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公开(公告)号：US6146551A
公开(公告)日：2000-11-14
申请号：US322140
申请日：1999-05-28
申请人： Tetsuji Hayasaki , Masahiro Okumura
发明人： Tetsuji Hayasaki , Masahiro Okumura
CPC分类号： G11B5/7315 , C04B35/20 , H01B1/08
摘要： A semiconductive ceramic contains a compound of MgO and SiO.sub.2 as a main component, and an iron oxide such as FeO, Fe.sub.2 O.sub.3, and Fe.sub.3 O.sub.4 as an electric conductivity provider. According to necessity, the semiconductive ceramic further contains at least one of zinc oxide, niobium oxide, and chromium oxide as an electric conductivity provider. The semiconductive ceramic has a desired electric conductivity and a mechanical strength required for structural material, thus being usable in various applications.
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2.发明授权公开(公告)号：US06558582B1
公开(公告)日：2003-05-06
申请号：US09706916
申请日：2000-11-06
申请人： Tetsuji Hayasaki , Masahiro Okumura
发明人： Tetsuji Hayasaki , Masahiro Okumura
IPC分类号： H01B106
CPC分类号： G11B5/7315 , C04B35/20 , H01B1/08
摘要： A semiconductive ceramic contains a compound of MgO and SiO2 as a main component, and an iron oxide such as FeO, Fe2O3, and Fe3O4 as an electric conductivity provider. According to necessity, the semiconductive ceramic further contains at least one of zinc oxide, niobium oxide, and chromium oxide as an electric conductivity provider. The semiconductive ceramic has a desired electric conductivity and a mechanical strength required for structural material, thus being usable in various applications.
摘要翻译： 半导体陶瓷含有作为主要成分的MgO和SiO 2的化合物，FeO，Fe 2 O 3和Fe 3 O 4等氧化铁作为电导率提供剂。 根据需要，半导体陶瓷还含有作为电导率提供者的氧化锌，氧化铌和氧化铬中的至少一种。 半导体陶瓷具有所需的导电性和结构材料所需的机械强度，因此可用于各种应用。
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3.发明申请Corrosion-Resistant Member, Treatment Apparatus and Sample Treatment Method Using the Member, and Method for Manufacture of Corrosion-Resistant Member 有权耐腐蚀构件，使用该构件的处理装置和样品处理方法以及耐腐蚀构件的制造方法公开(公告)号：US20080283499A1
公开(公告)日：2008-11-20
申请号：US12065276
申请日：2007-03-08
IPC分类号： C04B35/10 , H01L21/306 , C23C16/00
CPC分类号： C04B35/44 , C04B35/117 , C04B35/6261 , C04B35/62655 , C04B35/63416 , C04B2235/3206 , C04B2235/3217 , C04B2235/3222 , C04B2235/3225 , C04B2235/5436 , C04B2235/5445 , C04B2235/6562 , C04B2235/6565 , C04B2235/6567 , C04B2235/72 , C04B2235/764 , C04B2235/77 , C04B2235/78 , C04B2235/785 , C04B2235/786 , C04B2235/80 , C04B2235/85 , C04B2235/96 , C04B2235/9669
摘要： Disclosed is a corrosion resistant member comprising a sintered material having an α-Al2O3 crystal and an YAG (yttrium-aluminum-garnet) crystal. The corrosion resistant member contains metal elements, 70 to 98% by mass (inclusive) of Al in terms of Al2O3 and 2 to 30% by mass of Y in terms of Y2O3. The corrosion resistant member has a peak intensity ratio I116/I104 within the range from 0.94 to 1.98, preferably. 2.21 or higher, wherein I116 and I104 represent peak intensities attributed to the (116) face and the (104) face, respectively, of an α-Al2O3 crystal as measured by X-ray diffractometry on its surface layer.
摘要翻译： 公开了一种耐腐蚀构件，其包括具有α-Al 2 O 3结晶和YAG（钇 - 铝 - 石榴石）晶体的烧结材料。 耐腐蚀构件包含以Al 2 O 3 3为基准含有70〜98质量％（以下）Al的金属元素和2〜30质量％的Y 术语Y 2 O 3 3。 耐腐蚀构件的峰强度比I> 116 / I×104在0.94至1.98的范围内，优选地。 2.21或更高，其中I 116和I 104分别表示归因于α-Al
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公开(公告)号：US20050282034A1
公开(公告)日：2005-12-22
申请号：US11194126
申请日：2005-07-28
IPC分类号： C23C14/08 , B32B9/00 , C04B41/50 , C04B41/52 , C04B41/87 , C23C4/10 , C23C4/12 , C23C4/18 , C23C16/44 , C23C28/04 , H01J37/32
CPC分类号： C04B41/5045 , C04B41/009 , C04B41/52 , C04B41/87 , C04B2111/0025 , C23C4/10 , C23C4/12 , C23C14/08 , C23C16/4404 , H01J37/32477 , Y10T428/12611 , Y10T428/12667 , C04B41/4527 , C04B41/4533 , C04B35/10
摘要： A corrosion resistant member comprising a base material made of ceramics or a metal and at least one layer of corrosion resistant film formed on the surface of the former. At least one layer of the corrosion resistant film is a corrosion resistant film formed from a compound of the group 3 element as the main component and has specific characteristics so that it can improve film property.
