating unit and the reciprocating unit so that circumferential speeds of the forming drum and moving speeds of the embracing means are at a constant ratio.

    摘要翻译： 用于安装带状材料的装置具有用于旋转成形滚筒的旋转单元，与成形滚筒隔开的保持单元，用于沿着整个宽度保持连续的带状材料以供应到成形滚筒，包围单元位于 成形鼓和用于沿着整个宽度包围带状材料的保持单元。 往复运动单元用于使保持单元和成形滚筒之间的包围单元往复运动。 切割单元用于在宽度方向上切割由保持单元和包围单元保持的带状材料。 该装置包括用于控制旋转单元和往复运动单元的控制单元，使得成形滚筒的圆周速度和包围装置的移动速度保持恒定的比例。