摘要翻译： 一种耐腐蚀构件，包括由陶瓷或金属制成的基材和在前者的表面上形成的至少一层耐腐蚀膜。 至少一层耐腐蚀膜是由作为主要组分的第3族元素的化合物形成的耐腐蚀膜，并且具有特定的特性，从而可以提高膜的性能。
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公开(公告)号：US07384696B2
公开(公告)日：2008-06-10
申请号：US11194126
申请日：2005-07-28
CPC分类号： C04B41/5045 , C04B41/009 , C04B41/52 , C04B41/87 , C04B2111/0025 , C23C4/10 , C23C4/12 , C23C14/08 , C23C16/4404 , H01J37/32477 , Y10T428/12611 , Y10T428/12667 , C04B41/4527 , C04B41/4533 , C04B35/10
摘要： A corrosion resistant member comprising a base material made of ceramics or a metal and at least one layer of corrosion resistant film formed on the surface of the former. At least one layer of the corrosion resistant film is a corrosion resistant film formed from a compound of the group 3 element as the main component and has specific characteristics so that it can improve film property.
摘要翻译： 一种耐腐蚀构件，包括由陶瓷或金属制成的基材和在前者的表面上形成的至少一层耐腐蚀膜。 至少一层耐腐蚀膜是由作为主要组分的第3族元素的化合物形成的耐腐蚀膜，并且具有特定的特性，从而可以提高膜的性能。
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6.发明授权Corrosion-resistant member, treatment apparatus and sample treatment method using the member, and method for manufacture of corrosion-resistant member 有权使用该构件的耐腐蚀构件，处理装置和样品处理方法以及耐腐蚀构件的制造方法公开(公告)号：US08357262B2
公开(公告)日：2013-01-22
申请号：US12065276
申请日：2006-08-30
IPC分类号： C04B35/10 , H01L21/306 , C23C16/00
CPC分类号： C04B35/44 , C04B35/117 , C04B35/6261 , C04B35/62655 , C04B35/63416 , C04B2235/3206 , C04B2235/3217 , C04B2235/3222 , C04B2235/3225 , C04B2235/5436 , C04B2235/5445 , C04B2235/6562 , C04B2235/6565 , C04B2235/6567 , C04B2235/72 , C04B2235/764 , C04B2235/77 , C04B2235/78 , C04B2235/785 , C04B2235/786 , C04B2235/80 , C04B2235/85 , C04B2235/96 , C04B2235/9669
摘要： Disclosed is a corrosion resistant member comprising a sintered material having an α-Al2O3 crystal and an YAG (yttrium-aluminum-garnet) crystal. The corrosion resistant member contains metal elements, 70 to 98% by mass (inclusive) of Al in terms of Al2O3 and 2 to 30% by mass of Y in terms of Y2O3. The corrosion resistant member has a peak intensity ratio I116/I104 within the range from 0.94 to 1.98, preferably. 2.21 or higher, wherein I116 and I104 represent peak intensities attributed to the (116) face and the (104) face, respectively, of an α-Al2O3 crystal as measured by X-ray diffractometry on its surface layer.
摘要翻译： 公开了一种耐腐蚀构件，其包括具有α-Al 2 O 3晶体和YAG（钇 - 铝 - 石榴石）晶体的烧结材料。 耐腐蚀性构件含有以Al2O3计为70〜98质量％的Al，以Y 2 O 3换算为2〜30质量％的Y的金属元素。 耐腐蚀构件的峰强度比I116 / I104优选为0.94〜1.98。 2.21或更高，其中I116和I104分别表示通过其表面层上的X射线衍射法测量的α-Al 2 O 3晶体的（116）面和（104）面的峰强度。
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公开(公告)号：US07569280B2
公开(公告)日：2009-08-04
申请号：US12113845
申请日：2008-05-01
CPC分类号： C23C14/564 , C23C4/11 , C23C14/083 , C23C16/4404 , C23C28/042 , C23C28/044
摘要： A corrosion resistant member comprising a base material made of ceramics or a metal and at least one layer of corrosion resistant film formed on the surface of the former. At least one layer of the corrosion resistant film is a corrosion resistant film formed from a compound of the group 3 element as the main component and has specific characteristics so that it can improve film property.
摘要翻译： 一种耐腐蚀构件，包括由陶瓷或金属制成的基材和在前者的表面上形成的至少一层耐腐蚀膜。 至少一层耐腐蚀膜是由作为主要组分的第3族元素的化合物形成的耐腐蚀膜，并且具有特定的特性，从而可以提高膜的性能。
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公开(公告)号：US20080292890A1
公开(公告)日：2008-11-27
申请号：US12113845
申请日：2008-05-01
CPC分类号： C23C14/564 , C23C4/11 , C23C14/083 , C23C16/4404 , C23C28/042 , C23C28/044
摘要： A corrosion resistant member comprising a base material made of ceramics or a metal and at least one layer of corrosion resistant film formed on the surface of the former. At least one layer of the corrosion resistant film is a corrosion resistant film formed from a compound of the group 3 element as the main component and has specific characteristics so that it can improve film property.
摘要翻译： 一种耐腐蚀构件，包括由陶瓷或金属制成的基材和在前者的表面上形成的至少一层耐腐蚀膜。 至少一层耐腐蚀膜是由作为主要组分的第3族元素的化合物形成的耐腐蚀膜，并且具有特定的特性，从而可以提高膜的性能。
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